CN109984771A - A kind of ultrasound transducer probe and ultrasonic imaging device - Google Patents

A kind of ultrasound transducer probe and ultrasonic imaging device Download PDF

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Publication number
CN109984771A
CN109984771A CN201910371588.4A CN201910371588A CN109984771A CN 109984771 A CN109984771 A CN 109984771A CN 201910371588 A CN201910371588 A CN 201910371588A CN 109984771 A CN109984771 A CN 109984771A
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CN
China
Prior art keywords
ultrasound transducer
transducer probe
block
electrode
piezoelectric material
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CN201910371588.4A
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CN109984771B (en
Inventor
阮佳佶
岳晴雯
李倩
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Shanghai Ai Sheng Biologic Medical Science And Technology Ltd
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Shanghai Ai Sheng Biologic Medical Science And Technology Ltd
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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4444Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70Specific application
    • B06B2201/76Medical, dental

Abstract

The invention discloses a kind of ultrasound transducer probe, ultrasound transducer probe includes multiple ultrasound transducer probe units being stacked;The ultrasound transducer probe unit includes block of piezoelectric material, first electrode and second electrode;The first electrode and the second electrode are arranged in the block of piezoelectric material surface and there is the area of isolation of insulation between the two;There is electrical connection in the identical electrodes of the adjacent ultrasound transducer probe unit;Area of isolation on the surface of the adjacent ultrasound transducer probe unit contacted with each other is partially overlapped or is completely coincident, make the electrode of the area of isolation two sides after being overlapped without electrical connection, ultrasound transducer probe described in ultrasound transducer probe ultrasound transducer probe includes the ultrasound transducer probe unit of the different block of piezoelectric material of thickness, can increase the adjustable range of device electrical impedance under the premise of low cost.The present invention goes back while providing a kind of ultrasonic imaging device with above-mentioned beneficial effect.

Description

A kind of ultrasound transducer probe and ultrasonic imaging device
Technical field
The present invention relates to energy conversion technique fields, more particularly to a kind of ultrasound transducer probe and ultrasonic imaging device.
Background technique
Ultrasonic imaging device is as a kind of energy transducer realizing electric energy harmony and capable of mutually converting, in addition to device itself needs to have Outside standby excellent acoustics and electric property, the ultrasonic image-forming system circuit of energy converter and the ultrasonic imaging device being attached thereto whether Match, also influences whether the watt level that energy converter itself is obtained from ultrasonic imaging device.Therefore, in transducer designs, to the greatest extent may be used Can the electrical impedance phase of the electrical impedance of device and the ultrasonic image-forming system circuit of ultrasonic imaging device is allowed by electrical design Match, it appears most important.
In the prior art if it is desired to changing the electrical impedance of device, generally can set about to consider from the material of device, by changing The material for becoming device changes the resistance of device, be allowed to it is consistent with the electrical impedance of ultrasonic testing system as far as possible (i.e. as far as possible and outside The electrical impedance of portion's circuit is identical), but only change material is not only with high costs, and the range very little of adjustable resistor, very Difficulty achievees the effect that preferably to adjust resistance, therefore, finds a kind of low in cost and can adjust ultrasonic waves in a big way The method of the electrical impedance of energy device is at those skilled in the art's urgent problem to be solved.
Summary of the invention
The object of the present invention is to provide a kind of ultrasound transducer probe and ultrasonic imaging devices, to solve resistance in the prior art The problem that anti-adjustable extent is too small and cost is excessively high.
In order to solve the above technical problems, the present invention provides a kind of ultrasound transducer probe, the ultrasound transducer probe packet Include multiple ultrasound transducer probe units being stacked;
The ultrasound transducer probe unit includes block of piezoelectric material, first electrode and second electrode;
The first electrode and the second electrode are arranged on the block of piezoelectric material surface;
There is the area of isolation of insulation between the first electrode and the second electrode;
There is electrical connection between the identical electrodes of the adjacent ultrasound transducer probe unit;The adjacent ultrasound is changed Area of isolation on the surface of energy device contact unit contacted with each other is partially overlapped or is completely coincident, and makes the isolation after being overlapped The electrode of region two sides is without electrical connection;
Ultrasound transducer probe described in ultrasound transducer probe ultrasound transducer probe includes the different piezoelectricity of thickness The ultrasound transducer probe unit of material block makes the electrical impedance and ultrasonic image-forming system circuit of the ultrasound transducer probe Electrical impedance it is consistent.
Further, in the ultrasound transducer probe, the block of piezoelectric material is chip type piezoelectric material block.
Further, in the ultrasound transducer probe, the chip type piezoelectric material block is rectangular patch piezoresistive material Expect block or round sheet block of piezoelectric material.
Further, in the ultrasound transducer probe, the area of isolation is in the chip type piezoelectric material block The upper surface and the lower surface.
Further, in the ultrasound transducer probe, when the chip type piezoelectric material block is rectangular patch piezoelectricity When material block, the area of isolation in the upper surface is to be in the high perpendicular bisector of the upper surface standard as symmetrical centre Symmetrically;
The area of isolation in the lower surface is to be in the high perpendicular bisector of the lower surface standard as symmetrical centre Symmetrically;
In a height of upper surface of standard or the lower surface, it is parallel to first side surface and described second side The height on surface;
Second side surface is the surface opposite with first side surface.
Further, in the ultrasound transducer probe, the first electrode is set to the rectangular patch piezoelectricity The upper surface of material block and the first side surface;
The second electrode is set to the lower surface and the second side surface of the rectangular patch block of piezoelectric material.
Further, in the ultrasound transducer probe, the area of isolation is straight line area of isolation.
Further, in the ultrasound transducer probe, the area of the first electrode and the area of second electrode It is equal.
Further, in the ultrasound transducer probe, the block of piezoelectric material includes inorganic piezoelectric ceramic material Piece, inorganic piezoelectric monocrystal material piece, piezo-electricity composite material piece and organic piezoelectric materials block.
