JP4291393B2 - Electronic component mounting equipment - Google Patents

Electronic component mounting equipment Download PDF

Info

Publication number
JP4291393B2
JP4291393B2 JP2008043504A JP2008043504A JP4291393B2 JP 4291393 B2 JP4291393 B2 JP 4291393B2 JP 2008043504 A JP2008043504 A JP 2008043504A JP 2008043504 A JP2008043504 A JP 2008043504A JP 4291393 B2 JP4291393 B2 JP 4291393B2
Authority
JP
Japan
Prior art keywords
component
mounting
substrate
bare
supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008043504A
Other languages
Japanese (ja)
Other versions
JP2008147705A (en
Inventor
寛二 秦
智 仕田
正力 成田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2008043504A priority Critical patent/JP4291393B2/en
Publication of JP2008147705A publication Critical patent/JP2008147705A/en
Application granted granted Critical
Publication of JP4291393B2 publication Critical patent/JP4291393B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Supply And Installment Of Electrical Components (AREA)
  • Wire Bonding (AREA)

Description

本発明は、基板にベアIC部品と表面実装部品を混載して実装する電子部品実装装置に関するものである。   The present invention relates to an electronic component mounting apparatus that mounts a bare IC component and a surface mounting component on a substrate.

従来、基板に電子部品を実装する電子部品実装設備においては、複数の電子部品実装装置をライン状に配置して結合することで実装ラインを構成し、基板が実装ラインを移動する間に順次電子部品が実装されて回路基板が製造されるように構成されている。   Conventionally, in an electronic component mounting facility that mounts electronic components on a board, a plurality of electronic component mounting apparatuses are arranged in a line and combined to form a mounting line. A circuit board is manufactured by mounting components.

電子部品を基板に実装する各電子部品実装装置としては、間欠回転する回転体の外周部にその間欠回転角間隔で複数の実装ヘッドを配設して各実装ヘッドが供給位置と実装位置との間で移動するようにし、供給位置に所定の電子部品を部品供給部を移動させて供給し、基板の所定の実装位置を実装位置に位置決めし、実装ヘッドにて基板の所定位置に電子部品を実装する方式や、基板を位置決め固定し、XY方向に移動可能な実装ヘッドにて、部品供給部から所定の電子部品を取り出し、基板の所定の実装位置に移動して実装する方式など、種々の方式のものが知られている。   As each electronic component mounting apparatus that mounts electronic components on a substrate, a plurality of mounting heads are arranged at intervals of the intermittent rotation angle on the outer periphery of a rotating body that rotates intermittently, and each mounting head has a supply position and a mounting position. The electronic component is moved to the supply position by moving the component supply unit to move the component supply unit, the predetermined mounting position of the substrate is positioned at the mounting position, and the electronic component is placed at the predetermined position on the substrate by the mounting head. Various methods such as mounting method, mounting and fixing the substrate, taking out a predetermined electronic component from the component supply unit with a mounting head movable in the XY direction, and moving to a predetermined mounting position on the substrate to mount A method is known.

一方、半導体ウエハをダイシングした状態のベアIC部品を基板に実装する電子部品実装装置としては、例えば特開2000−68327号公報に開示されたものが知られている。その電子部品実装装置では、ダイシングされた半導体ウエハの状態でベアICチップをXYテーブル上に供給し、このXYテーブルにて所定のベアIC部品を第1の供給位置に位置決めし、反転移送手段にて第1の供給位置で所定のベアIC部品を保持して上下を反転して第2の供給位置に移送し、第2の供給位置で実装ヘッドにて保持し、一方、基板をY方向テーブルにてY方向に移動可能な支持台上に載置固定し、実装ヘッドをX方向テーブルにて基板における実装位置のX方向位置まで移動させるとともに基板における実装位置のY方向位置が実装ヘッドのY方向位置に一致するようにY方向テーブルにて基板を移動し、ベアIC部品と基板の実装箇所の位置合わせを行った後、実装ヘッドにてベアIC部品を実装するように構成されている。   On the other hand, as an electronic component mounting apparatus for mounting a bare IC component in a state where a semiconductor wafer is diced on a substrate, one disclosed in, for example, Japanese Patent Application Laid-Open No. 2000-68327 is known. In the electronic component mounting apparatus, a bare IC chip is supplied onto an XY table in the state of a diced semiconductor wafer, a predetermined bare IC component is positioned at a first supply position on the XY table, and the reverse transfer means is used. The predetermined bear IC component is held at the first supply position, turned upside down and transferred to the second supply position, and held by the mounting head at the second supply position, while the substrate is held in the Y-direction table. The mounting head is mounted and fixed on a support table movable in the Y direction, and the mounting head is moved to the X direction position of the mounting position on the substrate by the X direction table, and the Y direction position of the mounting position on the substrate is Y of the mounting head. The board is moved by the Y-direction table so that it matches the direction position, and after positioning the mounting position of the bare IC component and the board, the bare IC component is mounted by the mounting head. There.

このベアIC部品の基板に対する実装は、上記電子部品の実装工程とは全く別に、クリーンルーム等で行われていた。それは、ベアIC部品は高集積化、小型化のために、電極の多電極化とファインピッチ化が著しく、高精度の実装が要請され、また塵埃による接合不良を防止するために実装環境の高い清浄度が強く求められるためである。   The bare IC component is mounted on the substrate in a clean room or the like completely separate from the mounting process of the electronic component. This is because bare IC parts are highly integrated and miniaturized, so the number of electrodes and the fine pitch are remarkably high, and high-precision mounting is required, and the mounting environment is high to prevent poor bonding due to dust. This is because cleanliness is strongly required.

そして、このようにベアIC部品を基板に実装して電子部品を構成した後、その電子部品を他の電子部品ととともに上記電子部品実装設備に供給して、電子機器の回路基板を製造していた。   Then, after the bare IC component is mounted on the substrate in this way to constitute the electronic component, the electronic component is supplied to the electronic component mounting facility together with other electronic components to manufacture the circuit board of the electronic device. It was.

ところで、近年は、ICの高集積化がさらに進行してベアIC部品が大型化するとともに、それに伴って1枚の回路基板に対する電子部品の実装数が少なくて済むようになっており、また同時に携帯機器等に搭載するために回路基板の小型化が進んでいる。   By the way, in recent years, as IC integration has further increased, the size of bare IC components has increased, and accordingly, the number of electronic components mounted on a single circuit board has been reduced. The circuit board has been downsized for mounting on portable devices and the like.

