JP4298105B2 - 干渉縞測定解析方法 - Google Patents

干渉縞測定解析方法 Download PDF

Info

Publication number
JP4298105B2
JP4298105B2 JP2000008806A JP2000008806A JP4298105B2 JP 4298105 B2 JP4298105 B2 JP 4298105B2 JP 2000008806 A JP2000008806 A JP 2000008806A JP 2000008806 A JP2000008806 A JP 2000008806A JP 4298105 B2 JP4298105 B2 JP 4298105B2
Authority
JP
Japan
Prior art keywords
interference fringe
measured
analysis method
optical
interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000008806A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001201326A (ja
JP2001201326A5 (enExample
Inventor
伸明 植木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujinon Corp
Original Assignee
Fujinon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujinon Corp filed Critical Fujinon Corp
Priority to JP2000008806A priority Critical patent/JP4298105B2/ja
Publication of JP2001201326A publication Critical patent/JP2001201326A/ja
Publication of JP2001201326A5 publication Critical patent/JP2001201326A5/ja
Application granted granted Critical
Publication of JP4298105B2 publication Critical patent/JP4298105B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2000008806A 2000-01-18 2000-01-18 干渉縞測定解析方法 Expired - Fee Related JP4298105B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000008806A JP4298105B2 (ja) 2000-01-18 2000-01-18 干渉縞測定解析方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000008806A JP4298105B2 (ja) 2000-01-18 2000-01-18 干渉縞測定解析方法

Publications (3)

Publication Number Publication Date
JP2001201326A JP2001201326A (ja) 2001-07-27
JP2001201326A5 JP2001201326A5 (enExample) 2006-12-07
JP4298105B2 true JP4298105B2 (ja) 2009-07-15

Family

ID=18537023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000008806A Expired - Fee Related JP4298105B2 (ja) 2000-01-18 2000-01-18 干渉縞測定解析方法

Country Status (1)

Country Link
JP (1) JP4298105B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5149486B2 (ja) * 2005-05-18 2013-02-20 株式会社ミツトヨ 干渉計、形状測定方法
KR101464695B1 (ko) * 2013-05-03 2014-11-27 (주)프로옵틱스 멀티 간섭 위상 동시 측정기능을 갖는 간섭계
CN109190310B (zh) * 2018-10-25 2022-06-03 福建师范大学 基于matlab平台的干涉条纹波面重建方法

Also Published As

Publication number Publication date
JP2001201326A (ja) 2001-07-27

Similar Documents

Publication Publication Date Title
JP3856838B2 (ja) 物体の形状を測定する方法および装置
US6268923B1 (en) Optical method and system for measuring three-dimensional surface topography of an object having a surface contour
US7130059B2 (en) Common-path frequency-scanning interferometer
JP4505807B2 (ja) 多重化スペクトル干渉光コヒーレンストモグラフィー
US7057742B2 (en) Frequency-scanning interferometer with non-specular reference surface
JP3955899B2 (ja) 電子的スペックル干渉法を用いた変形計測方法および装置
US7177029B2 (en) Stroboscopic interferometry with frequency domain analysis
US20040130730A1 (en) Fast 3D height measurement method and system
Bowe et al. White light interferometric surface profiler
JP2011154042A (ja) 波面操作および改良３ｄ測定方法および装置
US20110261347A1 (en) Method for interferometric detection of surfaces
Dhanasekar et al. Digital speckle interferometry for assessment of surface roughness
US6624893B1 (en) Correction of scanning errors in interferometric profiling
JP4183220B2 (ja) 光学球面曲率半径測定装置
JP4144828B2 (ja) 干渉縞測定解析方法
US20130235385A1 (en) Surface shape measurement method and measurement apparatus
JP4298105B2 (ja) 干渉縞測定解析方法
JPH10281738A (ja) 干渉計測方法および干渉計測装置
JP4081538B2 (ja) 透明平行平板の干渉縞解析方法
JPH10221032A (ja) 干渉計測方法および干渉計測装置
JP5518187B2 (ja) 変形計測方法
JP4218919B2 (ja) 干渉縞解析方法
JPH11218411A (ja) 干渉計測方法および干渉計測装置
JPH07190737A (ja) シアリング干渉計測方法及びシアリング干渉計
JP2003090765A (ja) 波長ゆらぎ測定方法および装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20061023

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20061023

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20080821

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080828

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20081016

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090108

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090303

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090409

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090415

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120424

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120424

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120424

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120424

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130424

Year of fee payment: 4

LAPS Cancellation because of no payment of annual fees