CN106198724B - A kind of multistable ultrasound detection sensor - Google Patents
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- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract
The present invention relates to a kind of multistable sensors for ultrasound detection field, including acoustic resistance matching layer, metal electrode, piezoelectric membrane, high pressure resistant insulation layer, cavities seals layer, back sheet and Electromechanical Control circuit board, it is characterized in that the ultrasound detection sensor realizes the multistable working method of piezoelectric-type ultrasonic sensing and the intercombination of condenser type ultrasonic sensing by Electromechanical Control circuit on the same ultrasonic transducer unit, and each steady operation mode can be designed according to arbitrary supersonic frequency, such as it is designed according to condenser type low frequency ultrasound sensing and piezoelectric type high frequency ultrasound sensing, take into account the depth and resolution ratio of ultrasound detection.This multistable ultrasound detection sensor can be flexibly applied to gaseous state, liquid, solid state media medium supersonic sounding, impedance matching is simple, it is small to be easily integrated, it can mass production, at low cost, the fields such as acoustic detection, biomedical imaging and industrial ultrasonic non-destructive testing have application prospect in water.
Description
Technical field
The present invention relates to a kind of multistable ultrasound detection sensors, are mainly used for ultrasound detection and ultrasonic imaging, specifically
It says, is to realize piezoelectric-type ultrasonic sensing and condenser type ultrasonic sensing phase on the same ultrasonic transducer unit using control circuit
The multistable working method mutually combined is suitable for the necks such as underwater acoustic wave detection, biomedical imaging and industrial ultrasonic non-destructive testing
Domain.
Background technology
Ultrasonic wave is the elastic wave that a kind of frequency is higher than the threshold of audibility, has that acoustic energy is concentrated, directionality is good, penetration power is strong, water
The features such as middle propagation distance is remote, in medical diagnosis treatment, industrial nondestructive testing, underwater acoustic wave detection, ultrasonic imaging etc.
With wide application background.Ultrasonic transducer be in ultrasonic frequency range by the electric signal of alternation be converted into acoustical signal or
Acoustical signal in extraneous sound field is converted into the energy conversion device of electric signal by person, according to the difference of electroacoustic transfer principle, ultrasound
Energy converter includes mainly piezoelectric type ultrasonic transducer and capacitive ultrasound transducer etc..
Piezoelectric type ultrasonic transducer be using generated after piezoelectric element stress or electric excitation just or inverse piezoelectric effect come
It realizes the transmitting of ultrasonic wave and receives, it is most widely used at present, have that electromechanical conversion efficiency is high, processing technology is simple, skill
Art realizes the advantages that convenient, cheap and dependable performance, and the acoustic impedance of the acoustic impedance of piezoelectric material and solid material is in phase
With on the order of magnitude.But the energy converter also has the shortcomings that very prominent, is situated between with air-liquid body as piezoelectric material acoustic impedance is very big
Matter acoustic impedance mismatch, bandwidth is low, and the piezoelectric membrane of high-frequency transducer is not easy to be processed, and poor performance even can not work in harsh environment
Make etc..The method for solving the impedance mismatching between piezoelectric membrane and medium at present be increase an impedance matching layer in centre, but
Due to matching layer cannot process working frequency that is too thin and further limiting energy converter cannot be very high, and sacrifice energy converter band
Width increases the complexity and production cost of structure.
Capacitive ultrasound transducer be using between two electrode plate of capacity plate antenna electrostatic force and top electrodes (with thin
Film) made of force balance principle between the structural stress of itself.By the alternating voltage letter for applying certain frequency on capacitance
Number make film that vibration occur and generate ultrasonic wave, or when film receives ultrasonic wave because acoustic pressure act on generates it is accordingly ultrasonic
The mechanical oscillation of wave frequency rate, capacity plate antenna both ends add certain DC offset voltage, then at this time due to thin vibration of membrane and
The electric current for generating variation, to which energy converter realizes the transmitting and reception of ultrasonic wave.Capacitive ultrasound transducer have impedance and gas,
Liquid medium impedance easily matches, and bandwidth is high, and operating frequency range is big, may be produced that one dimensional line array and two-dimensional surface array, and easily
In integrated with electronic circuit, the features such as being suitable for adverse circumstances (such as high temperature), but that there is also parasitic capacitances is big, output acoustic pressure is low etc.