しかるに、上記従来例のようにベアIC部品の実装と他の電子部品の実装を全く別工程で実装していると、無駄な製造工程や部品の管理・輸送に対する工数とコストが大きく、また回路基板の小型化に限界が生じるという問題があり、1枚の基板にベアIC部品と他の表面実装部品を混載して実装することが要請されてきている。   However, mounting bare IC parts and other electronic parts in completely separate processes as in the above-mentioned conventional example, the man-hours and costs for wasteful manufacturing processes and parts management / transport are large, and circuit There is a problem that there is a limit to downsizing of the substrate, and it has been required to mount a bare IC component and another surface mounting component on a single substrate.

そこで、単一の実装ラインにて基板に実装すべきベアIC部品と表面実装部品の全てを実装できる電子部品実装設備や、1台の電子部品実装装置にてベアIC部品と表面実装部品の両方を混載して実装できる電子部品実装装置の開発が求められているが、設備コストを高騰させずに実装環境の清浄度を確保し、またベアIC部品の実装に要求される高精度の実装を高速にて実現するのが困難である等の問題がある。
本発明は、このような状況に鑑み、設備コストを高騰させずに実装環境のクリーン度を確保してベアIC部品と表面実装部品を混載して実装することができる電子部品実装装置を提供することを目的とする。
Therefore, an electronic component mounting facility that can mount all bare IC components and surface mounted components to be mounted on a substrate on a single mounting line, and both bare IC components and surface mounted components with one electronic component mounting device Development of electronic component mounting equipment that can be mounted in a mixed manner is required, but the cleanliness of the mounting environment is ensured without raising equipment costs, and the high-precision mounting required for mounting bare IC components is also required. There are problems such as difficulty in realization at high speed.
In view of such circumstances, the present invention provides an electronic component mounting apparatus capable of mounting a bare IC component and a surface mounting component in a mixed manner while ensuring a cleanness of a mounting environment without increasing equipment costs. For the purpose.

本発明は、X方向に基板を搬入し、位置決めし、搬出する基板搬送・位置決め手段と、この基板搬送・位置決め手段のY方向(X方向に対し直角の方向)の一側に設けられたベアIC部品の供給手段と、前記基板搬送・位置決め手段のY方向の他側に設けられた表面実装部品の供給手段と、前記ベアIC部品の供給手段から供給されたベアIC部品を上下反転して第1の部品供給位置に供給する反転移送手段と、前記第1の部品供給位置のベアIC部品あるいは前記表面実装部品の供給手段からの表面実装部品を保持して基板の所定の実装位置に前記ベアIC部品と前記表面実装部品とを混載して実装する実装手段とを備えた電子部品実装装置において、前記反転移送手段と前記基板搬送・位置決め手段と前記実
装手段とが配設された空間を閉空間に構成するとともに、前記基板搬送・位置決め手段の搬入箇所、および搬出箇所に、基板が搬入、搬出される開口を有するカバーを設け、このカバーの上面中央部に前記閉空間に清浄化したエアを導入する清浄化エア導入手段を設け、更に前記カバーの基板が搬入、搬出される開口を開閉し、基板搬入出時は前記開口を開放し、実装動作中は前記開口を閉じるシャッタを前記開口に備え、更に前記カバーの閉空間内の塵埃をエアと共に排出するよう前記表面実装部品の供給手段側のカバーの背面に排気ダクトを設けたことを特徴とする。
The present invention relates to a substrate transport / positioning means for loading, positioning, and unloading a substrate in the X direction , and a bearer provided on one side of the substrate transport / positioning means in the Y direction (a direction perpendicular to the X direction). The IC component supply means, the surface mount component supply means provided on the other side of the substrate conveying / positioning means in the Y direction , and the bare IC component supplied from the bare IC component supply means are turned upside down. an inverting transport means for supplying the first component supply position, wherein the predetermined mounting position of the substrate holding surface mount components from the supply means of the first bare IC component or the surface mounting component of the component supply position In an electronic component mounting apparatus provided with a mounting means for mounting and mounting a bare IC component and the surface-mounted component together , a space in which the reverse transfer means, the substrate transport / positioning means, and the mounting means are disposed Close Together constituting between, carrying portions of the substrate transfer and positioning means, and the carry-out position, the substrate is transported, the cover having an opening to be carried out provided, and cleaned in the closed space in the upper central portion of the cover air Cleaning air introducing means is provided for opening and closing the opening through which the substrate of the cover is loaded and unloaded, and the opening is opened when the substrate is loaded and unloaded, and the shutter is closed during the mounting operation. to comprise, further characterized in that the dust in the closed space of the cover provided with the exhaust duct on the back of the cover of the supply means side by the Hare before Symbol surface mounting component is discharged along with air.

上記発明によれば、ベアIC部品を実装するまで基板の清浄度を保つことができるので、ベアIC部品も高い信頼性をもって実装することができ、ベアIC部品と他の表面実装部品を混載して実装した回路基板を生産性良く製造することができる。また、実装部の周囲の閉空間に清浄化したエアを導入することで、清浄な雰囲気に保つことができ、ベアIC部品を実装する場合にも高い信頼性をもって実装することができる。また、閉空間内の塵埃をエアとともに排出する排気手段を設けているので、閉空間内の清浄度をより高く確実に保持することができる。更に、閉空間を画成するカバーに形成された基板搬入出用開口にシャッタを設けているので、基板搬入出時のみシャッタを開くことで、閉空間内への塵埃の侵入を防止できて清浄度を高く維持できる。   According to the above invention, since the cleanliness of the substrate can be maintained until the bare IC component is mounted, the bare IC component can also be mounted with high reliability, and the bare IC component and other surface mount components are mixedly mounted. Thus, the mounted circuit board can be manufactured with high productivity. In addition, by introducing purified air into the closed space around the mounting portion, a clean atmosphere can be maintained, and mounting can be performed with high reliability even when mounting bare IC components. Moreover, since the exhaust means for discharging the dust in the closed space together with the air is provided, the cleanliness in the closed space can be reliably maintained higher. In addition, since the shutter is provided in the substrate loading / unloading opening formed in the cover that defines the closed space, opening the shutter only when loading / unloading the substrate prevents dust from entering the closed space and cleans it. High degree can be maintained.

