JP4343864B2 - 基板の搬送装置及び搬送方法 - Google Patents
基板の搬送装置及び搬送方法 Download PDFInfo
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- JP4343864B2 JP4343864B2 JP2005059453A JP2005059453A JP4343864B2 JP 4343864 B2 JP4343864 B2 JP 4343864B2 JP 2005059453 A JP2005059453 A JP 2005059453A JP 2005059453 A JP2005059453 A JP 2005059453A JP 4343864 B2 JP4343864 B2 JP 4343864B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/918—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Robotics (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Supply And Installment Of Electrical Components (AREA)
Description
装置本体と、
この装置本体に設けられ上記基板を吸着保持する複数の吸着保持部と、
上記装置本体に設けられ先端部が上記吸着保持部によって保持された基板の下面に対向する状態と基板の下面から退避する状態とに駆動可能かつ上記基板の下面に対向する状態において基板に設けられて下方へ撓んだ電子部品と接触しない間隔で設けられたサポート部材と
を具備したことを特徴とする基板の搬送装置にある。
各側辺部にはそれぞれ複数の上記第1のグループの吸着保持部と上記第2のグループの吸着保持部とが設けられていることが好ましい。
それぞれの側辺部に設けられた複数のサポート部材は駆動源によって駆動されるリンクよって連動する構成であることが好ましい。
上記基板を上記搬送装置に設けられた複数の吸着保持部によって吸着保持する工程と、
吸着保持された基板の下面に下方へ撓んだ上記電子部品に当たることのない間隔を保ってサポート部材を対向させて上記基板が搬送装置から落下するのを阻止する工程と、
落下が阻止された基板を上記搬送装置によって搬送する工程と
を具備したことを特徴とする基板の搬送方法にある。
図1乃至図5はこの発明の一実施の形態を示す。図1は搬送装置を構成する矩形状の装置本体1の平面図である。この装置本体1は平行に離間対向した一対の横桟2aと、これら横桟2aの両端に連結された一対の縦桟2bとによって矩形枠状に形成されている。
Claims (6)
- 周辺部に可撓性の電子部品が一端部を接続して他端部を外方へ突出させるとともに下方へ撓ませて設けられた基板を搬送する搬送装置であって、
装置本体と、
この装置本体に設けられ上記基板を吸着保持する複数の吸着保持部と、
上記装置本体に設けられ先端部が上記吸着保持部によって保持された基板の下面に対向する状態と基板の下面から退避する状態とに駆動可能かつ上記基板の下面に対向する状態において基板に設けられて下方へ撓んだ電子部品と接触しない間隔で設けられたサポート部材と
を具備したことを特徴とする基板の搬送装置。 - 複数の吸着保持部は、第1の吸引管路に接続された第1のグループと、第2の吸引管路に接続された第2のグループとに分けられていることを特徴とする請求項1記載の基板の搬送装置。
- 上記装置本体の対向する一対の側辺部にそれぞれ複数の上記吸着保持部が設けられていて、
各側辺部にはそれぞれ複数の上記第1のグループの吸着保持部と上記第2のグループの吸着保持部とが設けられていることを特徴とする請求項2記載の基板の搬送装置。 - 上記装置本体の対向する一対の側辺部にはそれぞれ複数の上記サポート部材が水平方向に回転可能に設けられていて、
それぞれの側辺部に設けられた複数のサポート部材は駆動源によって駆動されるリンクよって連動する構成であることを特徴とする請求項1記載の基板の搬送装置。 - 上記サポート部材は、位置決め手段によって上記電子部品と接触しないよう上下方向の位置決め調整可能に設けられていることを特徴とする請求項1記載の基板の搬送装置。
- 周辺部に可撓性の電子部品が一端部を接続して他端部を外方へ突出させるとともに下方へ撓ませて設けられた基板を搬送装置によって搬送する搬送方法であって、
上記基板を上記搬送装置に設けられた複数の吸着保持部によって吸着保持する工程と、
吸着保持された基板の下面に下方へ撓んだ上記電子部品に当たることのない間隔を保ってサポート部材を対向させて上記基板が搬送装置から落下するのを阻止する工程と、
落下が阻止された基板を上記搬送装置によって搬送する工程と
を具備したことを特徴とする基板の搬送方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005059453A JP4343864B2 (ja) | 2004-03-31 | 2005-03-03 | 基板の搬送装置及び搬送方法 |
KR1020050026731A KR100636302B1 (ko) | 2004-03-31 | 2005-03-30 | 기판의 반송 장치 및 반송 방법 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2004108033 | 2004-03-31 | ||
JP2005059453A JP4343864B2 (ja) | 2004-03-31 | 2005-03-03 | 基板の搬送装置及び搬送方法 |
Publications (2)
Publication Number | Publication Date |
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JP2005314107A JP2005314107A (ja) | 2005-11-10 |
JP4343864B2 true JP4343864B2 (ja) | 2009-10-14 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2005059453A Active JP4343864B2 (ja) | 2004-03-31 | 2005-03-03 | 基板の搬送装置及び搬送方法 |
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JP (1) | JP4343864B2 (ja) |
KR (1) | KR100636302B1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110198901A (zh) * | 2017-01-27 | 2019-09-03 | 日本电产三协株式会社 | 面板搬运机器人及面板搬运系统 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007157996A (ja) * | 2005-12-05 | 2007-06-21 | Tokyo Seimitsu Co Ltd | ワーク搬送装置及びワーク搬送方法 |
KR20110136807A (ko) * | 2009-03-11 | 2011-12-21 | 파나소닉 주식회사 | 기판 반송 처리 시스템 및 기판 반송 처리 방법, 및 부품 실장 장치 및 방법 |
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2005
- 2005-03-03 JP JP2005059453A patent/JP4343864B2/ja active Active
- 2005-03-30 KR KR1020050026731A patent/KR100636302B1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110198901A (zh) * | 2017-01-27 | 2019-09-03 | 日本电产三协株式会社 | 面板搬运机器人及面板搬运系统 |
Also Published As
Publication number | Publication date |
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KR100636302B1 (ko) | 2006-10-18 |
KR20060045041A (ko) | 2006-05-16 |
JP2005314107A (ja) | 2005-11-10 |
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