The present invention also provides a kind of ultrasonic imaging device, the ultrasonic imaging device includes ultrasonic image-forming system circuit and above-mentioned Any ultrasound transducer probe.
Ultrasound transducer probe provided by the present invention, the ultrasound transducer probe include multiple ultrasounds being stacked Transducer probe unit;The ultrasound transducer probe unit includes block of piezoelectric material, first electrode and second electrode;Described One electrode and the second electrode are arranged on the block of piezoelectric material surface;It is deposited between the first electrode and the second electrode In the area of isolation of insulation;There is electrical connection between the identical electrodes of the adjacent ultrasound transducer probe unit;Adjacent Area of isolation on the surface of the ultrasound transducer probe unit contacted with each other is partially overlapped or is completely coincident, and is made in weight The electrode of area of isolation two sides after conjunction without electrical connection, visit by ultrasonic transducer described in ultrasound transducer probe ultrasound transducer probe Head includes the ultrasound transducer probe unit of the different block of piezoelectric material of thickness, makes the ultrasound transducer probe Electrical impedance is consistent with the electrical impedance of ultrasonic image-forming system circuit.The application passes through the thickness for changing block of piezoelectric material, adjustable The electrical impedance of the ultrasound transducer probe makes the electrical impedance and ultrasonic image-forming system electricity of the ultrasound transducer probe The electrical impedance on road is consistent, and the electrical impedance of the ultrasound transducer probe and the electrical impedance of the ultrasonic image-forming system circuit more connect Closely, the obtainable power of the ultrasound transducer probe is bigger, and therefore, the technical solution of the application can effectively be promoted described super The working efficiency of sonic transducer probe, promotes energy utilization rate;In addition, since thickness can continuously adjust, compared to existing Technology changes electrical impedance by replacement energy converter material, and the technical solution of the application can get bigger adjustable range, and drop Cost needed for low adjusting electrical impedance.The present invention goes back while providing a kind of ultrasonic imaging device with above-mentioned beneficial effect.
Detailed description of the invention
It, below will be to embodiment or existing for the clearer technical solution for illustrating the embodiment of the present invention or the prior art Attached drawing needed in technical description is briefly described, it should be apparent that, the accompanying drawings in the following description is only this hair Bright some embodiments for those of ordinary skill in the art without creative efforts, can be with root Other attached drawings are obtained according to these attached drawings.
Fig. 1 is a kind of front view of specific embodiment of ultrasound transducer probe provided by the invention;
Fig. 2 is a kind of structural schematic diagram of specific embodiment of ultrasound transducer probe provided by the invention;
Fig. 3 is a kind of specific embodiment of the ultrasound transducer probe unit of ultrasound transducer probe provided by the invention Front view;
Fig. 4 is a kind of specific embodiment party of the ultrasound transducer probe unit of ultrasound transducer probe provided by the invention The top view of formula;
Fig. 5 is a kind of specific embodiment party of the ultrasound transducer probe unit of ultrasound transducer probe provided by the invention The left view of formula;
Fig. 6 is another specific implementation of the ultrasound transducer probe unit of ultrasound transducer probe provided by the invention The front view of mode;
Fig. 7 is another specific implementation of the ultrasound transducer probe unit of ultrasound transducer probe provided by the invention The front view of mode;
Fig. 8 is also a kind of specific implementation of the ultrasound transducer probe unit of ultrasound transducer probe provided by the invention The front view of mode;
Fig. 9 is also a kind of specific implementation of the ultrasound transducer probe unit of ultrasound transducer probe provided by the invention The structural schematic diagram of mode;
Figure 10 be the ultrasound transducer probe unit of ultrasound transducer probe provided by the invention another is specific The front view of embodiment;
Figure 11 be the ultrasound transducer probe unit of ultrasound transducer probe provided by the invention another is specific The top view of embodiment;
Figure 12 is the electrical impedance amplitude figure of the resonance point of ultrasound transducer probe in the prior art;
Figure 13 is a kind of electrical impedance width of the resonance point of specific embodiment of ultrasound transducer probe provided by the invention Value figure;
Figure 14 (a) is a kind of acoustic echo curve of specific embodiment of ultrasound transducer probe provided by the invention Figure;
Figure 14 (b) is a kind of spectrum curve figure of specific embodiment of ultrasound transducer probe provided by the invention;
Figure 14 (c) is a kind of acoustic echo curve graph of specific embodiment of ultrasound transducer probe in the prior art;
Figure 14 (d) is a kind of spectrum curve figure of specific embodiment of ultrasound transducer probe in the prior art;
Figure 15 is another specific embodiment electrical impedance curve graph of ultrasound transducer probe provided by the invention;
Figure 16 is a kind of specific embodiment of ultrasound transducer probe provided by the invention at first resonance point, pressure The impedance magnitude of electric material block and the relational graph of block of piezoelectric material thickness;
Figure 17 is a kind of specific embodiment of ultrasound transducer probe provided by the invention at first antiresonance point, The impedance magnitude of block of piezoelectric material and the relational graph of block of piezoelectric material thickness;
Figure 18 is a kind of specific embodiment of ultrasound transducer probe provided by the invention at second resonance point, pressure The impedance magnitude of electric material block and the thickness relationship figure of block of piezoelectric material;
Figure 19 is a kind of specific embodiment of ultrasound transducer probe provided by the invention at second antiresonance point, The impedance magnitude of block of piezoelectric material and the thickness relationship figure of block of piezoelectric material.
Specific embodiment
It needs to illustrate in advance, since ultrasonic imaging device is made of host and ultrasound transducer probe two parts, and lead There are intrinsic ohmages for machine, according to power calculation when the impedance value of host and probe is closer, then under same voltage Transducer power is bigger, then transducing ratio is higher, and above-mentioned ultrasonic image-forming system circuit is and removes above-mentioned ultrasound to change in the application The total electrical impedance of remaining circuit structure after energy device probe.