以下、本発明の一実施形態について、図1〜図6を参照して説明する。 Hereinafter, an embodiment of the present invention will be described with reference to FIGS.

図1において、1は電子部品実装設備で、基板に付着している塵埃などを除去するプラズマ洗浄装置やUV洗浄装置などの洗浄装置3と、基板の表面実装部品の接合電極にクリーム半田を印刷塗布するスクリーン印刷装置4と、ベアIC部品と表面実装部品を混載実装する電子部品実装装置5と、表面実装部品を実装する電子部品実装装置6と、表面実装部品を接合するクリーム半田をリフローするリフロー装置7とをライン状に結合した単一の実装ライン2にて構成されており、洗浄装置3を出た後ベアIC部品を実装する電子部品実装装置5までの間の各実装装置、即ち印刷装置4と電子部品実装装置5には、その実装部の周囲を閉空間に構成し、その閉空間の清浄度を保持する清浄手段8が設けられ、実装部が清浄化された雰囲気に保たれた清浄領域とされている。   In FIG. 1, reference numeral 1 denotes an electronic component mounting facility, which prints cream solder on a cleaning device 3 such as a plasma cleaning device or a UV cleaning device that removes dust adhering to a substrate, and a bonding electrode of a surface mounting component on the substrate. The screen printing device 4 to be applied, the electronic component mounting device 5 for mounting and mounting the bare IC component and the surface mounting component, the electronic component mounting device 6 for mounting the surface mounting component, and the cream solder for joining the surface mounting component are reflowed. Each mounting device is composed of a single mounting line 2 that is connected to the reflow device 7 in a line, and each of the mounting devices from the cleaning device 3 to the electronic component mounting device 5 that mounts the bare IC component, that is, The printing device 4 and the electronic component mounting device 5 are provided with a cleaning means 8 that forms a periphery of the mounting portion in a closed space and maintains the cleanliness of the closed space, so that the mounting portion is maintained in a cleaned atmosphere. There is a the clean area.

以上の構成の電子部品実装設備1において、実装ライン2の始端に基板を搬入すると、洗浄装置3にて基板上の塵埃が洗浄除去されて清浄化された後、次にその基板が清浄手段8にて清浄雰囲気にされたスクリーン印刷装置4に供給されて基板の表面実装部品の接合電極部にクリーム半田が印刷され、次にその基板が同じく清浄手段8にて清浄雰囲気にされた電子部品実装装置5に供給され、基板にベアIC部品と表面実装部品が混載して実装される。ベアIC部品の実装が完了した後の基板は、次に清浄手段8を設けていない電子部品実装装置6に供給されて残りの表面実装部品が実装され、その後全ての電子部品の実装が完了した基板がリフロー装置7に供給され、クリーム半田がリフローされて表面実装部品と基板の接合が完了する。こうして電子部品の実装が完了した基板が実装ライン2の終端から搬出される。   In the electronic component mounting equipment 1 having the above configuration, when a substrate is carried into the starting end of the mounting line 2, dust on the substrate is cleaned and cleaned by the cleaning device 3, and then the substrate is cleaned 8. Is supplied to the screen printing device 4 in a clean atmosphere, and cream solder is printed on the bonding electrode portion of the surface mount component of the substrate, and then the electronic component mounting in which the substrate is also cleaned in the clean means 8 The device 5 is supplied and a bare IC component and a surface mount component are mixedly mounted on the substrate. The board after the mounting of the bare IC components is supplied to the electronic component mounting apparatus 6 not provided with the cleaning means 8 and the remaining surface mounted components are mounted, and then all the electronic components are mounted. The substrate is supplied to the reflow device 7, and the cream solder is reflowed to complete the bonding between the surface mount component and the substrate. In this way, the board on which mounting of the electronic components is completed is carried out from the end of the mounting line 2.

なお、ベアIC部品がリフロー温度に対する耐熱性が十分でない場合には、リフロー装置7として表面実装部品の配置部分を選択的に加熱してリフローするローカルリフローを行えるものが用いられる。   If the bare IC component has insufficient heat resistance against the reflow temperature, a reflow device 7 that can perform local reflow for selectively reflowing the placement portion of the surface mount component is used.

このように、実装ライン2においてベアIC部品を実装するまで基板の清浄度を保つことで、ベアIC部品も高い信頼性をもって実装することができ、しかも実装ライン2の必要箇所にのみ清浄手段8を設けた実装装置を配設するだけであるので設備コストも高騰せず、ベアIC部品と他の表面実装部品を混載して実装した回路基板を生産性良く製造することができる。   Thus, by maintaining the cleanliness of the substrate until the bare IC component is mounted on the mounting line 2, the bare IC component can also be mounted with high reliability, and the cleaning means 8 is provided only at a necessary portion of the mounting line 2. Therefore, the installation cost is not increased, and a circuit board on which a bare IC component and other surface mounting components are mixedly mounted can be manufactured with high productivity.

次に、清浄手段8が設けられた実装装置の具体構成例として、ベアIC部品と、容量素子や抵抗素子などのチップ部品や四周の少なくとも一部に接続リードが設けられたリード付き部品などの表面実装部品を基板に混載して実装する電子部品実装装置5について、図2〜図5を参照して説明する。   Next, as a specific configuration example of the mounting apparatus provided with the cleaning means 8, a bare IC component, a chip component such as a capacitive element or a resistance element, or a leaded component in which a connection lead is provided in at least a part of the four circumferences, etc. An electronic component mounting apparatus 5 that mounts surface-mounted components mixedly mounted on a substrate will be described with reference to FIGS.

電子部品実装装置5は、本体部11とその前後両側に配設される部品供給部12、13にて構成されている。各部品供給部12、13は本体部11に交換可能に結合されるユニットとして構成されている。   The electronic component mounting apparatus 5 includes a main body portion 11 and component supply portions 12 and 13 disposed on both front and rear sides thereof. Each component supply part 12 and 13 is comprised as a unit couple | bonded with the main-body part 11 so that replacement | exchange is possible.

前側の部品供給部12は、多数のベアIC部品14が配列して形成されるとともに個片にダイシングされた状態でエキスパンドシート上に支持されている半導体ウエハ15を複数枚収容した部品マガジン16と、所望の半導体ウエハ15を所定の供給高さ位置に位置決めするマガジンリフタ17にて構成されている。   The front-side component supply unit 12 includes a component magazine 16 containing a plurality of semiconductor wafers 15 formed on a plurality of bare IC components 14 arranged and diced into individual pieces and supported on an expanded sheet. The magazine lifter 17 positions the desired semiconductor wafer 15 at a predetermined supply height position.

