JP4294798B2 - 超音波トランスデューサ - Google Patents

超音波トランスデューサ Download PDF

Info

Publication number
JP4294798B2
JP4294798B2 JP19638299A JP19638299A JP4294798B2 JP 4294798 B2 JP4294798 B2 JP 4294798B2 JP 19638299 A JP19638299 A JP 19638299A JP 19638299 A JP19638299 A JP 19638299A JP 4294798 B2 JP4294798 B2 JP 4294798B2
Authority
JP
Japan
Prior art keywords
transducer
spacer
membrane
resonant
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP19638299A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000050392A (ja
Inventor
フランク・ジョセフ・ポンペイ
Original Assignee
マサチューセッツ・インスティテュート・オブ・テクノロジー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/300,200 external-priority patent/US6775388B1/en
Application filed by マサチューセッツ・インスティテュート・オブ・テクノロジー filed Critical マサチューセッツ・インスティテュート・オブ・テクノロジー
Publication of JP2000050392A publication Critical patent/JP2000050392A/ja
Application granted granted Critical
Publication of JP4294798B2 publication Critical patent/JP4294798B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B06B1/0614—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile for generating several frequencies

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP19638299A 1998-07-16 1999-07-09 超音波トランスデューサ Expired - Lifetime JP4294798B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11627198A 1998-07-16 1998-07-16
US116271 1999-04-27
US09/300,200 US6775388B1 (en) 1998-07-16 1999-04-27 Ultrasonic transducers
US300200 1999-04-27

Publications (2)

Publication Number Publication Date
JP2000050392A JP2000050392A (ja) 2000-02-18
JP4294798B2 true JP4294798B2 (ja) 2009-07-15

Family

ID=26814068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19638299A Expired - Lifetime JP4294798B2 (ja) 1998-07-16 1999-07-09 超音波トランスデューサ

Country Status (2)

Country Link
EP (1) EP0973149A3 (de)
JP (1) JP4294798B2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9426579B2 (en) 2014-01-29 2016-08-23 Samsung Electronics Co., Ltd. Electro-acoustic transducer
US9678201B2 (en) 2013-10-23 2017-06-13 Samsung Electronics Co., Ltd. Ultrasonic transducer and ultrasonic diagnostic apparatus employing the same
KR20210057286A (ko) * 2019-11-11 2021-05-21 재단법인 파동에너지 극한제어 연구단 초음파 전달 구조체

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000050387A (ja) 1998-07-16 2000-02-18 Massachusetts Inst Of Technol <Mit> パラメトリックオ―ディオシステム
US7391872B2 (en) 1999-04-27 2008-06-24 Frank Joseph Pompei Parametric audio system
US7319763B2 (en) 2001-07-11 2008-01-15 American Technology Corporation Power amplification for parametric loudspeakers
US6771785B2 (en) 2001-10-09 2004-08-03 Frank Joseph Pompei Ultrasonic transducer for parametric array
KR100512960B1 (ko) * 2002-09-26 2005-09-07 삼성전자주식회사 플렉서블 ｍｅｍｓ 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 ｍｅｍｓ 무선 마이크로폰
JP4123192B2 (ja) 2004-06-03 2008-07-23 セイコーエプソン株式会社 超音波トランスデューサ、および超音波トランスデューサの製造方法
JP5275565B2 (ja) * 2004-06-07 2013-08-28 オリンパス株式会社 静電容量型超音波トランスデューサ
JP3873990B2 (ja) 2004-06-11 2007-01-31 セイコーエプソン株式会社 超音波トランスデューサ及びこれを用いた超音波スピーカ
JP4706578B2 (ja) 2005-09-27 2011-06-22 セイコーエプソン株式会社 静電型超音波トランスデューサ、静電型超音波トランスデューサの設計方法、静電型超音波トランスデューサの設計装置、静電型超音波トランスデューサの設計プログラム、製造方法及び表示装置
JP4682927B2 (ja) 2005-08-03 2011-05-11 セイコーエプソン株式会社 静電型超音波トランスデューサ、超音波スピーカ、音声信号再生方法、超音波トランスデューサの電極の製造方法、超音波トランスデューサの製造方法、超指向性音響システム、および表示装置
EP1934134A2 (de) 2005-09-09 2008-06-25 Nxp B.V. Verfahren zur herstellung eines mems-kondensatormikrofons, derartiges mems-kondensatormikrofon, folienstapel mit derartigem mems-kondensatormikrofon, elektronische vorrichtung mit derartigem mems-kondensatormikrofon und verwendung der elektronischen vorrichtung
JP5103873B2 (ja) 2005-12-07 2012-12-19 セイコーエプソン株式会社 静電型超音波トランスデューサの駆動制御方法、静電型超音波トランスデューサ、これを用いた超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
JP4802998B2 (ja) 2005-12-19 2011-10-26 セイコーエプソン株式会社 静電型超音波トランスデューサの駆動制御方法、静電型超音波トランスデューサ、これを用いた超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
JP4844411B2 (ja) 2006-02-21 2011-12-28 セイコーエプソン株式会社 静電型超音波トランスデューサ、静電型超音波トランスデューサの製造方法、超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
KR100781467B1 (ko) * 2006-07-13 2007-12-03 학교법인 포항공과대학교 공기중 파라메트릭 트랜스미팅 어레이를 이용한 초지향성초음파 거리측정을 위한 멤스 기반의 다공진 초음파트랜스듀서
EP2114085A1 (de) 2008-04-28 2009-11-04 Nederlandse Centrale Organisatie Voor Toegepast Natuurwetenschappelijk Onderzoek TNO Zusammengesetztes Mikrofon, Mikrofonanordnung und Herstellungsverfahren dafür
US20130278111A1 (en) * 2012-04-19 2013-10-24 Masdar Institute Of Science And Technology Piezoelectric micromachined ultrasound transducer with patterned electrodes
EP2858829B1 (de) 2012-06-12 2021-05-19 Frank Joseph Pompei Ultraschallwandler
DE202012010508U1 (de) * 2012-10-25 2012-11-12 BANDELIN patent GmbH & Co. KG Vorrichtung zur Beaufschlagung flüssiger Medien mitUltraschall durch eine Membran sowie Ultraschallsystem
DE102013211612A1 (de) * 2013-06-20 2014-12-24 Robert Bosch Gmbh Ultraschallwandleranordnung und Kraftfahrzeug mit einer Ultraschallwandleranordnung
KR102163729B1 (ko) 2013-11-20 2020-10-08 삼성전자주식회사 전기 음향 변환기
KR101529814B1 (ko) * 2014-01-09 2015-06-17 성균관대학교산학협력단 하이브리드 발전소자
KR102075790B1 (ko) * 2018-06-29 2020-02-10 한국기계연구원 비접촉 초음파 트랜스듀서
CN110460941B (zh) * 2019-07-23 2020-12-18 武汉理工大学 收发一体式石墨烯声传感器
KR102267073B1 (ko) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 능동형 초음파 전달 구조체
KR102267074B1 (ko) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 초음파 트랜스듀서의 음향 초투과형 커버 유닛
CN112073884A (zh) * 2020-08-27 2020-12-11 西北工业大学 一种基于pvdf的夹持式发射换能器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1234767A (en) * 1967-09-18 1971-06-09 Decca Ltd Improvements in or relating to electro-acoustic transducers
US3816671A (en) * 1972-04-06 1974-06-11 Thermo Electron Corp Electret transducer cartridge and case
JPS59171300A (ja) * 1983-03-17 1984-09-27 Matsushita Electric Ind Co Ltd コンデンサ型マイクロホン