Problem.
Since MEMS micro-processing technology has many advantages, such as higher accuracy and repeatability and good consistency, become
A kind of new technological approaches of machined ultrasonic transducers, the piezoelectric micromachined ultrasonic transducer based on MEMS manufacture crafts
(Piezoelectric Micromachined Ultrasonic Transducer, pMUT) and capacitance type micromachined ultrasonic change
Energy device (Capacitive Micromachined Ultrasonic Transducer, cMUT) is increasingly becoming research hotspot.
Both at home and abroad the research of pMUT and cMUT is substantially all to rest at present and the single stable state of ultrasonic transducer is set
Meter analysis, or that is, using pMUT and its array (Qiu Y, Gigliotti J V, Wallace M, et
al.Piezoelectric micromachined ultrasound transducer(pMUT)arrays for
integrated sensing,actuation and imaging[J].Sensors,2015,15(4):8020-8041.), it
Using cMUT and its array (Zhang R, Zhang W, He C, et al.Underwater Imaging Using a 1 ×
16cMUT Linear Array[J].Sensors,2016,16(3):312.), the transducer unit working method list after processing
One fixes.Although working sensor frequency is low can to realize longer detection depth, resolution ratio is relatively low, conversely, sensor work
Although working frequency height can realize higher resolution ratio, detection depth is shorter, can not accomplish to take into account detection depth and resolution ratio,
Or device volume and complexity are increased using multiple sensors are integrated, sensor and its array have pMUT or cMUT intrinsic
Defect.
Therefore, it is necessary to study a kind of multistable ultrasound detection sensor to utilize MEMS in conjunction with the advantages of pMUT and cMUT
Micro-processing technology makes ultrasonic transducer, realizes two kinds of working methods of pMUT and cMUT in a unit, small to realize
Be easily integrated array, device flexible design, working frequency is adjustable, can be widely applied to industry, agricultural, communications and transportation, life doctor
It treats and the miniature ultrasonic detection sensor in the fields such as military affairs is target.Although piezoelectric micromachined ultrasonic transducer can realize bending
Vibration and two kinds of operating modes of thickness vibration (Hedegaard T, Pedersen T, Thomsen E V, et al.Screen
printed thick film based pMUT arrays[C]//2008IEEE Ultrasonics Symposium.IEEE,
2008:2126-2129.), but a transducer unit can only select one of which pattern to work, and can not selectively switch, and have
Have the shortcomings that piezoelectric type ultrasonic transducer is intrinsic, and two kinds of operating modes increase the matched difficulty of device resistance, further shadow
Ring the performance of sensor.
Invention content
The present invention is insufficient present in scheme for the above-mentioned prior art, proposes a kind of multistable ultrasound inspection on its basis
Sensor is surveyed, piezoelectric-type ultrasonic sensing and condenser type ultrasound can be achieved on the same ultrasonic transducer unit using control circuit
The multistable working method being combined with each other is sensed, has taken into account the depth and resolution ratio of ultrasound detection, operation principle is as shown in Figure 1.
Technical scheme is as follows：
A kind of multistable ultrasound detection sensor, including acoustic resistance matching layer, metal electrode, piezoelectric membrane, high pressure resistant insulation
Layer, cavities seals layer, back sheet and Electromechanical Control circuit board.By piezoelectric type ultrasonic sensing and condenser type ultrasonic sensing steady operation
The difference of frequency, there are two types of forms for overall structure, as shown in Figures 2 and 3.