後側の部品供給部13は、多数の表面実装部品18を収容して成るテープ状部品集合体が装着された複数の部品供給カセット19を左右に移動可能な部品供給台20上にその移動方向に並列して搭載して成り、任意の部品供給カセット19の表面実装部品18を、図3に示すように、第2の部品供給位置Bに供給するように構成されている。   The rear-side component supply unit 13 moves a plurality of component supply cassettes 19 mounted with a tape-shaped component assembly containing a large number of surface-mounted components 18 on a component supply table 20 that can move left and right. The surface mount component 18 of an optional component supply cassette 19 is supplied to the second component supply position B as shown in FIG.

本体部11の前部には、エキスパンド台21が左右方向のX方向に移動可能なX方向テーブル22上に上下シリンダ23にて上下移動可能に設置され、ウエハ引き出し手段(図示せず)にて部品供給部12の部品マガジン16から半導体ウエハ15をエキスパンド台21に導入するように構成され、エキスパンド台21にてそのエキスパンドシートを拡張させて各ベアIC部品14を間隔をあけて分離させ、さらに所望のベアIC部品14を所定のX方向位置に位置決めするように構成されている。   At the front part of the main body 11, an expand base 21 is installed on an X-direction table 22 that can move in the X direction in the left-right direction so that it can be moved up and down by an upper and lower cylinder 23. The semiconductor wafer 15 is configured to be introduced from the component magazine 16 of the component supply unit 12 into the expanding table 21. The expanding sheet is expanded by the expanding table 21 to separate the bare IC components 14 at intervals. A desired bare IC component 14 is configured to be positioned at a predetermined position in the X direction.

24は、エキスパンド台21上で所定のX方向位置に位置決めされたベアIC部品14を認識する認識カメラであり、Y方向に移動可能に配設されている。本体部11の前部から中間部には、図3に示すように、所定のX方向位置に位置決めされたエキスパンド台21上の半導体ウエハ15のY方向の大きさに対応する部品供給領域D内の任意のベアIC部品14を吸着してY方向後方に向けて移動し、第1の部品供給位置Aまで移載するとともに吸着したベアIC部品14を180度上向きに反転させる反転移送手段25が配設されている。半導体ウエハ15の状態では、各ベアIC部品14の突起電極は上向きに形成されており、反転移送手段25にて各ベアIC部品14の突起電極配置面を吸着した後上向きに180度旋回することによって、ベアIC部品14の突起電極配置面が下向きとなり、その状態で第1の部品供給位置Aで実装手段26に受け渡すように構成されている。   Reference numeral 24 denotes a recognition camera for recognizing the bare IC component 14 positioned at a predetermined X direction position on the expand base 21, and is arranged to be movable in the Y direction. As shown in FIG. 3, from the front part to the middle part of the main body part 11, there is a component supply region D corresponding to the size in the Y direction of the semiconductor wafer 15 on the expand base 21 positioned at a predetermined X direction position. An inversion transfer means 25 that adsorbs any of the bare IC components 14 and moves rearward in the Y direction, transfers to the first component supply position A, and reverses the adsorbed bare IC components 14 upward 180 degrees. It is arranged. In the state of the semiconductor wafer 15, the protruding electrodes of each bare IC component 14 are formed upward, and the reverse transfer means 25 sucks the protruding electrode arrangement surface of each bare IC component 14 and then turns upward 180 degrees. Thus, the protruding electrode arrangement surface of the bare IC component 14 is directed downward, and is transferred to the mounting means 26 at the first component supply position A in this state.

実装手段26は、ベアIC部品14又は表面実装部品18を保持して基板30に実装する実装ヘッド27と、実装ヘッド27を第1の部品供給位置Aと第2の部品供給位置Bとの間でY方向に移動・位置決めするY方向テーブル28にて構成されている。   The mounting means 26 includes a mounting head 27 that holds the bare IC component 14 or the surface mounting component 18 and mounts it on the substrate 30, and the mounting head 27 between the first component supply position A and the second component supply position B. And a Y-direction table 28 that moves and positions in the Y-direction.

本体部11の後部における実装ヘッド27のY方向の移動経路の下部に、基板30をX方向に移動させ、基板31における電子部品(ベアIC部品14または表面実装部品18)を実装すべき位置を実装ヘッド27によるX方向の実装位置に位置決めするX方向テーブル29が配設され、このX方向テーブル29上に基板31を載置固定する支持台30が昇降可能に設けられている。   The position where the electronic component (the bare IC component 14 or the surface mounting component 18) should be mounted on the substrate 31 by moving the substrate 30 in the X direction below the moving path in the Y direction of the mounting head 27 at the rear portion of the main body 11. An X-direction table 29 for positioning at a mounting position in the X direction by the mounting head 27 is disposed, and a support base 30 for mounting and fixing the substrate 31 is provided on the X-direction table 29 so as to be movable up and down.

こうしてX方向テーブル29にて位置決めされた基板31のY方向幅に対応する実装範囲C内の所定の実装位置に、Y方向テーブル28にて実装ヘッド27を位置決めすることで、所定の電子部品が基板31の所定の実装位置に実装するように構成されている。   By positioning the mounting head 27 with the Y-direction table 28 at a predetermined mounting position within the mounting range C corresponding to the Y-direction width of the substrate 31 positioned with the X-direction table 29 in this way, a predetermined electronic component is placed. The circuit board 31 is configured to be mounted at a predetermined mounting position.

また、実装ヘッド27と支持台30との間に、上側で実装ヘッド27に保持された電子部品を認識し下側で基板31の電子部品を実装すべき位置の両方を認識できるように構成された同時認識手段32が配設されている。この同時認識手段32は、Y方向の実装範囲C内の任意の位置に位置決め可能でかつ実装ヘッド27による実装位置と実装位置からX方向に退避した位置との間で移動可能に支持されている。   Further, the electronic component held on the mounting head 27 is recognized on the upper side between the mounting head 27 and the support base 30, and both positions where the electronic components on the substrate 31 are to be mounted can be recognized on the lower side. Simultaneous recognition means 32 is provided. The simultaneous recognition means 32 is supported so that it can be positioned at any position within the mounting range C in the Y direction and can be moved between a mounting position by the mounting head 27 and a position retracted from the mounting position in the X direction. .

