JP4332850B2 - 半導体マイクロホン - Google Patents
半導体マイクロホン Download PDFInfo
- Publication number
- JP4332850B2 JP4332850B2 JP2003413937A JP2003413937A JP4332850B2 JP 4332850 B2 JP4332850 B2 JP 4332850B2 JP 2003413937 A JP2003413937 A JP 2003413937A JP 2003413937 A JP2003413937 A JP 2003413937A JP 4332850 B2 JP4332850 B2 JP 4332850B2
- Authority
- JP
- Japan
- Prior art keywords
- coil
- semiconductor
- vibration film
- conductive
- microphone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title description 102
- 239000000463 material Substances 0.000 claims description 78
- 230000010355 oscillation Effects 0.000 claims description 49
- 239000012528 membrane Substances 0.000 claims description 45
- 230000008859 change Effects 0.000 claims description 20
- 239000004020 conductor Substances 0.000 claims description 18
- 229920001721 polyimide Polymers 0.000 claims description 5
- 239000010408 film Substances 0.000 description 92
- 239000003990 capacitor Substances 0.000 description 30
- 230000004907 flux Effects 0.000 description 28
- 230000035699 permeability Effects 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 14
- 238000005476 soldering Methods 0.000 description 14
- 230000005540 biological transmission Effects 0.000 description 13
- 230000007423 decrease Effects 0.000 description 8
- 239000004033 plastic Substances 0.000 description 8
- 239000010409 thin film Substances 0.000 description 8
- 239000002994 raw material Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000012811 non-conductive material Substances 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000002788 crimping Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 230000005236 sound signal Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
Images
Landscapes
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003413937A JP4332850B2 (ja) | 2003-11-09 | 2003-11-09 | 半導体マイクロホン |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003413937A JP4332850B2 (ja) | 2003-11-09 | 2003-11-09 | 半導体マイクロホン |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005143065A JP2005143065A (ja) | 2005-06-02 |
| JP2005143065A5 JP2005143065A5 (enExample) | 2007-01-25 |
| JP4332850B2 true JP4332850B2 (ja) | 2009-09-16 |
Family
ID=34696950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003413937A Expired - Fee Related JP4332850B2 (ja) | 2003-11-09 | 2003-11-09 | 半導体マイクロホン |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4332850B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5162796B2 (ja) * | 2008-03-11 | 2013-03-13 | 株式会社オーディオテクニカ | デジタルマイクロホン |
| JP2012178619A (ja) * | 2009-06-25 | 2012-09-13 | Gbs:Kk | 半導体マイクロホン |
| CN112954557B (zh) * | 2021-03-01 | 2023-03-28 | 潍坊歌尔微电子有限公司 | 麦克风和电子设备 |
-
2003
- 2003-11-09 JP JP2003413937A patent/JP4332850B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005143065A (ja) | 2005-06-02 |
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