The multistable ultrasound detection sensor, it is as shown in Figure 2 according to structure, it is characterised in that：The multistable is super
Sound detection sensor can be according to pMUT and cMUT two ways work in combination, and pMUT working methods are by upper layer piezoelectric membrane come real
Existing, which is metal electrode, is acoustic resistance matching layer above apex electrode, is upper layer below bottom electrode
Cavities seals layer；CMUT working methods are realized by lower layer's piezoelectric membrane and lower layer's cavities seals layer, on lower layer's piezoelectric membrane,
Lower both ends are metal electrode, are high pressure resistant insulation layer above apex electrode, are lower layer's cavities seals layer, the sky below bottom electrode
It is high pressure resistant insulation layer below cavity layer, is metal electrode below the insulating layer, is back sheet below metal electrode, in back sheet
It is Electromechanical Control circuit board below.
The multistable ultrasound detection sensor as shown in Figure 2, the operation principle of ultrasound detection are：
(1) under pMUT working methods, A, B, C, D metal electrode through-hole lead are concatenated together as power supply ground wire,
If applying appropriately sized high-frequency voltage signal on E metal electrodes, since inverse piezoelectric effect makes piezoelectric membrane shake
It moves and emits ultrasonic wave, can be vibrated according to corresponding frequency if piezoelectric membrane receives ultrasonic wave, it is thin due to direct piezoelectric effect
Vibration of membrane will generate the voltage of corresponding frequencies and is detected after amplification, and lower layer's piezoelectric membrane is without friction during this；
(2) under cMUT working methods, D, E metal electrode through-hole lead are concatenated together, cavity upper and lower two on upper layer
The voltage for applying sufficient intensity between termination electrode (constituting capacity plate antenna), since the electrostatic force between two metal electrode boards is more than structure
Stress, upper layer piezoelectric membrane and lower layer's piezoelectric membrane are pulled together as new piezoelectric membrane (Fig. 4), using A metal electrodes as
Power supply ground wire, if applying appropriately sized high-frequency electrical between lower layer's cavities seals layer upper/lower terminal electrode (constituting capacity plate antenna)
Signal, new piezoelectric membrane is pressed to generate ultrasonic wave due to the electrostatic force of alternation and launch, if new piezoelectric membrane receives
To ultrasonic wave, film generates the vibration of corresponding frequencies due to the acoustic pressure effect of certain frequency, at this time in lower layer's cavities seals layer
Apply a certain size DC offset voltage and a certain size capacitance in parallel between upper/lower terminal electrode, then due to piezoelectric membrane
Vibration finally generate can survey electric current accordingly, realize the reception and detection of ultrasonic wave.
The multistable ultrasound detection sensor, it is as shown in Figure 3 according to structure, it is characterised in that：The multistable is super
Sound detection sensor can be according to pMUT and cMUT two ways work in combination, and pMUT working methods are by lower layer's piezoelectric membrane come real
Existing, which is metal electrode, and apex electrode upper end is high pressure resistant insulation layer, which is upper
Layer cavities seals layer is lower layer's cavities seals layer below bottom electrode, is back sheet below the cavity layer, is below back sheet
Electromechanical Control circuit board；CMUT working methods realize that upper layer piezoelectricity is thin by upper layer piezoelectric membrane and upper layer cavities seals layer
Film upper/lower terminal is metal electrode, is acoustic impedance matching layer above apex electrode, is lower layer's cavities seals below bottom electrode
Layer, lower layer's cavities seals layer upper/lower terminal is respectively upper layer piezoelectric membrane bottom electrode and high pressure resistant insulation layer.
The multistable ultrasound detection sensor as shown in Figure 3, the operation principle of ultrasound detection are：
(1) under cMUT working methods, A, B metal electrode through-hole lead are concatenated together as power supply ground wire, if
Apply appropriately sized high-frequency voltage signal, upper layer piezoelectric membrane between upper layer cavity upper/lower terminal electrode (constituting capacity plate antenna)
Generate ultrasonic wave due to the electrostatic force of alternation and launch, if upper layer piezoelectric membrane receives ultrasonic wave, film by
The vibration of corresponding frequencies is generated in the acoustic pressure effect of certain frequency, at this time between the cavities seals layer upper/lower terminal electrode of upper layer
Apply a certain size DC offset voltage and a certain size capacitance in parallel, then since the vibration of piezoelectric membrane finally generates phase
That answers surveys electric current, realizes the reception and detection of ultrasonic wave, and lower layer's piezoelectric membrane is without friction during this.