X方向テーブル29のX方向一側(図では右側)には、基板31を支持台30上に搬入する搬入部33が、X方向テーブル29のX方向他側に、支持台30上から基板31を搬出する搬出部34が配設されている。支持台30の前後両側には搬入部33、搬出部34の一対のレールに接続可能でかつ昇降可能な部分レール35が設けられ、基板31をこの部分レール35上に受けた後、支持台30上に載置固定するように構成されている。   On one side in the X direction of the X direction table 29 (right side in the figure), a loading portion 33 for carrying the substrate 31 onto the support base 30 is located on the other side in the X direction of the X direction table 29 from above the support base 30. An unloading part 34 for unloading is disposed. A partial rail 35 that can be connected to a pair of rails of the carry-in portion 33 and the carry-out portion 34 and that can be raised and lowered is provided on both front and rear sides of the support base 30. After receiving the substrate 31 on the partial rail 35, the support base 30 is provided. It is configured to be mounted and fixed on the top.

次に、以上の構成の電子部品実装装置5に設けられている清浄手段8について、図2、図4、図5を参照して説明する。本体部11の上部空間をカバー36で覆うことで、エキパンド台21、反転移送手段25、実装手段26、及びX方向テーブル29と支持台30などの実装部が配設された空間を閉空間37としている。そして、この閉空間37内に所定の清浄度(例えば、クラス1000〜1万程度)に清浄化されたエアを導入するため、カバー36の上面中央部にファン付きHEPAフィルタから成る清浄化エア導入手段38が配設されている。また、カバー36の背面には排気ファン(図示せず)に接続された排気ダクト39が接続され、閉空間37内で発生した塵埃をエアとともに排出するように構成されている。   Next, the cleaning means 8 provided in the electronic component mounting apparatus 5 having the above configuration will be described with reference to FIGS. 2, 4, and 5. By covering the upper space of the main body 11 with the cover 36, the space in which the mounting part such as the expansion base 21, the reverse transfer means 25, the mounting means 26, the X-direction table 29 and the support base 30 is disposed is closed space 37. It is said. Then, in order to introduce the air purified to a predetermined cleanliness (for example, class 1000 to 10,000) into the closed space 37, the clean air introduced from the HEPA filter with a fan at the center of the upper surface of the cover 36 is introduced. Means 38 are provided. Further, an exhaust duct 39 connected to an exhaust fan (not shown) is connected to the back surface of the cover 36 so that dust generated in the closed space 37 is discharged together with air.

カバー36の搬入部33及び搬出部34に対向する部分には基板31を搬入出するための開口40が形成され、かつこの開口40を開閉するシャッタ41が設けられている。また、この開口40の上部と下部に内側から外側に向けて斜めにカーテン状にエアを吹き出すエア噴射手段42が設けられている。   An opening 40 for loading and unloading the substrate 31 is formed in a portion of the cover 36 that faces the loading portion 33 and the unloading portion 34, and a shutter 41 that opens and closes the opening 40 is provided. In addition, air injection means 42 for blowing air in a curtain shape obliquely from the inside to the outside is provided at the upper and lower portions of the opening 40.

また、閉空間37を画成するカバー36の前面には、図5に示すように、メンテナンス用開口43とそれを閉じる開閉扉44が設けられており、かつメンテナンス用開口43の上部と下部に内側から外側に向けて斜めにカーテン状にエアを吹き出すエア噴射手段45が設けられている。   Further, as shown in FIG. 5, a maintenance opening 43 and an opening / closing door 44 for closing the opening are provided on the front surface of the cover 36 that defines the closed space 37. Air ejecting means 45 for blowing air in a curtain shape obliquely from the inside to the outside is provided.

以上の構成の清浄手段8は、図6に示すように、実装動作を行っている通常動作時には、シャッタ41を閉じ清浄化エア導入手段38を作動させるとともに排気ダクト39からの排気を行って集塵吸引を行っている。一方、基板31を搬入出する時には、排気ファン(図示せず)を停止して排気ダクト39からの排気を停止して集塵吸引をオフし、シャッタ41を開放するとともに、エア噴射手段42からエアを噴射して形成されるエアカーテンにて開口41を閉じ、その状態で基板31の搬入出を行うことで、基板31に付着している塵埃を除去しながら閉空間37内に搬入し、搬入出が終了するとシャッタ41を閉じ、通常動作に復帰する。メンテナンス時に開閉扉44を開く時も同様である。   As shown in FIG. 6, the cleaning means 8 having the above configuration is collected by closing the shutter 41 and operating the cleaning air introduction means 38 and exhausting air from the exhaust duct 39 during the normal operation during the mounting operation. Dust suction is performed. On the other hand, when the substrate 31 is carried in and out, the exhaust fan (not shown) is stopped to stop the exhaust from the exhaust duct 39, the dust collection suction is turned off, the shutter 41 is opened, and the air injection means 42 is used. By closing the opening 41 with an air curtain formed by injecting air, and carrying in / out the substrate 31 in that state, it is carried into the closed space 37 while removing dust adhering to the substrate 31, When the loading / unloading is completed, the shutter 41 is closed and the normal operation is resumed. The same applies when opening the door 44 during maintenance.

なお、本実施形態では、本体部11に対して外部に配置した部品供給部12から半導体ウエハ15を供給するように構成しており、そのためカバー36に半導体ウエハ15の搬入出用の開口が設けられており、詳細な説明は省略するが、基板搬入出用の開口40の場合と同様にシャッタ46(図2参照)やエア噴射手段が設けられている。また、部品供給部13に搭載された部品供給カセット19の先端部は、表面実装部品18を第2の部品供給位置Bに供給するため、カバー36内に挿入されており、カバー36にはそのための狭い幅の貫通開口(図示せず)が形成され、上記と同様のエア噴射手段が設けられている。   In the present embodiment, the semiconductor wafer 15 is supplied from the component supply unit 12 arranged outside the main body 11, and therefore an opening for loading and unloading the semiconductor wafer 15 is provided in the cover 36. Although not described in detail, a shutter 46 (see FIG. 2) and air injection means are provided as in the case of the opening 40 for carrying in and out the substrate. The tip of the component supply cassette 19 mounted on the component supply unit 13 is inserted into the cover 36 in order to supply the surface-mounted component 18 to the second component supply position B. A through opening (not shown) having a narrow width is formed, and air injection means similar to the above is provided.

