EP0973149A3 - Ultrasonic transducers - Google Patents
Ultrasonic transducers Download PDFInfo
- Publication number
- EP0973149A3 EP0973149A3 EP99305633A EP99305633A EP0973149A3 EP 0973149 A3 EP0973149 A3 EP 0973149A3 EP 99305633 A EP99305633 A EP 99305633A EP 99305633 A EP99305633 A EP 99305633A EP 0973149 A3 EP0973149 A3 EP 0973149A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- conductive membrane
- depressions
- transducers
- resonant
- approach
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000012528 membrane Substances 0.000 abstract 2
- 125000006850 spacer group Chemical group 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
- B06B1/0614—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile for generating several frequencies
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11627198A | 1998-07-16 | 1998-07-16 | |
US116271 | 1998-07-16 | ||
US300200 | 1999-04-27 | ||
US09/300,200 US6775388B1 (en) | 1998-07-16 | 1999-04-27 | Ultrasonic transducers |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0973149A2 EP0973149A2 (en) | 2000-01-19 |
EP0973149A3 true EP0973149A3 (en) | 2000-12-27 |
Family
ID=26814068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99305633A Withdrawn EP0973149A3 (en) | 1998-07-16 | 1999-07-15 | Ultrasonic transducers |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0973149A3 (en) |
JP (1) | JP4294798B2 (en) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000050387A (en) | 1998-07-16 | 2000-02-18 | Massachusetts Inst Of Technol <Mit> | Parameteric audio system |
US7391872B2 (en) * | 1999-04-27 | 2008-06-24 | Frank Joseph Pompei | Parametric audio system |
US7319763B2 (en) | 2001-07-11 | 2008-01-15 | American Technology Corporation | Power amplification for parametric loudspeakers |
US6771785B2 (en) | 2001-10-09 | 2004-08-03 | Frank Joseph Pompei | Ultrasonic transducer for parametric array |
KR100512960B1 (en) * | 2002-09-26 | 2005-09-07 | 삼성전자주식회사 | Flexible MEMS transducer and its manufacturing method, and flexible MEMS wireless microphone |
JP4123192B2 (en) | 2004-06-03 | 2008-07-23 | セイコーエプソン株式会社 | Ultrasonic transducer and method of manufacturing ultrasonic transducer |
JP5275565B2 (en) * | 2004-06-07 | 2013-08-28 | オリンパス株式会社 | Capacitive ultrasonic transducer |
JP3873990B2 (en) | 2004-06-11 | 2007-01-31 | セイコーエプソン株式会社 | Ultrasonic transducer and ultrasonic speaker using the same |
JP4706578B2 (en) | 2005-09-27 | 2011-06-22 | セイコーエプソン株式会社 | Electrostatic ultrasonic transducer, electrostatic ultrasonic transducer design method, electrostatic ultrasonic transducer design apparatus, electrostatic ultrasonic transducer design program, manufacturing method, and display device |
JP4682927B2 (en) | 2005-08-03 | 2011-05-11 | セイコーエプソン株式会社 | Electrostatic ultrasonic transducer, ultrasonic speaker, audio signal reproduction method, ultrasonic transducer electrode manufacturing method, ultrasonic transducer manufacturing method, superdirective acoustic system, and display device |
EP1934134A2 (en) * | 2005-09-09 | 2008-06-25 | Nxp B.V. | A method of manufacturing a mems capacitor microphone, such a mems capacitor microphone, a stack of foils comprising such a mems capacitor microphone, an electronic device comprising such a mems capacitor microphone and use of the electronic device |
JP5103873B2 (en) | 2005-12-07 | 2012-12-19 | セイコーエプソン株式会社 | Electrostatic ultrasonic transducer drive control method, electrostatic ultrasonic transducer, ultrasonic speaker using the same, audio signal reproduction method, superdirective acoustic system, and display device |
JP4802998B2 (en) | 2005-12-19 | 2011-10-26 | セイコーエプソン株式会社 | Electrostatic ultrasonic transducer drive control method, electrostatic ultrasonic transducer, ultrasonic speaker using the same, audio signal reproduction method, superdirective acoustic system, and display device |
JP4844411B2 (en) | 2006-02-21 | 2011-12-28 | セイコーエプソン株式会社 | Electrostatic ultrasonic transducer, method for manufacturing electrostatic ultrasonic transducer, ultrasonic speaker, audio signal reproduction method, superdirective acoustic system, and display device |