(2) under pMUT working methods, at B, C metal electrode both ends, (constituting capacity plate antenna) applies the electricity of sufficient intensity
Pressure, since the electrostatic force between two metal electrode boards is more than structural stress, upper layer piezoelectric membrane is pull-in on lower layer piezoelectric membrane
Together as new piezoelectric membrane (Fig. 5), using A metal electrodes as power supply ground wire, if in lower layer's piezoelectric membrane upper/lower terminal electrode
Between apply appropriately sized high-frequency voltage signal, then upper layer piezoelectric membrane is equivalent to load effect in lower layer's piezoelectric membrane upper end,
It, can if new piezoelectric membrane receives ultrasonic wave due to inverse piezoelectric effect so that new piezoelectric membrane occurs vibration and emits ultrasonic wave
It is vibrated according to corresponding frequency, due to direct piezoelectric effect, thin vibration of membrane will generate the voltage of corresponding frequencies and after amplification
It is detected.
When the multistable ultrasound detection sensor (Fig. 2, Fig. 3) works according to pMUT modes, first-order bending vibration
Frequency can be determined as：Wherein, αp1For the single order vibration factor under pMUT modes, tpFor pressure
The thickness of conductive film, A are the surface area of piezoelectric membrane, Y0For the Young's modulus of piezoelectric membrane, ρ is the density of piezoelectric membrane, and ν is
The Poisson's ratio of piezoelectric membrane.
When the multistable ultrasound detection sensor (Fig. 2, Fig. 3) works according to cMUT patterns, first-order bending vibration
Frequency can be determined as：Wherein, αc1For the single order vibration factor under pMUT modes, tcFor piezoelectricity
The thickness of film, A are the surface area of piezoelectric membrane, Y0For the Young's modulus of piezoelectric membrane, ρ is the density of piezoelectric membrane, and ν is pressure
The Poisson's ratio of conductive film.The collapse voltage when capacity plate antenna being made of cavities seals layer upper/lower terminal electrode is attracted is：Wherein, k is the coefficient of elasticity of piezoelectric membrane, d0For cavity layer elemental height, ε0It is normal for the dielectric in vacuum
Number, A are the surface area of piezoelectric membrane.Relationship between the Displacement-deformation of piezoelectric membrane and the driving voltage of application is：WhenWhen capacity plate antenna be attracted.
The multistable ultrasound detection sensor, Electromechanical Control circuit board are used for controlling the work of ultrasound detection sensor
Mode and ultrasonic transducer transmitting and receiving mode can be one or more layers circuit boards, can use printed circuit board or
Flexible PCB, copper foil may be used in circuit board or other conductive materials replace.In addition, circuit board can be fixed on back sheet table
Face, surface of metal electrode or piezoelectric membrane surface.
The multistable ultrasound detection sensor, the effect of high pressure resistant insulation layer are prevented when capacitor plate is attracted
Only electrical short and avoid being broken down by high-voltage.
The multistable ultrasound detection sensor, piezoelectric membrane are one layer or are formed by multiple-layer stacked that piezoelectric material selects
From piezoelectric ceramics, piezoelectric monocrystal, piezo-electricity composite material or piezopolymer.Wherein, piezoelectric ceramics can be PZT, AlN or ZnO.
The multistable ultrasound detection sensor, acoustic impedance matching layer are one layer or are formed by multiple-layer stacked, this ultrasound
Detection sensor does not limit the material of acoustic impedance matching layer specifically, the thickness of acoustic impedance matching layer by transducer designs acoustics
It is required that being determined.