次に、上記構成の電子部品実装装置5において、基板31に対してベアIC部品14と表面実装部品18を混載実装する動作を説明する。搬入部33にて供給された基板31は、X方向テーブル29に設けられた部分レール35上に受け渡された後、部分レール35が下降することで支持台30上に載置固定される。その後、X方向テーブル29にて基板31における電子部品実装位置のX方向位置が、実装ヘッド27のX方向位置に一致するように位置決めされる。   Next, an operation of mounting the bare IC component 14 and the surface mounting component 18 on the substrate 31 in the electronic component mounting apparatus 5 having the above configuration will be described. After the substrate 31 supplied by the carry-in unit 33 is transferred onto the partial rail 35 provided on the X-direction table 29, the partial rail 35 descends and is placed and fixed on the support base 30. Thereafter, the X direction table 29 is positioned so that the X direction position of the electronic component mounting position on the substrate 31 coincides with the X direction position of the mounting head 27.

一方、部品供給部12にて供給され、エキスパンド台21上に導入された半導体ウエハ15は、エキスパンド台21でエキスパンドシートが拡大されて各ベアIC部品14が分離された後、X方向テーブル22が作動されて実装すべきベアIC部品14が反転移送手段25の移動経路の直下に位置するように位置決めされる。また、認識カメラ24が実装すべきベアIC部品14の直上に位置決めされ、ベアIC部品14の適否とその位置が高精度に認識され、その認識結果によってX方向テーブル22の位置補正が成されるとともに、反転移送手段25による部品吸着位置が求められる。次いで、反転移送手段25が作動され、ベアIC部品14が吸着保持されて持ち上げられ、その後第1の部品供給位置Aに向けてY方向に移動するとともに上下が反転されて第1の部品供給位置Aに供給される。   On the other hand, the semiconductor wafer 15 supplied by the component supply unit 12 and introduced onto the expansion table 21 is expanded by the expansion table 21 and the bare IC components 14 are separated, and then the X-direction table 22 is displayed. The bare IC component 14 to be mounted by being operated is positioned so as to be located immediately below the moving path of the reverse transfer means 25. Further, the recognition camera 24 is positioned immediately above the bare IC component 14 to be mounted, the suitability of the bare IC component 14 and its position are recognized with high accuracy, and the position correction of the X-direction table 22 is performed based on the recognition result. At the same time, the component suction position by the reverse transfer means 25 is obtained. Next, the reverse transfer means 25 is actuated, and the bear IC component 14 is sucked and held and lifted, and then moves in the Y direction toward the first component supply position A and is turned upside down to the first component supply position. A is supplied.

その時には、実装手段26の実装ヘッド27が第1の部品供給位置Aに移動してきており、実装ヘッド27にてベアIC部品14が保持された後、Y方向テーブル28が作動されて実装ヘッド27が基板31における実装位置のY方向位置に位置決めされる。それと同時に同時認識手段32が基板31の実装位置に位置決めされ、その状態で基板31の実装位置に設けられている位置マークが認識されるとともに、実装ヘッド27に保持されているベアIC部品14が認識され、所定の位置決め精度が確保されるようにY方向テーブル28及びX方向テーブル29による位置補正が成され、基板31の実装位置にベアIC部品14の位置が高精度に位置決めされる。その後、実装ヘッド27にてベアIC部品14が実装される。   At that time, the mounting head 27 of the mounting means 26 has moved to the first component supply position A. After the bare IC component 14 is held by the mounting head 27, the Y-direction table 28 is actuated to operate the mounting head 27. Is positioned at the Y-direction position of the mounting position on the substrate 31. At the same time, the simultaneous recognition means 32 is positioned at the mounting position of the substrate 31. In this state, the position mark provided at the mounting position of the substrate 31 is recognized, and the bare IC component 14 held by the mounting head 27 is The position is corrected by the Y direction table 28 and the X direction table 29 so as to be recognized and a predetermined positioning accuracy is ensured, and the position of the bare IC component 14 is positioned with high accuracy at the mounting position of the substrate 31. Thereafter, the bare IC component 14 is mounted by the mounting head 27.

その一方で、部品供給部7では部品供給台20が作動して基板31に実装すべき表面実装部品18を収容した部品供給カセット19が第2の部品供給位置Bに対向する位置に位置決めされ、この第2の部品供給位置Bに表面実装部品18が供給されており、その後実装手段26にてこの表面実装部品18が保持されてY方向に移動し、上記と同様に基板31の所定の実装位置に実装される。   On the other hand, in the component supply unit 7, the component supply base 20 is operated to position the component supply cassette 19 containing the surface mount component 18 to be mounted on the substrate 31 at a position facing the second component supply position B. The surface-mounted component 18 is supplied to the second component supply position B, and then the surface-mounted component 18 is held by the mounting means 26 and moved in the Y direction. Implemented in position.

以上の実装動作が適宜繰り返されて、基板31に対して所要数のベアIC部品14と表面実装部品18が混載実装され、その実装が完了すると、基板31は搬出部34にて次工程に向けて搬出され、次の基板31が搬入部33にて搬入され、支持台30上に設置される。   The above mounting operation is repeated as appropriate, and the required number of bare IC components 14 and the surface mounting components 18 are mixedly mounted on the substrate 31. When the mounting is completed, the substrate 31 is directed to the next process in the carry-out portion 34. The next substrate 31 is carried in by the carry-in unit 33 and placed on the support table 30.

以上のように本実施形態の電子部品実装装置5においては、X方向テーブル29にて基板31をX方向に位置決めし、X方向テーブル29のY方向一側の前側において第1の部品供給位置AにベアIC部品14を供給し、X方向テーブル29のY方向他側の後側において第2の部品供給位置Bに表面実装部品18を供給し、実装手段26にて第1又は第2の部品供給位置A、BでベアIC部品14又は表面実装部品18を保持して基板31の所定の実装位置に実装するようにしているので、ベアIC部品14と表面実装部品18を1台の電子部品実装装置にて実装することができ、かつ実装手段26をY方向の1方向にのみ直線移動させて位置決めすれば良いので、高精度・高速実装を実現することができる。   As described above, in the electronic component mounting apparatus 5 of the present embodiment, the substrate 31 is positioned in the X direction by the X direction table 29, and the first component supply position A on the front side of the X direction table 29 on the Y direction side. The bare IC component 14 is supplied to the surface, the surface mounting component 18 is supplied to the second component supply position B on the rear side of the other side in the Y direction of the X direction table 29, and the mounting means 26 supplies the first or second component. Since the bare IC component 14 or the surface mounting component 18 is held at the supply positions A and B and mounted at a predetermined mounting position on the substrate 31, the bare IC component 14 and the surface mounting component 18 are combined into one electronic component. Since it can be mounted by the mounting apparatus and the mounting means 26 only needs to be linearly moved and positioned only in one direction in the Y direction, high-accuracy and high-speed mounting can be realized.