With advances in technology, ultrasonic imaging device has increasingly vast potential for future development.Ultrasonic imaging device is a kind of It is the device of mechanical energy (sound energy) by electromagnetic energy, by resonance in the block of piezoelectric material of supersonic frequency, by the pressure of material Electrical effect converts electrical signals to mechanical oscillation.Medical ultrasonic imaging device is an important application side of ultrasonic imaging device To internal usually all includes an electric energy-storage travelling wave tube and a mechanical vibrating system.When energy converter is used as transmitter, from The electric oscillation signal that excitation power supply is sent will cause the variation in electric field or magnetic field in electric energy storage components in energy converter, and this variation is logical It crosses certain effect and one motive force is generated to the mechanical vibrating system of energy converter, make it into vibrational state, to push and change The medium that energy device mechanical vibrating system is in contact vibrates, the radiative acoustic wave into medium.Receive sound wave process just with this On the contrary, external sound wave effect is on the vibration plane of energy converter, to make the mechanical vibrating system of energy converter vibrate, by certain Kind physical effect causes electric field or magnetic field in energy converter energy-storage travelling wave tube that corresponding variation occurs, so as to cause the electricity of energy converter Output end generates the voltage and current for corresponding to acoustical signal.
Ultrasound transducer probe generally requires lesser size to meet detection demand, this is limiting energy converter entirety When the size of structure, the area S of block of piezoelectric material 103 in energy converter is also limited, and to make the work frequency of ultrasonic imaging device Domain needs to increase the thickness d of block of piezoelectric material 103 in low-frequency range.According to the decision formula of capacitor
C=ε S/4 π kd
It is found that in this case since lesser S and biggish d can be such that the capacitor of block of piezoelectric material 103 substantially reduces, and by Electrical impedance formula
Z=R+i (ω L -1/ (ω C))
It knows that block of piezoelectric material 103 is bigger as the smaller then electrical impedance of its capacitor of capacitive load, is unfavorable for converting electrical energy into For mechanical energy.Therefore in order to increase this kind of small size ultrasonic imaging device energy conversion rate, need meet it is lesser Increase its capacitor under the conditions of 103 area S of block of piezoelectric material and biggish thickness d to reduce its electrical impedance.
In order to enable those skilled in the art to better understand the solution of the present invention, with reference to the accompanying drawings and detailed description The present invention is described in further detail.Obviously, described embodiments are only a part of the embodiments of the present invention, rather than Whole embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creative work premise Under every other embodiment obtained, shall fall within the protection scope of the present invention.
Core of the invention is a kind of ultrasound transducer probe, a kind of front view of specific embodiment as shown in Figure 1, It is called specific embodiment one, above-mentioned ultrasound transducer probe includes multiple ultrasound transducer probe units being stacked;
Above-mentioned ultrasound transducer probe unit includes block of piezoelectric material 103, first electrode 101 and second electrode 102;
Above-mentioned first electrode 101 is arranged with above-mentioned second electrode 102 on above-mentioned 103 surface of block of piezoelectric material;
There is the area of isolation 104 of insulation between above-mentioned first electrode 101 and above-mentioned second electrode 102;Adjacent is above-mentioned There is electrical connection between the identical electrodes of ultrasound transducer probe unit;
Area of isolation 104 on the surface of adjacent above-mentioned ultrasound transducer probe unit contacted with each other partially overlap or It is completely coincident, makes the electrode of 104 two sides of area of isolation after being overlapped without electrical connection;
Above-mentioned ultrasound transducer probe includes the above-mentioned ultrasound transducer probe of the different above-mentioned block of piezoelectric material 103 of thickness Unit keeps the electrical impedance of above-mentioned ultrasound transducer probe consistent with the electrical impedance of ultrasonic image-forming system circuit of ultrasonic imaging device.
It should be noted that the structure for belonging to different ultrasound transducer probe units is distinguished in figure with a, b, such as " 101a " " 101b " respectively indicates the first electrode 101 of two different ultrasound transducer probe units.
Especially it is noted that, " electrical impedance is consistent " in the application refers to the resistance of above-mentioned ultrasound transducer probe It is anti-as identical as possible as the electrical impedance of the ultrasonic image-forming system circuit of ultrasonic imaging device, in actual production, due to above-mentioned ultrasound Transducer probe and above-mentioned ultrasonic image-forming system circuit all have complicated circuit structure, therefore keep the electrical impedance numerical value of the two complete Exactly the same difficulty is too big, and since the electrical impedance of the two is closer, the above-mentioned obtainable power of ultrasound transducer probe is higher, Therefore " consistent " in the application indicate as close possible to.
It should be noted that the vibration mode of above-mentioned block of piezoelectric material 103 is related to the geomery of material, the present invention is related to And the piezoelectric vibrator that the above-mentioned block of piezoelectric material 103 arrived makes is strip oscillator, the vibration mode of oscillator is strip thickness Vibration mode.The present invention uses electrical parallel structure, under the premise of adjusting the electrical impedance of oscillator according to the design needs, not There are the strip shape and overall thickness for changing oscillator, that is to say, that the operation carried out in the application specially sets required After vibrating mode and frequency, keep the overall thickness of the ultrasound transducer probe constant, by adjusting each piezoelectric material The thickness of block, to improve the efficiency of the ultrasound transducer probe, therefore electrical parallel effect of the invention is piezoelectric material The vibration mode of block 103 still maintains the vibration mode of original non-parallel-connection structure, will not be because of the introducing of electrical parallel structure Change the vibration mode of above-mentioned PZT (piezoelectric transducer) probe.
Further, above-mentioned ultrasound transducer probe can be suitable by changing the arrangement of the piezoelectric material of above-mentioned different-thickness The energy that sequence changes different resonance points and antiresonance point in turn distributes, can vibration according to actual conditions to above-mentioned ultrasonic imaging device Mode is for further adjustments.