The multistable ultrasound detection sensor, construction profile can be round, rectangular or polygon plane is first
The size of part, energy converter is determined that the surface area of energy converter is bigger, and thickness is thinner by working frequency, then the single order of energy converter is humorous
Vibration frequency is lower, on the contrary then one class resonant frequency is higher.Energy converter can design different steady operation frequencies according to application demand
Supersonic frequency is supersonic frequency under 5MHz, cMUT steady operation mode under the sensor of combination, such as pMUT steady operation modes
It is 5MHz, pMUT stable state work for supersonic frequency under the ultrasound detection sensor (Fig. 2) or cMUT steady operation modes of 20MHz
Make the ultrasound detection sensor (Fig. 3) that supersonic frequency under mode is 20MHz.In some embodiments, the multistable
Ultrasound detection sensor can be the array ultrasound transducers such as 1D, 2D, wherein 1D array energy transducers refer to transducer unit along
Length direction is arranged in a straight line, and 2D array energy transducers refer to that transducer unit is arranged in a straight line along length and width direction.
The multistable ultrasound detection sensor, sensor can be single element transducer or be pressed by multiple array elements concentric
The ultrasonic transducer that round mode arranges.
By the design realize multistable ultrasound detection sensor have it is small be easily integrated, low in energy consumption, performance can
Lean on, working frequency is adjustable, ultrasound detection mode can the advantages such as free switching, by different outer package forms, which can be with
Ultrasound detection is carried out in a variety of varying environments such as vacuum, air, underwater.Compared with the existing methods, what the present invention designed is multistable
State ultrasound detection sensor has the characteristics that：
(1) by structure design appropriate by piezoelectric micromachined ultrasonic transducer (pMUT) and micro- capacitance ultrasonic transducer
(cMUT) two kinds of energy converter working method is combined together, and breaks through what traditional devices can only be worked with single steady state way
Limitation realizes multistable ultrasound detection；
(2) by adjusting the structural parameters of energy converter, it can be achieved that arbitrary supersonic frequency combination multistable ultrasound detection,
Such as can realize that low frequency ultrasound sensing and high frequency ultrasound are sensed by Electromechanical Control circuit, take into account the depth of ultrasound detection with
Resolution ratio, structure design is flexible, and application prospect is extensive；
(3) this device has both the advantages of pMUT and cMUT, can be flexibly applied to gaseous state, liquid, solid state media medium it is super
Acoustic detection, impedance matching are simple, in this embodiment it is not even necessary to matching layer；
(4) this device is made of micro-nano technology technology, small, low in energy consumption, is conducive to the mass production of device, device
Part production cost is low, and consistency of performance is good；
(5) device can be widely applied to underwater acoustic wave detection, biomedical imaging and industrial ultrasonic non-destructive testing etc.
Multiple fields
Description of the drawings
Fig. 1：Multistable ultrasound detection sensor operating principles figure；
Fig. 2：PMUT steady frequencies are that the ultrasound detection sensors sides structure that 5MHz, cMUT steady frequency are 20MHz is shown
It is intended to (structure one)；
Fig. 3：CMUT steady frequencies are that the ultrasound detection sensors sides structure that 5MHz, pMUT steady frequency are 20MHz is shown
It is intended to (structure two)；
Fig. 4：The schematic diagram when two layers of piezoelectric membrane is attracted of sensor shown in structure one；
Fig. 5：The schematic diagram when two layers of piezoelectric membrane is attracted of sensor shown in structure two.
Label in attached drawing is respectively：1, Electromechanical Control circuit board, 2, back sheet, 3, high pressure resistant insulation layer, 4, metal electricity
Pole, 5, cavities seals layer, 6, piezoelectric membrane, 7, acoustic impedance matching layer.
Specific implementation mode
The present invention provides a kind of multistable ultrasound detection sensor, including Electromechanical Control circuit board 1, back sheet 2, high pressure resistant
Insulating layer 3, metal electrode 4, cavities seals layer 5, piezoelectric membrane 6 and acoustic impedance matching layer 7.Come with reference to the accompanying drawings and examples
Illustrate the specific implementation method of the present invention.
A kind of multistable ultrasound detection sensor provided in this embodiment, specific technology implementing though：Using electromechanics
Control circuit controls the working method of multistable ultrasound detection sensor, according to practical application request in the two kinds of sides pMUT and cMUT
Switch between formula, the operating mode selection transmitting further according to required energy converter or reception ultrasonic wave, as shown in Figure 1.
