JP4294798B2 - 超音波トランスデューサ - Google Patents

超音波トランスデューサ Download PDF

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JP4294798B2
JP4294798B2 JP19638299A JP19638299A JP4294798B2 JP 4294798 B2 JP4294798 B2 JP 4294798B2 JP 19638299 A JP19638299 A JP 19638299A JP 19638299 A JP19638299 A JP 19638299A JP 4294798 B2 JP4294798 B2 JP 4294798B2
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Prior art keywords
transducer
spacer
membrane
resonant
recess
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JP19638299A
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Japanese (ja)
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JP2000050392A (ja
Inventor
フランク・ジョセフ・ポンペイ
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マサチューセッツ・インスティテュート・オブ・テクノロジー
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Priority claimed from US09/300,200 external-priority patent/US6775388B1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B06B1/0614—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile for generating several frequencies

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP19638299A 1998-07-16 1999-07-09 超音波トランスデューサ Expired - Lifetime JP4294798B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US300200 1981-09-08
US11627198A 1998-07-16 1998-07-16
US116271 1998-07-16
US09/300,200 US6775388B1 (en) 1998-07-16 1999-04-27 Ultrasonic transducers

Publications (2)

Publication Number Publication Date
JP2000050392A JP2000050392A (ja) 2000-02-18
JP4294798B2 true JP4294798B2 (ja) 2009-07-15

Family

ID=26814068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19638299A Expired - Lifetime JP4294798B2 (ja) 1998-07-16 1999-07-09 超音波トランスデューサ

Country Status (2)

Country Link
EP (1) EP0973149A3 (de)
JP (1) JP4294798B2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9426579B2 (en) 2014-01-29 2016-08-23 Samsung Electronics Co., Ltd. Electro-acoustic transducer
US9678201B2 (en) 2013-10-23 2017-06-13 Samsung Electronics Co., Ltd. Ultrasonic transducer and ultrasonic diagnostic apparatus employing the same
KR20210057286A (ko) * 2019-11-11 2021-05-21 재단법인 파동에너지 극한제어 연구단 초음파 전달 구조체