The ultrasound transducer probe of present embodiment, including multiple ultrasound transducer probe units being stacked; Above-mentioned ultrasound transducer probe unit includes block of piezoelectric material 103, first electrode 101 and second electrode 102;Above-mentioned first electrode 101 are arranged with above-mentioned second electrode 102 on above-mentioned 103 surface of block of piezoelectric material;Above-mentioned first electrode 101 and above-mentioned second electrode There is the area of isolation 104 of insulation between 102;On the surface of adjacent above-mentioned ultrasound transducer probe unit contacted with each other Area of isolation 104 is partially overlapped or is completely coincident, and makes the electrode of 104 two sides of area of isolation after being overlapped without electrical connection, on State the above-mentioned ultrasound transducer probe unit that ultrasound transducer probe includes the different above-mentioned block of piezoelectric material 103 of thickness.This Shen Please by changing the thickness of block of piezoelectric material 103, the electrical impedance of adjustable above-mentioned ultrasound transducer probe makes above-mentioned ultrasound The electrical impedance of transducer probe is consistent with the electrical impedance of above-mentioned ultrasonic image-forming system circuit, and the electricity of above-mentioned ultrasound transducer probe Impedance and the electrical impedance of above-mentioned ultrasonic image-forming system circuit are closer, and the above-mentioned obtainable power of ultrasound transducer probe is got over Greatly, therefore, the technical solution of the application can effectively promote the working efficiency of above-mentioned ultrasound transducer probe, promote using energy source Rate;In addition, since thickness can continuously adjust, compared with prior art electrical impedance is changed by replacement energy converter material, The technical solution of the application can get bigger adjustable range, and reduce adjust electrical impedance needed for cost.
It should be noted that the electrical impedance of external circuit (i.e. ultrasonic testing system) is less than ultrasound under normal circumstances to change The electrical impedance of energy device probe, therefore the data that the application provides are to reduce the data of above-mentioned ultrasound transducer probe.
Further, after the thickness for determining the block of piezoelectric material 103 of good each above-mentioned ultrasound transducer probe unit, also It can change the Energy distribution of each resonance point by changing putting in order for above-mentioned block of piezoelectric material 103, reach expected effect Fruit.
Since power occurs for ultrasound transducer probe to greatly increase with can get maximum on antiresonance point in resonance point Add transmitting and the range of receiving of the frequency of energy converter, therefore, the impedance adjusting in the application is defaulted as resonance point and antiresonance point Impedance adjusting.
A working frequency has been designed and produced with the above-mentioned ultrasound transducer probe elementary layer poststack of two panels as the ultrasound of 3MHz Transducer probe compares ultrasound transducer probe provided by the invention and uses in the prior art from electricity and acoustics performance evaluation The ultrasonic imaging device that conventional monolayers block of piezoelectric material 103 makes, concrete outcome is as shown in Figure 12 to Figure 14;
Figure 12 and Figure 13 is the ultrasound transducer probe resonance point of ultrasound transducer probe and the prior art of the invention The comparison of electrical impedance amplitude;
In from Figure 12 to Figure 13 as can be seen that in the substantially similar situation of frequency, using ultrasonic transducer of the invention The electrical impedance of probe is about reduced to a quarter of the electrical impedance of conventional ultrasound transducer probe, closer to ultrasonic imaging The electrical impedance of instrument detection system effectively increases the electricity matching capacity between ultrasonic imaging device device and detection system, and The electricity phase curve of two kinds of structures is consistent substantially.
Figure 14 is the acoustic echo and frequency of the ultrasound transducer probe of ultrasound transducer probe and the prior art of the invention Spectral curve, wherein Figure 14 (a) and Figure 14 (b) is the echo and spectrum measurement result of ultrasound transducer probe of the invention;Figure 14 It (c) is the echo and spectrum measurement result of the ultrasound transducer probe of the prior art with Figure 14 (d).
Partially abbreviation is explained as follows in Figure 14:
LS: the loop sensitivity (Loop Sensitivity) of ultrasound transducer probe represents ultrasound transducer probe The efficiency of energy, high sensitivity indicate high transformation efficiency;
T6: pulse length corresponding to the signal strength decline 6dB of ultrasound transducer probe;
T20: pulse length corresponding to the signal strength decline 20dB of ultrasound transducer probe;
Peak: the echo-signal of ultrasound transducer probe corresponding frequency in amplitude maximum place in frequency domain bandwidth;
FC: the centre frequency of ultrasound transducer probe;
B6: for ultrasound transducer probe in frequency domain, relative maximum amplitude declines the bandwidth of 6dB;
B20: for ultrasound transducer probe in frequency domain, relative maximum amplitude declines the bandwidth of 20dB.
It can be seen that from the test result of Figure 14 due to using parallel-connection structure provided by the invention, so that ultrasonic imaging Instrument echo has obtained stronger echo-signal, as shown in the figure, the echo loop sensitivity (LS) of ultrasonic imaging device by it is traditional- 60.21dB (shown in Figure 14 (c)) is enhanced to -58.81dB (Figure 14 (a) of ultrasonic imaging device echo loop sensitivity of the invention It is shown);Signal strength enhances about 1.5dB.
- 20dB the pulse length of ultrasonic imaging device is the great influence parameter of energy converter longitudinal direction imaging resolution, generally, Pulse length is longer, and longitudinal imaging resolution of ultrasonic imaging device is lower;It is designed using the block of piezoelectric material 103 of different structure, The pulse length (T20) of energy converter imaging resolution is influenced also from 1.01 μ s (such as Figure 14 of the traditional design structure of the prior art (c) shown in) it is reduced to 0.982 μ s of the invention (shown in such as Figure 14 (a)).