The present embodiment provides the multistable ultrasound detection sensors of two kinds of different structures：PMUT steady operation supersonic frequencies are
5MHz, cMUT steady operation supersonic frequency are the ultrasound detection sensor of 20MHz, and texture edge is as shown in Figure 2；CMUT stable state works
It is the ultrasound detection sensor that 5MHz, pMUT steady operation supersonic frequency are 20MHz, texture edge such as Fig. 3 institutes as supersonic frequency
Show.
In the multistable ultrasound detection sensor (Fig. 2) shown in structure one, the ultrasonic transducer under pMUT modes is main
Including five layers, i.e., upper layer piezoelectric membrane 6, upper layer piezoelectric membrane top and bottom end metal electrode 4, top metal electrode upper layer are sound
Impedance matching layer 7, bottom end metal electrode lower layer are upper layer cavities seals layer 5, and rest part is for working sensor state without shadow
It rings, can be not considered.When energy converter is worked with emission mode, apply between the metal electrode of upper layer piezoelectric membrane both ends appropriate big
Small high frequency excitation voltage exports super when energy converter works in a receiving mode between the metal electrode of upper layer piezoelectric membrane both ends
The voltage signal of sound wave corresponding frequencies.Ultrasonic transducer under cMUT modes needs first in upper layer cavities seals layer both ends metal electrode
The voltage for applying sufficient intensity between (C, D) makes upper layer piezoelectric membrane and lower layer's piezoelectric membrane occur to be attracted (under collapsed mode
Energy converter side structure is as shown in Figure 4), metal electrode E is cascaded with metal electrode D, the upper end of lower layer piezoelectric membrane apex electrode C
Lower end for high pressure resistant insulation layer 3, lower layer piezoelectric membrane bottom electrode B is lower layer's cavities seals layer, the cavities seals layer lower end
For high pressure resistant insulation layer, insulating layer is covered in the upper surface of metal electrode A, and the lower end of metal electrode A is back sheet 2, is deposited on
The upper surface of Electromechanical Control circuit board 1.When energy converter is worked with emission mode, in lower layer's cavities seals layer both ends metal electrode
Apply appropriately sized high frequency excitation voltage between (A, B), it is defeated between metal electrode A and B when energy converter works in a receiving mode
Go out the current signal of ultrasonic wave corresponding frequencies.
In the multistable ultrasound detection sensor (Fig. 3) shown in structure two, the ultrasonic transducer under cMUT modes is main
Including six layers, i.e., upper layer cavities seals layer 5, the cavities seals layer top be metal electrode 4, metal electrode C upper end be upper layer
The upper end of piezoelectric membrane 6, the piezoelectric membrane is acoustic impedance matching layer 7, and high pressure resistant insulation layer 3 is in upper layer cavities seals layer and metal
Among electrode B, rest part without influence, can be not considered working sensor state.When energy converter is worked with emission mode
When, apply appropriately sized high frequency excitation voltage between the metal electrode of upper layer cavities seals layer both ends, when energy converter is to receive mould
When formula works, the current signal of output ultrasonic wave corresponding frequencies between metal electrode B and C.Ultrasonic transducer under pMUT patterns
The voltage for first applying sufficient intensity between upper layer cavities seals layer both ends metal electrode (B, C) is needed to make upper layer piezoelectric membrane under
It is laminated conductive film to occur to be attracted (the energy converter side structure under collapsed mode is as shown in Figure 5), lower layer's piezoelectric membrane top is gold
Belong to electrode B, the bottom end of lower layer's piezoelectric membrane is high pressure resistant insulation layer, which is covered in the upper end of metal electrode A, metal electricity
The lower end of pole A is back sheet 2, is deposited on the upper end of Electromechanical Control circuit board 1.When energy converter is worked with emission mode,
Apply appropriately sized high frequency excitation voltage between lower layer's cavities seals layer both ends metal electrode (A, B), when energy converter is to receive mould
When formula works, the voltage signal of output ultrasonic wave corresponding frequencies between metal electrode A and B.