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000050387A (ja) 1998-07-16 2000-02-18 Massachusetts Inst Of Technol <Mit> パラメトリックオ―ディオシステム
US7391872B2 (en) 1999-04-27 2008-06-24 Frank Joseph Pompei Parametric audio system
US7319763B2 (en) 2001-07-11 2008-01-15 American Technology Corporation Power amplification for parametric loudspeakers
EP1444861B1 (de) 2001-10-09 2020-03-18 Frank Joseph Pompei Ultraschallwandler für ein parametrisches array
KR100512960B1 (ko) * 2002-09-26 2005-09-07 삼성전자주식회사 플렉서블 ｍｅｍｓ 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 ｍｅｍｓ 무선 마이크로폰
JP4123192B2 (ja) 2004-06-03 2008-07-23 セイコーエプソン株式会社 超音波トランスデューサ、および超音波トランスデューサの製造方法
JP5275565B2 (ja) * 2004-06-07 2013-08-28 オリンパス株式会社 静電容量型超音波トランスデューサ
JP3873990B2 (ja) 2004-06-11 2007-01-31 セイコーエプソン株式会社 超音波トランスデューサ及びこれを用いた超音波スピーカ
JP4706578B2 (ja) 2005-09-27 2011-06-22 セイコーエプソン株式会社 静電型超音波トランスデューサ、静電型超音波トランスデューサの設計方法、静電型超音波トランスデューサの設計装置、静電型超音波トランスデューサの設計プログラム、製造方法及び表示装置
JP4682927B2 (ja) 2005-08-03 2011-05-11 セイコーエプソン株式会社 静電型超音波トランスデューサ、超音波スピーカ、音声信号再生方法、超音波トランスデューサの電極の製造方法、超音波トランスデューサの製造方法、超指向性音響システム、および表示装置
CN101304942B (zh) * 2005-09-09 2011-12-07 Nxp股份有限公司 Mems电容器麦克风及制造方法、箔片叠层、电子设备及使用
JP5103873B2 (ja) 2005-12-07 2012-12-19 セイコーエプソン株式会社 静電型超音波トランスデューサの駆動制御方法、静電型超音波トランスデューサ、これを用いた超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
JP4802998B2 (ja) 2005-12-19 2011-10-26 セイコーエプソン株式会社 静電型超音波トランスデューサの駆動制御方法、静電型超音波トランスデューサ、これを用いた超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
JP4844411B2 (ja) 2006-02-21 2011-12-28 セイコーエプソン株式会社 静電型超音波トランスデューサ、静電型超音波トランスデューサの製造方法、超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
KR100781467B1 (ko) * 2006-07-13 2007-12-03 학교법인 포항공과대학교 공기중 파라메트릭 트랜스미팅 어레이를 이용한 초지향성초음파 거리측정을 위한 멤스 기반의 다공진 초음파트랜스듀서
EP2114085A1 (de) * 2008-04-28 2009-11-04 Nederlandse Centrale Organisatie Voor Toegepast Natuurwetenschappelijk Onderzoek TNO Zusammengesetztes Mikrofon, Mikrofonanordnung und Herstellungsverfahren dafür
US20130278111A1 (en) * 2012-04-19 2013-10-24 Masdar Institute Of Science And Technology Piezoelectric micromachined ultrasound transducer with patterned electrodes
WO2013188514A2 (en) * 2012-06-12 2013-12-19 Frank Joseph Pompei Ultrasonic transducer
DE202012010508U1 (de) * 2012-10-25 2012-11-12 BANDELIN patent GmbH & Co. KG Vorrichtung zur Beaufschlagung flüssiger Medien mitUltraschall durch eine Membran sowie Ultraschallsystem
DE102013211612A1 (de) * 2013-06-20 2014-12-24 Robert Bosch Gmbh Ultraschallwandleranordnung und Kraftfahrzeug mit einer Ultraschallwandleranordnung
KR102163729B1 (ko) 2013-11-20 2020-10-08 삼성전자주식회사 전기 음향 변환기
KR101529814B1 (ko) * 2014-01-09 2015-06-17 성균관대학교산학협력단 하이브리드 발전소자
KR102075790B1 (ko) * 2018-06-29 2020-02-10 한국기계연구원 비접촉 초음파 트랜스듀서
CN110460941B (zh) * 2019-07-23 2020-12-18 武汉理工大学 收发一体式石墨烯声传感器
KR102267073B1 (ko) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 능동형 초음파 전달 구조체
KR102267074B1 (ko) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 초음파 트랜스듀서의 음향 초투과형 커버 유닛
CN112073884A (zh) * 2020-08-27 2020-12-11 西北工业大学 一种基于pvdf的夹持式发射换能器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1234767A (en) * 1967-09-18 1971-06-09 Decca Ltd Improvements in or relating to electro-acoustic transducers
US3816671A (en) * 1972-04-06 1974-06-11 Thermo Electron Corp Electret transducer cartridge and case
JPS59171300A (ja) * 1983-03-17 1984-09-27 Matsushita Electric Ind Co Ltd コンデンサ型マイクロホン

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9678201B2 (en) 2013-10-23 2017-06-13 Samsung Electronics Co., Ltd. Ultrasonic transducer and ultrasonic diagnostic apparatus employing the same
US9426579B2 (en) 2014-01-29 2016-08-23 Samsung Electronics Co., Ltd. Electro-acoustic transducer
KR20210057286A (ko) * 2019-11-11 2021-05-21 재단법인 파동에너지 극한제어 연구단 초음파 전달 구조체
KR102267072B1 (ko) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 초음파 전달 구조체

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Publication number Publication date
JP2000050392A (ja) 2000-02-18
EP0973149A2 (de) 2000-01-19
EP0973149A3 (de) 2000-12-27

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