From frequency spectrum accordingly come compare two kinds of structures design ultrasound transducer probe performance can be seen that Figure 14 (b) compared with Figure 14 (d) has -6dB bandwidth to have certain improvement under conditions of centre frequency is almost the same, and -20dB bandwidth has It is effective to improve.
Therefore, it from the available conclusion of ultrasound transducer probe example of making, is visited using the ultrasonic transducer that the present invention expects Head is effective due to electric property in contrast to the ultrasound transducer probe of traditional structure block of piezoelectric material 103 is used in the prior art Improve, available higher sensitivity, resolution ratio and band merit.
Fig. 1 is the front view of present embodiment, and the block of piezoelectric material 103 being below in figure is obviously than in top Block of piezoelectric material 103 thickness it is big.
Present embodiment is obtained by changing the thickness relationship between each above-mentioned block of piezoelectric material 103a, 103b of layer Device different resonance point and antiresonance point, modulate the frequency response of transducer probe, can further regulate and control above-mentioned ultrasonic transduction The electrical impedance of device probe, to meet different actual demands.By taking double-layer structure as an example, there is the change of the electrical impedance curve of Figure 15 Effect.
It can be seen that can be obtained not when two pieces of 103 thickness differences of block of piezoelectric material in parallel from the result of Figure 15 Resonance point and antiresonance point less than two groups.While being beneficial to multi resonant vibration frequency, the change of thickness to resonance point with it is anti-humorous Shake point regulating effect, by dual stack, same block of piezoelectric material 103, without matching layer, without backing for (surface of emission take top, pressure Electric material block 103A is in lower section, and block of piezoelectric material 103B is above), data are as follows:
One, two panels overall thickness is fixed value.
Overall thickness is 1mm, and resonance point is unrelated with thickness sequence with the variation of antiresonance point, only with the thickness difference of each lamination It changes, when thickness is equal, resonance point and antiresonance point quantity become one group again, and 1 impedance of antiresonance point reaches maximum, Second group of resonance point antiresonance point frequency is disregarded at this time, and impedance magnitude is denoted as 0, and the results are shown in Table 1 for corresponding data.
Table 1
Two, single-sheet thickness is fixed value.
When in lower section, 103 thickness of block of piezoelectric material is fixed as 0.5mm, as the thickness of top block of piezoelectric material 103 increases Resonance point and antiresonance point can be made in regularity variation, when thickness is equal, resonance point becomes again with antiresonance point quantity One group, 1 impedance of antiresonance point reaches maximum, and second group of resonance point antiresonance point frequency is disregarded at this time, and impedance magnitude is denoted as 0.Number According to the results are shown in Table 2.
Table 2
By above-mentioned data it is found that in first resonance point, the impedance magnitude and block of piezoelectric material of block of piezoelectric material 103 The relationship of 103 thickness is as shown in figure 16, and as the thickness of monolithic piezoelectric material block 103 increases, the impedance magnitude at resonance point is in Ascendant trend.
Matched curve are as follows: y=1.5042x2-0.964x+0.3326;
Variance R2=1.
By above-mentioned data it is found that in first antiresonance point, the impedance magnitude and block of piezoelectric material of block of piezoelectric material 103 The relationship of 103 thickness is as shown in figure 17, thickness increase of the impedance magnitude of antiresonance point with monolithic piezoelectric material block 103, resistance Anti- amplitude is in rising trend.
Matched curve are as follows: y=-5.6964x2+22.602x-1.3971;
Variance R2=0.9902.
By above-mentioned data it is found that in second resonance point, impedance and the block of piezoelectric material 103 of block of piezoelectric material 103 Thickness relationship is as shown in figure 18, and impedance magnitude increases afterwards as the wherein thickness increase of a piece of parallel piezoelectric material block 103 first reduces Add.
Matched curve are as follows: y=1.8464x2-5.2055x+5.9694;
Variance R2=0.986.
By above-mentioned data it is found that in second antiresonance point, the impedance and block of piezoelectric material 103 of block of piezoelectric material 103 Thickness relationship it is as shown in figure 19, the impedance magnitude of antiresonance point increases with the thickness of wherein a piece of parallel piezoelectric material block 103 Add in rising trend.
Matched curve are as follows: y=-3.9882x2+18.179x-12.518;
Variance R2=0.9993.
The present invention also provides another ultrasound transducer probe, a kind of ultrasound transducer probe of specific embodiment For the front view of unit as shown in figure 3, Fig. 4 is its top view, Fig. 5 is its left view, is called specific embodiment two, including pressure Electric material block 103, first electrode 101 and second electrode 102;
Above-mentioned first electrode 101 is arranged at multiple tables on above-mentioned 103 surface of block of piezoelectric material with above-mentioned second electrode 102 On face;
There is the area of isolation 104 of insulation between above-mentioned first electrode 101 and above-mentioned second electrode 102;Adjacent is above-mentioned There is electrical connection between the identical electrodes of ultrasound transducer probe unit;
Area of isolation 104 on the surface of adjacent above-mentioned ultrasound transducer probe unit contacted with each other partially overlap or It is completely coincident, makes the electrode of 104 two sides of area of isolation after being overlapped without electrical connection;
Above-mentioned ultrasound transducer probe includes the above-mentioned ultrasound transducer probe of the different above-mentioned block of piezoelectric material 103 of thickness Unit keeps the electrical impedance of above-mentioned ultrasound transducer probe consistent with the electrical impedance of ultrasonic image-forming system circuit of ultrasonic imaging device;
Above-mentioned block of piezoelectric material 103 is rectangular patch block of piezoelectric material 103;
Above-mentioned first electrode 101 is set to the upper surface and the first side surface of above-mentioned rectangular patch block of piezoelectric material 103;
Above-mentioned second electrode 102 is set to the lower surface and the second side surface of above-mentioned rectangular patch block of piezoelectric material 103;
Above-mentioned second side surface is the surface opposite with above-mentioned first side surface.