It should be noted that may each be one layer per layer of material or there is multiple-layer stacked to form, such as acoustic impedance matching layer
There can be one or more layers, piezoelectric membrane there can also be one or more layers.The position of Electromechanical Control circuit board is not limited in backing
The bottom end of layer, such as the side of piezoelectric membrane can be disposed at, the transmitting of control energy converter can be added in circuit board and connect
The special integrated electronic circuit chip (ASIC) received.
Piezoelectric membrane described in the present embodiment, material can be piezoelectric ceramics, piezoelectric monocrystal, piezo-electricity composite material or
Piezopolymer etc..Wherein, piezoelectric ceramics can be PZT, AlN, ZnO or other piezoelectric materials.Piezoelectric membrane shape can be with
For round, rectangular or polygon plane element.
In embodiment, high pressure resistant insulation layer is not particularly limited, and is prevented when capacitor plate is attracted as long as can play
Only short circuit and avoid being broken down by high-voltage, such as materials such as polyvinyl fluoride, polyethylene, polylactic acid.
The requirement and processing work that the selection of device parameters can be according to required working frequency in practical application in the present embodiment
The level of skill is set, and the more high then transducer unit overall dimensions of working frequency are smaller.For example, if it is desired to energy converter is in pMUT moulds
Working frequency under formula is 3.5MHz or so (being designed according to structure one), and piezoelectric membrane selects AlN materials, then the side of film square
It is long to be respectively with thickness：50 μm and 0.5 μm, 70 μm and 1 μm or 85 μm and 1.5 μm.
In conclusion the two kinds of ultrasonic transducer working methods of pMUT and cMUT are combined together by the present invention, it is real
Existing multistable ultrasound detection can be carried out low frequency ultrasound sensing by Electromechanical Control circuit and high frequency ultrasound senses, taken into account super
The depth and resolution ratio of sound detection can be widely applied to the fields such as industry, medical treatment, military affairs, agricultural.
The above embodiments are merely illustrative of the technical solutions of the present invention, does not describe all details in detail, also unlimited
The system present invention is the specific implementation mode.Obviously, many modifications and variations can be done according to the content of this specification.If
Within the scope of the claims of the present invention and its equivalent technology for these modifications and changes of the present invention, then of the invention
It is intended to encompass including these modification and variations.
Claims (9)
1. a kind of multistable ultrasound detection sensor, including acoustic resistance matching layer, metal electrode, piezoelectric membrane, high pressure resistant insulation layer,
Cavities seals layer, back sheet and Electromechanical Control circuit board, it is characterised in that sensor realizes pressure on the same transducer unit
The multistable ultrasonic sensing that electric-type and condenser type are combined with each other, each steady operation mode emit according to respective working frequency or
Ultrasonic wave is received, can realize that working method switches using Electromechanical Control circuit.
2. multistable ultrasound detection sensor according to claim 1, it is characterised in that：The multistable ultrasound detection
First-order bending vibration frequency when sensor works according to pMUT and cMUT steady state ways respectively is：Wherein, αp1And αc1Respectively under pMUT and cMUT patterns
Single order vibration factor, tpAnd tcRespectively pMUT and cMUT patterns push the thickness of conductive film, and A is the surface area of piezoelectric membrane,
Y0For the Young's modulus of piezoelectric membrane, ρ is the density of piezoelectric membrane, and ν is the Poisson's ratio of piezoelectric membrane.
3. multistable ultrasound detection sensor according to claim 2, it is characterised in that：The multistable ultrasound detection
Sensor can be combined into bistable state or multistable configuration by pMUT and cMUT working methods, and supersonic frequency can appoint under each stable state
Meaning selection design.
4. multistable ultrasound detection sensor according to claim 3, it is characterised in that：The multistable ultrasound detection
Sensor can carry out low frequency ultrasound sensing according to pMUT modes and cMUT modes carry out high frequency ultrasound sensing, or according to the side cMUT
Formula carries out low frequency ultrasound sensing and pMUT modes carry out high frequency ultrasound two kinds of structures of sensing and are designed, and takes into account the depth of ultrasound detection
Degree and resolution ratio.
