EP0973149A3 - Ultraschallwandlern - Google Patents

Ultraschallwandlern Download PDF

Info

Publication number
EP0973149A3
EP0973149A3 EP99305633A EP99305633A EP0973149A3 EP 0973149 A3 EP0973149 A3 EP 0973149A3 EP 99305633 A EP99305633 A EP 99305633A EP 99305633 A EP99305633 A EP 99305633A EP 0973149 A3 EP0973149 A3 EP 0973149A3
Authority
EP
European Patent Office
Prior art keywords
conductive membrane
depressions
transducers
resonant
approach
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99305633A
Other languages
English (en)
French (fr)
Other versions
EP0973149A2 (de
Inventor
Frank Joseph Pompei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Massachusetts Institute of Technology
Original Assignee
Massachusetts Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/300,200 external-priority patent/US6775388B1/en
Application filed by Massachusetts Institute of Technology filed Critical Massachusetts Institute of Technology
Publication of EP0973149A2 publication Critical patent/EP0973149A2/de
Publication of EP0973149A3 publication Critical patent/EP0973149A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B06B1/0614—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile for generating several frequencies

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
EP99305633A 1998-07-16 1999-07-15 Ultraschallwandlern Withdrawn EP0973149A3 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US300200 1981-09-08
US11627198A 1998-07-16 1998-07-16
US116271 1998-07-16
US09/300,200 US6775388B1 (en) 1998-07-16 1999-04-27 Ultrasonic transducers

Publications (2)

Publication Number Publication Date
EP0973149A2 EP0973149A2 (de) 2000-01-19
EP0973149A3 true EP0973149A3 (de) 2000-12-27

Family

ID=26814068

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99305633A Withdrawn EP0973149A3 (de) 1998-07-16 1999-07-15 Ultraschallwandlern

Country Status (2)