Need to illustrate in advance, due in actual use rectangular patch ultrasound transducer probe unit using wide, Therefore the specific embodiment of the application is with the citing of rectangular patch ultrasound transducer probe unit, but should be noted that this The protection scope of invention is not only limited in rectangular patch ultrasound transducer probe unit, for example, round sheet ultrasonic transducer is visited Head is also within protection scope of the present invention.
Further, the area equation of the area of above-mentioned first electrode 101 and second electrode 102.
Further, above-mentioned block of piezoelectric material 103 include but is not limited to inorganic piezoelectric ceramic material piece, inorganic piezoelectric Monocrystal material piece, piezo-electricity composite material piece and organic piezoelectric materials block 103.
It should be noted that area of isolation 104 signified in each figure, is the region enclosed with dotted line.
The electrode of ultrasound transducer probe unit provided by the present invention is not limited to be simply placed in above-mentioned block of piezoelectric material 103 Corresponding two surfaces, but each electrode, at least in two surfaces, in other words, above-mentioned electrode can be in cloth Behind full a pair of corresponding surface, continue to extend to other adjacent surface, realizes and change not changing above-mentioned ultrasound substantially In the case where the volume of energy device contact unit, capacitance size is increased, above-mentioned ultrasound transducer probe unit is further reduced Electrical impedance, so that the electrical impedance of itself and external system is matched.
On the basis of specific embodiment two, the area of above-mentioned two electrode of further expansion obtains specific embodiment Three, the front view of ultrasound transducer probe unit as shown in fig. 6, top view and left view are same as the specific embodiment one, Including block of piezoelectric material 103, first electrode 101 and second electrode 102;
Above-mentioned first electrode 101 is arranged at multiple tables on above-mentioned 103 surface of block of piezoelectric material with above-mentioned second electrode 102 On face;
There is the area of isolation 104 of insulation between above-mentioned first electrode 101 and above-mentioned second electrode 102;Adjacent is above-mentioned There is electrical connection between the identical electrodes of ultrasound transducer probe unit;
Area of isolation 104 on the surface of adjacent above-mentioned ultrasound transducer probe unit contacted with each other partially overlap or It is completely coincident, makes the electrode of 104 two sides of area of isolation after being overlapped without electrical connection;
Above-mentioned ultrasound transducer probe includes the above-mentioned ultrasound transducer probe of the different above-mentioned block of piezoelectric material 103 of thickness Unit keeps the electrical impedance of above-mentioned ultrasound transducer probe consistent with the electrical impedance of ultrasonic image-forming system circuit of ultrasonic imaging device;
Above-mentioned block of piezoelectric material 103 is rectangular patch block of piezoelectric material 103;
Above-mentioned first electrode 101 is set to the upper surface of above-mentioned rectangular patch block of piezoelectric material 103, the first side surface and Three side surfaces;
Above-mentioned second electrode 102 is set to the lower surface of above-mentioned rectangular patch block of piezoelectric material 103, the second side surface and Four side surfaces;
Above-mentioned second side surface is the surface opposite with above-mentioned first side surface;Above-mentioned 4th side surface is and above-mentioned third The opposite surface in side surface.
Present embodiment and above embodiment the difference is that, present embodiment further expands The locating surface of above-mentioned first electrode 101 and above-mentioned second electrode 102, remaining structure with above-mentioned specific embodiment phase Together, not reinflated herein to repeat.
Present embodiment further in the case where almost having not been changed above-mentioned ultrasound transducer probe unit volume, expands The big surface area of above-mentioned first electrode 101 and second electrode 102, increases capacitor, reduces above-mentioned ultrasound transducer probe The electrical impedance of unit makes the electrical impedance of itself and external system match.
On the basis of specific embodiment two, the present position of above-mentioned area of isolation 104 is limited, specific reality is obtained Mode four is applied, the front view of ultrasound transducer probe unit is as shown in fig. 7, comprises block of piezoelectric material 103, first electrode 101 And second electrode 102;
Above-mentioned first electrode 101 is arranged at multiple tables on above-mentioned 103 surface of block of piezoelectric material with above-mentioned second electrode 102 On face;
There is the area of isolation 104 of insulation between above-mentioned first electrode 101 and above-mentioned second electrode 102;Adjacent is above-mentioned There is electrical connection between the identical electrodes of ultrasound transducer probe unit;
Area of isolation 104 on the surface of adjacent above-mentioned ultrasound transducer probe unit contacted with each other partially overlap or It is completely coincident, makes the electrode of 104 two sides of area of isolation after being overlapped without electrical connection;
Above-mentioned ultrasound transducer probe includes the above-mentioned ultrasound transducer probe of the different above-mentioned block of piezoelectric material 103 of thickness Unit keeps the electrical impedance of above-mentioned ultrasound transducer probe consistent with the electrical impedance of ultrasonic image-forming system circuit of ultrasonic imaging device;
Above-mentioned block of piezoelectric material 103 is rectangular patch block of piezoelectric material 103;
Above-mentioned first electrode 101 is set to the upper surface and the first side surface of above-mentioned rectangular patch block of piezoelectric material 103;
Above-mentioned second electrode 102 is set to the lower surface and the second side surface of above-mentioned rectangular patch block of piezoelectric material 103;
Above-mentioned second side surface is the surface opposite with above-mentioned first side surface;
Above-mentioned area of isolation 104 is in above-mentioned upper surface and above-mentioned lower surface;
Above-mentioned area of isolation 104 in above-mentioned upper surface is to be in symmetrical in the high perpendicular bisector of above-mentioned upper surface standard The heart is symmetrical;
Above-mentioned area of isolation 104 in above-mentioned lower surface is to be in symmetrical in the high perpendicular bisector of above-mentioned lower surface standard The heart is symmetrical;
In a height of above-mentioned upper surface of above-mentioned standard or above-mentioned lower surface, it is parallel to above-mentioned first side surface and above-mentioned second side The height on surface.