また、以上の実装動作中において、その実装部がカバー36で覆われ、また基板31の搬入出用の開口40をシャッタ41にて閉じられて閉空間37が形成され、その閉空間37に清浄化エア導入手段38にて清浄化したエアが導入され、さらに閉空間37内の塵埃をエアとともに排気ダクト39から排出されていることで、閉空間37内が高い清浄度が保持され、そのためベアIC部品14を高い信頼性をもって実装することができ、ベアIC部品14と表面実装部品18を混載して実装した基板31を生産性良く製造することができる。   Further, during the mounting operation described above, the mounting portion is covered with the cover 36, and the opening 40 for loading / unloading the substrate 31 is closed by the shutter 41 to form a closed space 37, and the closed space 37 is cleaned. Air that has been cleaned by the conditioned air introduction means 38 is introduced, and dust in the closed space 37 is discharged together with the air from the exhaust duct 39, so that the inside of the closed space 37 is maintained at a high level of cleanliness. The IC component 14 can be mounted with high reliability, and the substrate 31 on which the bare IC component 14 and the surface mount component 18 are mounted together can be manufactured with high productivity.

また、基板搬入出時に、排気ダクト39からの排気を停止して閉空間37内の圧力を外部空間より高くして外気が閉空間37内に入るのを防止した状態でシャッタ41を開放するとともに、開口40の内側から外側に向けてエア噴射手段42にて開口40を閉じるようにカーテン状のエアを吹き出すことにより、閉空間37内に外気とともに塵埃が侵入したり、基板31に付着して塵埃が侵入するのを確実に防止することができ、基板31の搬入出時にも閉空間37内に清浄度を高く維持できる。   Further, when the substrate is carried in and out, the exhaust from the exhaust duct 39 is stopped and the pressure in the closed space 37 is made higher than that in the external space to prevent the outside air from entering the closed space 37 and the shutter 41 is opened. By blowing out curtain-shaped air from the inside of the opening 40 toward the outside by the air ejecting means 42 so as to close the opening 40, dust enters the closed space 37 together with outside air or adheres to the substrate 31. Dust can be reliably prevented from entering, and the cleanliness can be kept high in the closed space 37 even when the substrate 31 is carried in and out.

さらに、この電子部品実装装置5のメンテナンス時に開閉扉44を開いてメンテナンス用開口43を開放した場合にも、清浄化エア導入手段38を作動させて閉空間37内の圧力を高くしつつ、エア噴射手段45にてメンテナンス用開口43の内側から外側に向けてその開口43を閉じるカーテン状にエアが吹き出されることで、外部の塵埃が閉空間37内に多量に侵入して大きく汚染されることがないので、メンテナンス後速やかに閉空間37内の清浄度を確保することができ、速やかに清浄化された雰囲気での実装を再開することができる。   Further, even when the opening / closing door 44 is opened and the maintenance opening 43 is opened during maintenance of the electronic component mounting apparatus 5, the air in the closed space 37 is increased while operating the cleaning air introduction means 38 to increase the air pressure. Air is blown out in the form of a curtain that closes the opening 43 from the inside to the outside of the maintenance opening 43 by the ejecting means 45, so that a large amount of external dust enters the closed space 37 and is greatly contaminated. Therefore, the cleanliness in the closed space 37 can be ensured promptly after the maintenance, and the mounting in the cleaned atmosphere can be resumed promptly.

本発明の電子部品実装設備の一実施形態の概略構成図である。It is a schematic block diagram of one Embodiment of the electronic component mounting equipment of this invention. 同実施形態の電子部品実装設備に配設された、ベアIC部品と表面実装部品を混載して実装する電子部品実装装置の全体概略構成を示す透視斜視図である。It is a see-through | perspective perspective view which shows the whole schematic structure of the electronic component mounting apparatus arrange | positioned in the electronic component mounting equipment of the embodiment, and mounting a bare IC component and a surface mounting component together. 同電子部品実装装置における実装工程を模式的に示した斜視図である。It is the perspective view which showed typically the mounting process in the same electronic component mounting apparatus. 同電子部品実装装置における清浄化手段を基板搬送方向に沿って縦断して示した概略構成図である。It is the schematic block diagram which showed the cleaning means in the same electronic component mounting apparatus longitudinally along the board conveyance direction. 同電子部品実装装置における清浄化手段を基板搬送と直交する方向に縦断して示した概略構成図である。It is the schematic block diagram which showed the cleaning means in the same electronic component mounting apparatus longitudinally in the direction orthogonal to board | substrate conveyance. 同実施形態における清浄化手段の制御動作の説明図である。It is explanatory drawing of the control action of the cleaning means in the embodiment.

符号の説明Explanation of symbols

1 電子部品実装設備
2 実装ライン
3 洗浄装置
5 電子部品実装装置
8 清浄手段
14 ベアIC部品
18 表面実装部品
19 部品供給カセット(表面実装部品の供給手段)
21 エキスパンド台(ベアIC部品の供給手段)
25 反転移送手段
26 実装手段
29 X方向テーブル(基板位置決め手段)
31 基板
36 カバー
37 閉空間
38 清浄化エア導入手段
39 排気ダクト(排気手段)
40 開口
41 シャッタ
42 エア噴射手段
43 メンテナンス用開口
44 開閉扉
45 エア噴射手段
A 第1の部品供給位置
B 第2の部品供給位置
DESCRIPTION OF SYMBOLS 1 Electronic component mounting equipment 2 Mounting line 3 Cleaning apparatus 5 Electronic component mounting apparatus 8 Cleaning means 14 Bare IC component 18 Surface mount component 19 Component supply cassette (Surface mount component supply means)
21 Expanding stand (means for supplying bare IC parts)
25 Reverse transfer means 26 Mounting means 29 X direction table (substrate positioning means)
31 Substrate 36 Cover 37 Closed space 38 Clean air introduction means 39 Exhaust duct (exhaust means)
40 Opening 41 Shutter 42 Air Injecting Means 43 Maintenance Opening 44 Opening / Closing Door 45 Air Injecting Means A First Component Supply Position B Second Component Supply Position