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9678201B2 (en) 2013-10-23 2017-06-13 Samsung Electronics Co., Ltd. Ultrasonic transducer and ultrasonic diagnostic apparatus employing the same
US9426579B2 (en) 2014-01-29 2016-08-23 Samsung Electronics Co., Ltd. Electro-acoustic transducer
KR20210057286A (ko) * 2019-11-11 2021-05-21 재단법인 파동에너지 극한제어 연구단 초음파 전달 구조체
KR102267072B1 (ko) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 초음파 전달 구조체

Also Published As

Publication number Publication date
JP2000050392A (ja) 2000-02-18
EP0973149A3 (de) 2000-12-27
EP0973149A2 (de) 2000-01-19

Similar Documents

Publication Publication Date Title
JP4294798B2 (ja) 超音波トランスデューサ
US6775388B1 (en) Ultrasonic transducers
JP4802998B2 (ja) 静電型超音波トランスデューサの駆動制御方法、静電型超音波トランスデューサ、これを用いた超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
JP4588321B2 (ja) パラメトリックアレイのための超音波トランスデューサ
CN1965609B (zh) 超声换能器和使用其的超声扬声器
JP5103873B2 (ja) 静電型超音波トランスデューサの駆動制御方法、静電型超音波トランスデューサ、これを用いた超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
US20050244016A1 (en) Parametric loudspeaker with electro-acoustical diaphragm transducer
EP1123634A1 (de) Parametrischer lautsprecher mit elektroakustischer membran
EP1665873A2 (de) Parametrischer wandler mit einem emitterfilm
US20080212807A1 (en) Micromachined Acoustic Transducers
US20220417669A1 (en) Graphene transducers
US11837213B2 (en) Ultrasonic transducer with perforated baseplate
US8085957B2 (en) Method for converting electric signals into acoustic oscillations and an electric gas-kinetic transducer
KR101765000B1 (ko) 지향성 스피커용 압전 트랜스듀서 및 이를 포함하는 지향성 스피커
JP4352922B2 (ja) 超音波トランスデューサ
JP2007104521A (ja) 静電型超音波トランスデューサ及びその製造方法
JP4508030B2 (ja) 静電型超音波トランスデューサ及びこれを用いた超音波スピーカ
JP2007228472A (ja) 静電型超音波トランスデューサ、静電型超音波トランスデューサの構成方法、および超音波スピーカ
JP4508040B2 (ja) 静電型超音波トランスデューサ及びこれを用いた超音波スピーカ
WO2005022595A2 (en) A parametric transducer
CN115365101A (zh) 一种可调节谐振腔的静电容式超声换能器
JP2005354473A5 (de)
JP4706586B2 (ja) 静電型超音波トランスデューサ、静電型超音波トランスデューサの製造方法及び超音波スピーカ
JP2005354473A (ja) 超音波トランスデューサ及びこれを用いた超音波スピーカ
CN117376791A (zh) 一种mems压电执行器及扬声器

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060501

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060501

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20080828

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080902

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20081202

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20081205

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090226

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090331

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090409

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120417

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 4294798

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120417

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130417

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130417

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140417

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term