Present embodiment and above-mentioned specific embodiment are the difference is that present embodiment defines State the present position of area of isolation 104 and the shape of above-mentioned area of isolation 104, remaining structure with above-mentioned specific embodiment phase Together, not reinflated herein to repeat.
It needs especially to remind, the essence of qualifications is the position of above-mentioned area of isolation 104 in present embodiment The shape with above-mentioned area of isolation 104 is set, therefore above-mentioned first electrode 101 and above-mentioned second electrode 102 are in addition to above-mentioned specific reality It applies outside the description in mode, further includes other a variety of situations, such as above-mentioned first electrode 101 can be located at above-mentioned upper surface, above-mentioned First side surface and above-mentioned lower surface, above-mentioned second electrode 102 can be located at above-mentioned upper surface, above-mentioned second side surface and above-mentioned Lower surface, as shown in the front view of Fig. 8, for ease of understanding, the stereoscopic schematic diagram of Figure 11 above-mentioned scheme is as shown in Figure 9.
By taking the ultrasound transducer probe unit of Fig. 9 as an example, a kind of production method of ultrasound transducer probe unit is provided, first Carried out on four surfaces in addition to the smallest two surfaces of area of rectangular patch block of piezoelectric material 103 shown in Fig. 9 it is gold-plated, The position shown in the figure further groove cuts off layer gold by way of including but is not limited to cut again, obtains the first electrode of disjunction 101 with second electrode 102, and form area of isolation 104.
In addition, the scheme in present embodiment, can combine with the scheme in specific embodiment four, generate same When meet the ultrasound transducer probe unit of above two specific embodiment condition, the front view of scheme is as shown in Figure 10, Top view is as shown in figure 11.
Further, above-mentioned area of isolation 104 is straight line area of isolation 104.
Present embodiment defines the shape of above-mentioned area of isolation 104 and the present position of above-mentioned area of isolation 104, Positioned at upper and lower surface and along the symmetrical above-mentioned area of isolation 104 of high perpendicular bisector, it is laminated in above-mentioned ultrasound transducer probe unit It is more convenient when installation, more save space in parallel is formed such as the above-mentioned ultrasound transducer probe of specific embodiment one, its advantages It is not reinflated herein to repeat see above.
The present invention also provides a kind of ultrasonic imaging device, above-mentioned ultrasonic imaging device include above-mentioned ultrasonic image-forming system circuit and Such as specific embodiment one or the above-mentioned ultrasound transducer probe of specific embodiment two.Ultrasonic transducer provided by the present invention Probe, above-mentioned ultrasound transducer probe includes multiple ultrasound transducer probe units being stacked;Above-mentioned ultrasonic transducer is visited Head unit includes block of piezoelectric material 103, first electrode 101 and second electrode 102;Above-mentioned first electrode 101 and above-mentioned second electricity Pole 102 is arranged on above-mentioned 103 surface of block of piezoelectric material;There is insulation between above-mentioned first electrode 101 and above-mentioned second electrode 102 Area of isolation 104;104 part of area of isolation on the surface of adjacent above-mentioned ultrasound transducer probe unit contacted with each other It is overlapped or is completely coincident, make the electrode of 104 two sides of area of isolation after being overlapped without electrical connection, above-mentioned ultrasound transducer probe Above-mentioned ultrasound transducer probe unit including the different above-mentioned block of piezoelectric material 103 of thickness, makes above-mentioned ultrasound transducer probe Electrical impedance it is consistent with the electrical impedance of ultrasonic image-forming system circuit.The application, can be with by changing the thickness of block of piezoelectric material 103 The electrical impedance for adjusting above-mentioned ultrasound transducer probe makes the electrical impedance of above-mentioned ultrasound transducer probe and above-mentioned ultrasonic imaging system The electrical impedance of system circuit is consistent, and the electrical impedance of the electrical impedance of above-mentioned ultrasound transducer probe and above-mentioned ultrasonic image-forming system circuit Closer, the above-mentioned obtainable power of ultrasound transducer probe is bigger, and therefore, the technical solution of the application can be promoted effectively The working efficiency of ultrasound transducer probe is stated, energy utilization rate is promoted;In addition, being compared since thickness can continuously adjust The prior art changes electrical impedance by replacement energy converter material, and the technical solution of the application can get bigger adjustable range, And cost needed for reducing adjusting electrical impedance.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with it is other The difference of embodiment, same or similar part may refer to each other between each embodiment.For being filled disclosed in embodiment For setting, since it is corresponded to the methods disclosed in the examples, so being described relatively simple, related place is referring to method part Explanation.
It should be noted that in the present specification, relational terms such as first and second and the like are used merely to one A entity or operation with another entity or operate distinguish, without necessarily requiring or implying these entities or operation it Between there are any actual relationship or orders.Moreover, the terms "include", "comprise" or its any other variant are intended to Cover non-exclusive inclusion, so that the process, method, article or equipment for including a series of elements not only includes those Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or setting Standby intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that There is also other identical elements in the process, method, article or equipment for including above-mentioned element.
Ultrasound transducer probe unit provided by the present invention, ultrasound transducer probe and ultrasonic imaging device are carried out above It is discussed in detail.Used herein a specific example illustrates the principle and implementation of the invention, above embodiments Explanation be merely used to help understand method and its core concept of the invention.It should be pointed out that for the common of the art , without departing from the principle of the present invention, can be with several improvements and modifications are made to the present invention for technical staff, these Improvement and modification are also fallen within the protection scope of the claims of the present invention.

