JP4294757B2 - スリットコート式塗布装置及びスリットコート式塗布方法 - Google Patents

スリットコート式塗布装置及びスリットコート式塗布方法 Download PDF

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Publication number
JP4294757B2
JP4294757B2 JP17180398A JP17180398A JP4294757B2 JP 4294757 B2 JP4294757 B2 JP 4294757B2 JP 17180398 A JP17180398 A JP 17180398A JP 17180398 A JP17180398 A JP 17180398A JP 4294757 B2 JP4294757 B2 JP 4294757B2
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coating
valve
supply
head
fluid
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Japanese (ja)
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JP2000005682A5 (enrdf_load_stackoverflow
JP2000005682A (ja
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五男 藤原
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Hirata Corp
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Hirata Corp
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  • Coating Apparatus (AREA)
JP17180398A 1998-06-18 1998-06-18 スリットコート式塗布装置及びスリットコート式塗布方法 Expired - Lifetime JP4294757B2 (ja)

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JP17180398A JP4294757B2 (ja) 1998-06-18 1998-06-18 スリットコート式塗布装置及びスリットコート式塗布方法

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JP17180398A JP4294757B2 (ja) 1998-06-18 1998-06-18 スリットコート式塗布装置及びスリットコート式塗布方法

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JP2000005682A JP2000005682A (ja) 2000-01-11
JP2000005682A5 JP2000005682A5 (enrdf_load_stackoverflow) 2005-10-20
JP4294757B2 true JP4294757B2 (ja) 2009-07-15

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JP17180398A Expired - Lifetime JP4294757B2 (ja) 1998-06-18 1998-06-18 スリットコート式塗布装置及びスリットコート式塗布方法

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103028564A (zh) * 2011-09-30 2013-04-10 金宝电子（中国）有限公司 溶液供应单元、清洁系统及其清洁方法

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002086044A (ja) * 2000-09-19 2002-03-26 Toray Ind Inc 塗布方法および塗布装置並びにディスプレイ用部材およびプラズマディスプレイの製造方法およびその製造装置
JP2004141744A (ja) * 2002-10-23 2004-05-20 Toppan Printing Co Ltd 塗布液供給装置及び方法
JP4742511B2 (ja) * 2004-04-02 2011-08-10 東レ株式会社 塗布方法および塗布装置並びにディスプレイ用部材の製造方法
JP4770984B2 (ja) * 2007-07-09 2011-09-14 住友ベークライト株式会社 回路基板用の樹脂シートおよびその製造方法
TWI468229B (zh) 2008-09-26 2015-01-11 Shibaura Mechatronics Corp Coating apparatus and coating method
JP5532667B2 (ja) * 2008-11-10 2014-06-25 凸版印刷株式会社 インクジェット装置、インクジェットヘッドの洗浄方法、および、カラーフィルタ製造方法
US8770141B2 (en) 2009-06-19 2014-07-08 Tazmo Co., Ltd. Substrate coating device with control section that synchronizes substrate moving velocity and delivery pump
WO2013080688A1 (ja) * 2011-12-01 2013-06-06 タツモ株式会社 塗布装置および塗布方法
WO2015037121A1 (ja) * 2013-09-13 2015-03-19 東北パイオニアＥｇ株式会社 貼合せ装置
JP6418737B2 (ja) * 2013-12-26 2018-11-07 住友重機械工業株式会社 塗布装置
JP7492993B2 (ja) * 2022-07-21 2024-05-30 株式会社Ｓｃｒｅｅｎホールディングス 制御パラメータ調整方法、プログラムおよび記録媒体
JP7492992B2 (ja) * 2022-07-21 2024-05-30 株式会社Ｓｃｒｅｅｎホールディングス 塗布方法、プログラムおよび記録媒体
CN118305048B (zh) * 2024-04-22 2024-11-15 东莞全职数控科技有限公司 一种基于传感反馈的自适应点胶机控制系统

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103028564A (zh) * 2011-09-30 2013-04-10 金宝电子（中国）有限公司 溶液供应单元、清洁系统及其清洁方法

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