Claims (1)

X方向に基板を搬入し、位置決めし、搬出する基板搬送・位置決め手段と、この基板搬送・位置決め手段のY方向(X方向に対し直角の方向)の一側に設けられたベアIC部品の供給手段と、前記基板搬送・位置決め手段のY方向の他側に設けられた表面実装部品の供給手段と、前記ベアIC部品の供給手段から供給されたベアIC部品を上下反転して第1の部品供給位置に供給する反転移送手段と、前記第1の部品供給位置のベアIC部品あるいは前記表面実装部品の供給手段からの表面実装部品を保持して基板の所定の実装位置に前記ベアIC部品と前記表面実装部品とを混載して実装する実装手段とを備えた電子部品実装装置において、前記反転移送手段と前記基板搬送・位置決め手段と前記実装手段とが配設された空間を閉空間に構成するとともに、前記基板搬送・位置決め手段の搬入箇所、および搬出箇所に、基板が搬入、搬出される開口を有するカバーを設け、このカバーの上面中央部に前記閉空間に清浄化したエアを導入する清浄化エア導入手段を設け、更に前記カバーの基板が搬入、搬出される開口を開閉し、基板搬入出時は前記開口を開放し、実装動作中は前記開口を閉じるシャッタを前記開口に備え、更に前記カバーの閉空間内の塵埃をエアと共に排出するよう前記表面実装部品の供給手段側のカバーの背面に排気ダクトを設けたことを特徴とする電子部品実装装置。 Board transport / positioning means for loading, positioning, and unloading boards in the X direction , and supply of bare IC components provided on one side of the board transport / positioning means in the Y direction (direction perpendicular to the X direction) A first component by vertically inverting the bare IC component supplied from the supply means of the surface mounting component provided on the other side in the Y direction of the board conveying / positioning means, and the bare IC component supply means A reverse transfer means for supplying to the supply position; and a bare IC component at the first component supply position or a surface mount component from the supply means for the surface mount component to hold the bare IC component at a predetermined mounting position on the substrate ; in the electronic component mounting apparatus and a mounting means for mounting by mixed with said surface mount component, constituting said the inverting transfer means and said substrate conveying and positioning means and said mounting means is arranged spatially in a closed space Rutotomoni, carrying portions of the substrate transfer and positioning means, and the carry-out position, the substrate is transported, the cover having an opening to be carried out provided to introduce air and cleaned in the closed space in the upper central portion of the cover Provided with a cleaning air introduction means, further opens and closes an opening through which the substrate of the cover is carried in and out, opens the opening at the time of loading and unloading the substrate, and includes a shutter for closing the opening during the mounting operation. Furthermore the electronic component mounting apparatus characterized by comprising an exhaust duct on the back of the cover of the supply means side by the Hare before Symbol surface mount components to discharge the dust in the closed space of the cover with air.
JP2008043504A 2008-02-25 2008-02-25 Electronic component mounting equipment Expired - Fee Related JP4291393B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008043504A JP4291393B2 (en) 2008-02-25 2008-02-25 Electronic component mounting equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008043504A JP4291393B2 (en) 2008-02-25 2008-02-25 Electronic component mounting equipment

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2002102925A Division JP4152658B2 (en) 2002-04-04 2002-04-04 Electronic component mounting equipment

Publications (2)

Publication Number Publication Date
JP2008147705A JP2008147705A (en) 2008-06-26
JP4291393B2 true JP4291393B2 (en) 2009-07-08

Family

ID=39607448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008043504A Expired - Fee Related JP4291393B2 (en) 2008-02-25 2008-02-25 Electronic component mounting equipment

Country Status (1)

Country Link
JP (1) JP4291393B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6879708B2 (en) * 2016-10-12 2021-06-02 株式会社Fuji Work equipment and board work system
JP6687495B2 (en) * 2016-10-14 2020-04-22 株式会社Fuji Component mounting line
JP7143045B2 (en) 2020-10-26 2022-09-28 三菱電機株式会社 Chip mounter, electronic circuit board manufacturing method, and power module manufacturing method
KR102647323B1 (en) * 2021-09-23 2024-03-13 한화정밀기계 주식회사 Bonding apparatus and controlling method thereof
WO2024047760A1 (en) * 2022-08-30 2024-03-07 株式会社Fuji Substrate-working machine

Also Published As

Publication number Publication date
JP2008147705A (en) 2008-06-26

Similar Documents

Publication Publication Date Title
JP4291393B2 (en) Electronic component mounting equipment
JP4881123B2 (en) Mounting machine and method for cleaning parts thereof
JPH09102696A (en) Surface mounting equipment
TWI573217B (en) A substrate processing apparatus, a substrate processing system, and a substrate processing method
JP4743716B2 (en) Substrate processing equipment
KR20170039836A (en) Die bonding apparatus
JP6742306B2 (en) Adhesion removal method and attachment removal device
JP4932684B2 (en) Processing machine and substrate production line
JP4152658B2 (en) Electronic component mounting equipment
JP3857949B2 (en) Electronic component mounting equipment
JP4064795B2 (en) Electronic component mounting equipment
JP6323848B2 (en) Mounting apparatus, recovery method, program, and board manufacturing method
JP3900166B2 (en) Component mounting board manufacturing apparatus and manufacturing method
JP2007324623A (en) Method of mounting electronic component
JP4093854B2 (en) Electronic component mounting equipment
JP5726581B2 (en) Electronic parts repair machine and production line
JP2012069730A (en) Die bonder and bonding method
JP2009071332A (en) Apparatus for mounting conductive balls
JP4415326B2 (en) Ball mounting device
JP2008258382A (en) Assembling method of printed circuit board, and program for making mounting program
JP2000174158A (en) Ball mounting apparatus
JP4147368B2 (en) Mount head
JP4291387B2 (en) Electronic component mounting method
JPH07307598A (en) Electronic part mounting device and electronic part mounting method
JP6802333B2 (en) Board processing equipment

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20081209

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090209

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090303

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090402

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120410

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130410

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130410

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140410

Year of fee payment: 5

LAPS Cancellation because of no payment of annual fees