Country Link
EP (1) EP0973149A3 (de)
JP (1) JP4294798B2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000050387A (ja) 1998-07-16 2000-02-18 Massachusetts Inst Of Technol <Mit> パラメトリックオ―ディオシステム
US7391872B2 (en) * 1999-04-27 2008-06-24 Frank Joseph Pompei Parametric audio system
US7319763B2 (en) 2001-07-11 2008-01-15 American Technology Corporation Power amplification for parametric loudspeakers
WO2003032678A2 (en) 2001-10-09 2003-04-17 Frank Joseph Pompei Ultrasonic transducer for parametric array
KR100512960B1 (ko) * 2002-09-26 2005-09-07 삼성전자주식회사 플렉서블 ｍｅｍｓ 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 ｍｅｍｓ 무선 마이크로폰
JP4123192B2 (ja) 2004-06-03 2008-07-23 セイコーエプソン株式会社 超音波トランスデューサ、および超音波トランスデューサの製造方法
EP1779784B1 (de) * 2004-06-07 2015-10-14 Olympus Corporation Ultraschallwandler vom elektrostatischen kapazitätstyp
JP3873990B2 (ja) 2004-06-11 2007-01-31 セイコーエプソン株式会社 超音波トランスデューサ及びこれを用いた超音波スピーカ
JP4706578B2 (ja) 2005-09-27 2011-06-22 セイコーエプソン株式会社 静電型超音波トランスデューサ、静電型超音波トランスデューサの設計方法、静電型超音波トランスデューサの設計装置、静電型超音波トランスデューサの設計プログラム、製造方法及び表示装置
JP4682927B2 (ja) 2005-08-03 2011-05-11 セイコーエプソン株式会社 静電型超音波トランスデューサ、超音波スピーカ、音声信号再生方法、超音波トランスデューサの電極の製造方法、超音波トランスデューサの製造方法、超指向性音響システム、および表示装置
WO2007029134A2 (en) 2005-09-09 2007-03-15 Nxp B.V. A method of manufacturing a mems capacitor microphone, such a mems capacitor microphone, a stack of foils comprising such a mems capacitor microphone, an electronic device comprising such a mems capacitor microphone and use of the electronic device
JP5103873B2 (ja) 2005-12-07 2012-12-19 セイコーエプソン株式会社 静電型超音波トランスデューサの駆動制御方法、静電型超音波トランスデューサ、これを用いた超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
JP4802998B2 (ja) 2005-12-19 2011-10-26 セイコーエプソン株式会社 静電型超音波トランスデューサの駆動制御方法、静電型超音波トランスデューサ、これを用いた超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
JP4844411B2 (ja) 2006-02-21 2011-12-28 セイコーエプソン株式会社 静電型超音波トランスデューサ、静電型超音波トランスデューサの製造方法、超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
KR100781467B1 (ko) * 2006-07-13 2007-12-03 학교법인 포항공과대학교 공기중 파라메트릭 트랜스미팅 어레이를 이용한 초지향성초음파 거리측정을 위한 멤스 기반의 다공진 초음파트랜스듀서
EP2114085A1 (de) * 2008-04-28 2009-11-04 Nederlandse Centrale Organisatie Voor Toegepast Natuurwetenschappelijk Onderzoek TNO Zusammengesetztes Mikrofon, Mikrofonanordnung und Herstellungsverfahren dafür
US20130278111A1 (en) * 2012-04-19 2013-10-24 Masdar Institute Of Science And Technology Piezoelectric micromachined ultrasound transducer with patterned electrodes
JP6315616B2 (ja) * 2012-06-12 2018-04-25 ジョセフ ポンペイ フランク 超音波トランスデューサ
DE202012010508U1 (de) * 2012-10-25 2012-11-12 BANDELIN patent GmbH & Co. KG Vorrichtung zur Beaufschlagung flüssiger Medien mitUltraschall durch eine Membran sowie Ultraschallsystem
DE102013211612A1 (de) * 2013-06-20 2014-12-24 Robert Bosch Gmbh Ultraschallwandleranordnung und Kraftfahrzeug mit einer Ultraschallwandleranordnung
KR102077741B1 (ko) 2013-10-23 2020-02-14 삼성전자주식회사 초음파 변환기 및 이를 채용한 초음파 진단장치
KR102163729B1 (ko) 2013-11-20 2020-10-08 삼성전자주식회사 전기 음향 변환기
KR101529814B1 (ko) * 2014-01-09 2015-06-17 성균관대학교산학협력단 하이브리드 발전소자
KR102250185B1 (ko) 2014-01-29 2021-05-10 삼성전자주식회사 전기 음향 변환기
KR102075790B1 (ko) * 2018-06-29 2020-02-10 한국기계연구원 비접촉 초음파 트랜스듀서
CN110460941B (zh) * 2019-07-23 2020-12-18 武汉理工大学 收发一体式石墨烯声传感器
KR102267074B1 (ko) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 초음파 트랜스듀서의 음향 초투과형 커버 유닛
KR102267073B1 (ko) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 능동형 초음파 전달 구조체
KR102267072B1 (ko) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 초음파 전달 구조체
CN112073884A (zh) * 2020-08-27 2020-12-11 西北工业大学 一种基于pvdf的夹持式发射换能器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1234767A (en) * 1967-09-18 1971-06-09 Decca Ltd Improvements in or relating to electro-acoustic transducers
US3816671A (en) * 1972-04-06 1974-06-11 Thermo Electron Corp Electret transducer cartridge and case
JPS59171300A (ja) * 1983-03-17 1984-09-27 Matsushita Electric Ind Co Ltd コンデンサ型マイクロホン

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1234767A (en) * 1967-09-18 1971-06-09 Decca Ltd Improvements in or relating to electro-acoustic transducers
US3816671A (en) * 1972-04-06 1974-06-11 Thermo Electron Corp Electret transducer cartridge and case
JPS59171300A (ja) * 1983-03-17 1984-09-27 Matsushita Electric Ind Co Ltd コンデンサ型マイクロホン

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 009, no. 027 (E - 294) 6 February 1985 (1985-02-06) *

Also Published As

Publication number Publication date
JP4294798B2 (ja) 2009-07-15
EP0973149A2 (de) 2000-01-19
JP2000050392A (ja) 2000-02-18

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