KR100781467B1 (en) * | 2006-07-13 | 2007-12-03 | 학교법인 포항공과대학교 | Mems based multiple resonances type ultrasonic transducer for ranging measurement with high directionality using parametric transmitting array in air |
EP2114085A1 (en) | 2008-04-28 | 2009-11-04 | Nederlandse Centrale Organisatie Voor Toegepast Natuurwetenschappelijk Onderzoek TNO | Composite microphone, microphone assembly and method of manufacturing those |
US20130278111A1 (en) * | 2012-04-19 | 2013-10-24 | Masdar Institute Of Science And Technology | Piezoelectric micromachined ultrasound transducer with patterned electrodes |
US9686618B2 (en) | 2012-06-12 | 2017-06-20 | Frank Joseph Pompei | Ultrasonic transducer |
DE202012010508U1 (en) * | 2012-10-25 | 2012-11-12 | BANDELIN patent GmbH & Co. KG | Device for applying liquid media with ultrasound through a membrane and ultrasound system |
DE102013211612A1 (en) * | 2013-06-20 | 2014-12-24 | Robert Bosch Gmbh | Ultrasonic transducer assembly and motor vehicle with an ultrasonic transducer assembly |
KR102077741B1 (en) | 2013-10-23 | 2020-02-14 | 삼성전자주식회사 | Ultrasonic transducer and ultrasonic diagnostic equipment including the same |
KR102163729B1 (en) | 2013-11-20 | 2020-10-08 | 삼성전자주식회사 | Electro acoustic transducer |
KR101529814B1 (en) * | 2014-01-09 | 2015-06-17 | 성균관대학교산학협력단 | Hybrid electric generating elements |
KR102250185B1 (en) | 2014-01-29 | 2021-05-10 | 삼성전자주식회사 | Electro acoustic transducer |
KR102075790B1 (en) * | 2018-06-29 | 2020-02-10 | 한국기계연구원 | Non-contact ultrasonic transducer |
CN110460941B (en) * | 2019-07-23 | 2020-12-18 | 武汉理工大学 | Transmitting-receiving integrated graphene acoustic sensor |
KR102267072B1 (en) * | 2019-11-11 | 2021-06-21 | 재단법인 파동에너지 극한제어 연구단 | Ultrasonic delivery structure |
KR102267074B1 (en) * | 2019-11-11 | 2021-06-21 | 재단법인 파동에너지 극한제어 연구단 | Cover unit of ultrasonic transducer in acoustic extraordinary transmission type |
KR102267073B1 (en) * | 2019-11-11 | 2021-06-21 | 재단법인 파동에너지 극한제어 연구단 | Active ultrasonic delivery structure |
CN112073884A (en) * | 2020-08-27 | 2020-12-11 | 西北工业大学 | PVDF-based clamping type transmitting transducer |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1234767A (en) * | 1967-09-18 | 1971-06-09 | Decca Ltd | Improvements in or relating to electro-acoustic transducers |
US3816671A (en) * | 1972-04-06 | 1974-06-11 | Thermo Electron Corp | Electret transducer cartridge and case |
JPS59171300A (en) * | 1983-03-17 | 1984-09-27 | Matsushita Electric Ind Co Ltd | Condenser microphone |
-
1999
- 1999-07-09 JP JP19638299A patent/JP4294798B2/en not_active Expired - Lifetime
- 1999-07-15 EP EP99305633A patent/EP0973149A3/en not_active Withdrawn
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1234767A (en) * | 1967-09-18 | 1971-06-09 | Decca Ltd | Improvements in or relating to electro-acoustic transducers |
US3816671A (en) * | 1972-04-06 | 1974-06-11 | Thermo Electron Corp | Electret transducer cartridge and case |
JPS59171300A (en) * | 1983-03-17 | 1984-09-27 | Matsushita Electric Ind Co Ltd | Condenser microphone |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 009, no. 027 (E - 294) 6 February 1985 (1985-02-06) * |
Also Published As
Publication number | Publication date |
---|---|
JP4294798B2 (en) | 2009-07-15 |
JP2000050392A (en) | 2000-02-18 |
EP0973149A2 (en) | 2000-01-19 |
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Legal Events
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Inventor name: POMPEI, FRANK JOSEPH |
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Effective date: 20010626 |
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17Q | First examination report despatched |
Effective date: 20020725 |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
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18D | Application deemed to be withdrawn |
Effective date: 20030205 |