5. multistable ultrasound detection sensor according to claim 1, it is characterised in that：The acoustic resistance matching layer, pressure
Conductive film and Electromechanical Control circuit board can be one layer or be formed by multiple-layer stacked.
6. multistable ultrasound detection sensor according to claim 1, it is characterised in that：The piezoelectric film material choosing
From piezoelectric ceramics, piezoelectric monocrystal, piezo-electricity composite material or piezopolymer.
7. multistable ultrasound detection sensor according to claim 1, it is characterised in that：The high pressure resistant insulation layer is made
With being to prevent electrical short when capacitor plate is attracted and piezoelectric membrane is avoided to be broken down by high-voltage.
8. multistable ultrasound detection sensor according to claim 1, it is characterised in that：The metal electrode selects tool
There is the metal material of satisfactory electrical conductivity.
9. multistable ultrasound detection sensor according to claim 1, it is characterised in that：The multistable ultrasound detection
Sensor includes the one dimensional line array (1D) of ultrasonic transducer unit, two-dimensional surface array (2D) array energy transducer, or is Dan Zhen
First sensor, the sensor arranged in the way of concentric ring by multiple array elements realize two dimension or three-dimensional real time imagery.
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| CN110325293B (en) * | 2016-12-22 | 2021-06-22 | 皇家飞利浦有限公司 | System and operation method of capacitive radio frequency micro-electromechanical switch |
| CN107151864B (en) * | 2017-05-08 | 2019-03-12 | 西安交通大学 | Sensitive function layer preparation method based on CMUTs resonant mode biochemical sensor |
| EP3459646A1 (en) * | 2017-09-22 | 2019-03-27 | Koninklijke Philips N.V. | Ultrasound transducer device and method for controlling the same |
| CN108889589B (en) * | 2018-04-23 | 2023-09-12 | 中国科学院苏州生物医学工程技术研究所 | Ultrasonic transducer and ultrasonic device |
| CN108918662B (en) * | 2018-05-16 | 2020-10-27 | 西安交通大学 | CMUTs fluid density sensor and preparation method thereof |
| CN108732249B (en) * | 2018-05-25 | 2021-01-05 | 中国兵器科学研究院宁波分院 | Multi-mode synchronous triggering control circuit and method in automatic ultrasonic detection system |
| CN109092649B (en) * | 2018-09-05 | 2020-05-22 | 西安交通大学 | Electrostatic-piezoelectric hybrid driving transceiving integrated CMUT and using method and preparation method thereof |
| CN110057907B (en) * | 2019-03-22 | 2021-11-23 | 天津大学 | CMUT (capacitive micromachined ultrasonic transducer) for gas sensing and preparation method |
| EP4003612B1 (en) * | 2019-07-24 | 2024-05-15 | Vermon S.A. | Method of manufacturing a panel transducer scale package |
| CN110672721B (en) * | 2019-10-18 | 2022-02-15 | 云南电网有限责任公司曲靖供电局 | Capacitor voltage transformer partial pressure capacitor surface defect monitoring module |
| CN112414601B (en) * | 2020-11-18 | 2021-10-26 | 北京理工大学 | Wide frequency ultrasonic transducer |
| CN114543715A (en) * | 2022-02-18 | 2022-05-27 | 上海声动微科技有限公司 | Ultrasonic sensor and manufacturing method |
| CN116184140A (en) * | 2023-04-21 | 2023-05-30 | 北京西能电子科技发展有限公司 | Multifunctional monomer sensor suitable for GIS equipment defect detection |
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| CN100365840C (en) * | 2005-11-30 | 2008-01-30 | 南京大学 | Plane-type compound structure supersonic transducer |
| EP2268419A1 (en) * | 2008-01-09 | 2011-01-05 | Surf Technology AS | Multiple frequency band acoustic transducer arrays |
| ES2458629T3 (en) * | 2009-06-19 | 2014-05-06 | Sonovia Holdings Llc | Dual Frequency Ultrasound Transducer |
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