JP2001201326A5 - - Google Patents

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Publication number
JP2001201326A5
JP2001201326A5 JP2000008806A JP2000008806A JP2001201326A5 JP 2001201326 A5 JP2001201326 A5 JP 2001201326A5 JP 2000008806 A JP2000008806 A JP 2000008806A JP 2000008806 A JP2000008806 A JP 2000008806A JP 2001201326 A5 JP2001201326 A5 JP 2001201326A5
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JP
Japan
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JP2000008806A
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Japanese (ja)
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JP2001201326A (ja
JP4298105B2 (ja
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Priority to JP2000008806A priority Critical patent/JP4298105B2/ja
Priority claimed from JP2000008806A external-priority patent/JP4298105B2/ja
Publication of JP2001201326A publication Critical patent/JP2001201326A/ja
Publication of JP2001201326A5 publication Critical patent/JP2001201326A5/ja
Application granted granted Critical
Publication of JP4298105B2 publication Critical patent/JP4298105B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000008806A 2000-01-18 2000-01-18 干渉縞測定解析方法 Expired - Fee Related JP4298105B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000008806A JP4298105B2 (ja) 2000-01-18 2000-01-18 干渉縞測定解析方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000008806A JP4298105B2 (ja) 2000-01-18 2000-01-18 干渉縞測定解析方法

Publications (3)

Publication Number Publication Date
JP2001201326A JP2001201326A (ja) 2001-07-27
JP2001201326A5 true JP2001201326A5 (enExample) 2006-12-07
JP4298105B2 JP4298105B2 (ja) 2009-07-15

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ID=18537023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000008806A Expired - Fee Related JP4298105B2 (ja) 2000-01-18 2000-01-18 干渉縞測定解析方法

Country Status (1)

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JP (1) JP4298105B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5149486B2 (ja) * 2005-05-18 2013-02-20 株式会社ミツトヨ 干渉計、形状測定方法
KR101464695B1 (ko) * 2013-05-03 2014-11-27 (주)프로옵틱스 멀티 간섭 위상 동시 측정기능을 갖는 간섭계
CN109190310B (zh) * 2018-10-25 2022-06-03 福建师范大学 基于matlab平台的干涉条纹波面重建方法

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