Claims (10)

1. a kind of ultrasound transducer probe, which is characterized in that the ultrasound transducer probe includes multiple ultrasounds being stacked Transducer probe unit;
The ultrasound transducer probe unit includes block of piezoelectric material, first electrode and second electrode;
The first electrode and the second electrode are arranged on the block of piezoelectric material surface;
There is the area of isolation of insulation between the first electrode and the second electrode;The adjacent ultrasound transducer probe There is electrical connection between the identical electrodes of unit;
Area of isolation on the surface of the adjacent ultrasound transducer probe unit contacted with each other partially overlaps or weighs completely It closes, makes the electrode of the area of isolation two sides after being overlapped without electrical connection;
The ultrasound transducer probe includes the ultrasound transducer probe unit of the different block of piezoelectric material of thickness, is made The electrical impedance of the ultrasound transducer probe is consistent with the electrical impedance of ultrasonic image-forming system circuit of ultrasonic imaging device.
2. ultrasound transducer probe as described in claim 1, which is characterized in that the block of piezoelectric material is chip type piezoelectric material Block.
3. ultrasound transducer probe as claimed in claim 2, which is characterized in that the chip type piezoelectric material block is rectangular patch Block of piezoelectric material or round sheet block of piezoelectric material.
4. ultrasound transducer probe as claimed in claim 3, which is characterized in that the area of isolation is in the chip type piezoelectric The upper surface and the lower surface of material block.
5. ultrasound transducer probe as claimed in claim 4, which is characterized in that when the chip type piezoelectric material block is rectangular sheet When shape block of piezoelectric material, the area of isolation in the upper surface is to be pair in the high perpendicular bisector of the upper surface standard Claim central symmetry;
The area of isolation in the lower surface is using symmetrical as symmetrical centre in the high perpendicular bisector of the lower surface standard;
In a height of upper surface of standard or the lower surface, it is parallel to first side surface and second side surface Height;
Second side surface is the surface opposite with first side surface.
6. ultrasound transducer probe as claimed in claim 5, which is characterized in that the first electrode is set to the rectangular sheet The upper surface of shape block of piezoelectric material and the first side surface;
The second electrode is set to the lower surface and the second side surface of the rectangular patch block of piezoelectric material.
7. ultrasound transducer probe as claimed in claim 6, which is characterized in that the area of isolation is straight line area of isolation.
8. ultrasound transducer probe as claimed in claim 7, which is characterized in that the area and second electrode of the first electrode Area equation.
9. ultrasound transducer probe as claimed in any one of claims 1 to 8, which is characterized in that the block of piezoelectric material includes Inorganic piezoelectric ceramic block, inorganic piezoelectric monocrystal material block, piezo-electricity composite material block and organic piezoelectric materials block.
10. a kind of ultrasonic imaging device, which is characterized in that the ultrasonic imaging device includes ultrasonic image-forming system circuit and as right is wanted Seek 1 to 9 described in any item ultrasound transducer probes.
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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5598051A (en) * 1994-11-21 1997-01-28 General Electric Company Bilayer ultrasonic transducer having reduced total electrical impedance
US20010050514A1 (en) * 1994-08-18 2001-12-13 Gururaja Turukevere R. Composite piezoelectric transducer arrays with improved acoustical and electrical impedance
US6552471B1 (en) * 1999-01-28 2003-04-22 Parallel Design, Inc. Multi-piezoelectric layer ultrasonic transducer for medical imaging
JP2005151560A (en) * 2003-11-11 2005-06-09 General Electric Co <Ge> Method of manufacturing multilayer ceramic acoustic transducer
CN101128944A (en) * 2005-02-22 2008-02-20 人体扫描有限公司 Multilayer ultrasonic transducer and method for manufacturing same
CN101364632A (en) * 2008-07-08 2009-02-11 深圳先进技术研究院 Piezoelectric element and manufacturing method thereof
US20090219108A1 (en) * 2008-02-29 2009-09-03 General Electric Company Apparatus and method for increasing sensitivity of ultrasound transducers
US20150183000A1 (en) * 2013-12-27 2015-07-02 General Electric Company Ultrasound transducer and ultrasound imaging system with a variable thickness dematching layer
CN105032749A (en) * 2015-07-09 2015-11-11 深圳市理邦精密仪器股份有限公司 Multi-layer lamination ultrasonic transducer and manufacturing method thereof
CN108886659A (en) * 2016-04-06 2018-11-23 精工爱普生株式会社 Ultrasonic transducer, ultrasonic array, ultrasonic wave module, ultrasonic detector and ultrasonic unit

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010050514A1 (en) * 1994-08-18 2001-12-13 Gururaja Turukevere R. Composite piezoelectric transducer arrays with improved acoustical and electrical impedance
US5598051A (en) * 1994-11-21 1997-01-28 General Electric Company Bilayer ultrasonic transducer having reduced total electrical impedance
US6552471B1 (en) * 1999-01-28 2003-04-22 Parallel Design, Inc. Multi-piezoelectric layer ultrasonic transducer for medical imaging
US20030127947A1 (en) * 1999-01-28 2003-07-10 Parallel Design, Inc. Multi-piezoelectric layer ultrasonic transducer for medical imaging
JP2005151560A (en) * 2003-11-11 2005-06-09 General Electric Co <Ge> Method of manufacturing multilayer ceramic acoustic transducer
CN101128944A (en) * 2005-02-22 2008-02-20 人体扫描有限公司 Multilayer ultrasonic transducer and method for manufacturing same
US20090219108A1 (en) * 2008-02-29 2009-09-03 General Electric Company Apparatus and method for increasing sensitivity of ultrasound transducers
CN101364632A (en) * 2008-07-08 2009-02-11 深圳先进技术研究院 Piezoelectric element and manufacturing method thereof
US20150183000A1 (en) * 2013-12-27 2015-07-02 General Electric Company Ultrasound transducer and ultrasound imaging system with a variable thickness dematching layer
CN105032749A (en) * 2015-07-09 2015-11-11 深圳市理邦精密仪器股份有限公司 Multi-layer lamination ultrasonic transducer and manufacturing method thereof
CN108886659A (en) * 2016-04-06 2018-11-23 精工爱普生株式会社 Ultrasonic transducer, ultrasonic array, ultrasonic wave module, ultrasonic detector and ultrasonic unit

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