JP4304334B2 - 3次元多孔質シリコン構造を用いたマイクロ燃料改質器 - Google Patents
3次元多孔質シリコン構造を用いたマイクロ燃料改質器 Download PDFInfo
- Publication number
- JP4304334B2 JP4304334B2 JP2003403973A JP2003403973A JP4304334B2 JP 4304334 B2 JP4304334 B2 JP 4304334B2 JP 2003403973 A JP2003403973 A JP 2003403973A JP 2003403973 A JP2003403973 A JP 2003403973A JP 4304334 B2 JP4304334 B2 JP 4304334B2
- Authority
- JP
- Japan
- Prior art keywords
- porous silicon
- fuel
- dimensional porous
- silicon structure
- reforming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000446 fuel Substances 0.000 title claims description 80
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 65
- 229910021426 porous silicon Inorganic materials 0.000 title claims description 52
- 229910052710 silicon Inorganic materials 0.000 claims description 29
- 239000010703 silicon Substances 0.000 claims description 29
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 24
- 239000003054 catalyst Substances 0.000 claims description 23
- 238000002407 reforming Methods 0.000 claims description 22
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 20
- 239000001257 hydrogen Substances 0.000 claims description 20
- 229910052739 hydrogen Inorganic materials 0.000 claims description 20
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 12
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 12
- 239000005486 organic electrolyte Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 10
- 239000012530 fluid Substances 0.000 claims description 7
- 230000003647 oxidation Effects 0.000 claims description 7
- 238000007254 oxidation reaction Methods 0.000 claims description 7
- 239000004215 Carbon black (E152) Substances 0.000 claims description 4
- 238000002048 anodisation reaction Methods 0.000 claims description 4
- 229930195733 hydrocarbon Natural products 0.000 claims description 4
- 150000002430 hydrocarbons Chemical class 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims 1
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- 210000004027 cell Anatomy 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052707 ruthenium Inorganic materials 0.000 description 4
- 239000001273 butane Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000001000 micrograph Methods 0.000 description 3
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 3
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 210000005056 cell body Anatomy 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- TVZPLCNGKSPOJA-UHFFFAOYSA-N copper zinc Chemical compound [Cu].[Zn] TVZPLCNGKSPOJA-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000006057 reforming reaction Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
Landscapes
- Hydrogen, Water And Hydrids (AREA)
- Fuel Cell (AREA)
Description
2 シリコンウエハ
3 表面
4 流路溝
5 集合部
6 覆い板
7 燃料反応流路
10 シリコンウエハ
11 ガラスウエハ
12 覆い板
13 流路溝
14 集合部
15 燃料反応流路
Claims (4)
- シリコン基板上に微細な流路溝を形成し、
前記流路溝表面に対してフッ化水素またはジメチルホルムアルデヒドを含む有機電解質を使って、電気化学の陽極酸化によって表面からほぼ直角方向に形成された、微細孔からなる3次元多孔質シリコン構造を製作し、
前記3次元多孔質シリコン構造表面に水素含有燃料を改質して水素を発生する触媒を担持させ、
前記流路溝を覆うことにより燃料改質用流体流路を形成したことを特徴とする3次元多孔質シリコン構造を用いたマイクロ燃料改質器。 - シリコン基板上にガラス薄板を載置固定し、
前記ガラス薄板の厚さ方向に貫通する微細な流路溝を形成し、
前記流路溝表面に対してフッ化水素またはジメチルホルムアルデヒドを含む有機電解質を使って、電気化学の陽極酸化によって表面からほぼ直角方向に形成された、微細孔からなる3次元多孔質シリコン構造を製作し、
前記3次元多孔質シリコン構造表面に炭化水素燃料を改質して水素を発生する触媒を担持させ、
前記流路溝を覆うことにより燃料改質用流体流路を形成したことを特徴とする3次元多孔質シリコン構造を用いたマイクロ燃料改質器。 - 無底箱状に形成されるシリコン内に平行に複数の多孔質シリコン部を形成し、
前記多孔質シリコン部表面に対してフッ化水素またはジメチルホルムアルデヒドを含む有機電解質を使って、電気化学の陽極酸化によって表面からほぼ直角方向に形成された、微細孔からなる3次元多孔質シリコン構造を製作し、
前記3次元多孔質シリコン構造表面に炭化水素燃料を改質して水素を発生する触媒を担持させ、
前記シリコン内の空間に前記多孔質シリコン部に対して直角方向に燃料を流通するように構成したことを特徴とする3次元多孔質シリコン構造を用いたマイクロ燃料改質器。 - 前記有機電解質として、HFまたはDMFを用いたことを特徴とする請求項1または2記載の3次元多孔質シリコン構造を用いたマイクロ燃料改質器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003403973A JP4304334B2 (ja) | 2003-12-03 | 2003-12-03 | 3次元多孔質シリコン構造を用いたマイクロ燃料改質器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003403973A JP4304334B2 (ja) | 2003-12-03 | 2003-12-03 | 3次元多孔質シリコン構造を用いたマイクロ燃料改質器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005166453A JP2005166453A (ja) | 2005-06-23 |
JP4304334B2 true JP4304334B2 (ja) | 2009-07-29 |
Family
ID=34727075
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003403973A Expired - Lifetime JP4304334B2 (ja) | 2003-12-03 | 2003-12-03 | 3次元多孔質シリコン構造を用いたマイクロ燃料改質器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4304334B2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100674864B1 (ko) * | 2005-09-29 | 2007-01-29 | 삼성전기주식회사 | 열특성이 우수한 연료 전지용 개질기 |
KR100691368B1 (ko) | 2005-10-10 | 2007-03-09 | 삼성전기주식회사 | 증발 부의 배압을 감소시킨 박형 개질 기 |
KR100755608B1 (ko) | 2006-04-19 | 2007-09-06 | 삼성전기주식회사 | 마이크로 유로 내의 촉매 충전방법 |
KR100732654B1 (ko) | 2006-04-26 | 2007-06-28 | 재단법인서울대학교산학협력재단 | 실리콘 분리판의 제조방법 |
KR100764936B1 (ko) | 2006-09-29 | 2007-10-09 | 한국과학기술원 | 다공질 실리콘 지지체를 적용한 마이크로 촉매 연소기 및그 제조 방법 |
JP2009066482A (ja) * | 2007-09-11 | 2009-04-02 | Casio Comput Co Ltd | 反応装置 |
FI20096334A0 (fi) | 2009-12-15 | 2009-12-15 | Valtion Teknillinen | Menetelmä nestevirtausta ohjaavien rakennekerrosten valmistamiseksi huokoisille substraattikalvoille |
CN110294454A (zh) * | 2019-05-22 | 2019-10-01 | 江苏大学 | 一种高深宽比中阻p型宏孔硅结构及其快速制备方法 |
-
2003
- 2003-12-03 JP JP2003403973A patent/JP4304334B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
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JP2005166453A (ja) | 2005-06-23 |
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