JP4272946B2 - 被測定物の変位検出装置 - Google Patents

被測定物の変位検出装置 Download PDF

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Publication number
JP4272946B2
JP4272946B2 JP2003270260A JP2003270260A JP4272946B2 JP 4272946 B2 JP4272946 B2 JP 4272946B2 JP 2003270260 A JP2003270260 A JP 2003270260A JP 2003270260 A JP2003270260 A JP 2003270260A JP 4272946 B2 JP4272946 B2 JP 4272946B2
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Japan
Prior art keywords
refractive index
periodic structure
light
index periodic
detection light
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Expired - Fee Related
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JP2003270260A
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Japanese (ja)
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JP2005024490A (ja
JP2005024490A5 (enExample
Inventor
健明 井辻
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Canon Inc
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Canon Inc
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  • Measurement Of Optical Distance (AREA)
JP2003270260A 2003-07-02 2003-07-02 被測定物の変位検出装置 Expired - Fee Related JP4272946B2 (ja)

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JP2003270260A JP4272946B2 (ja) 2003-07-02 2003-07-02 被測定物の変位検出装置

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JP2003270260A JP4272946B2 (ja) 2003-07-02 2003-07-02 被測定物の変位検出装置

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JP2005024490A JP2005024490A (ja) 2005-01-27
JP2005024490A5 JP2005024490A5 (enExample) 2006-08-17
JP4272946B2 true JP4272946B2 (ja) 2009-06-03

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105091771A (zh) * 2015-05-25 2015-11-25 合肥工业大学 一种基于位移放大原理测量连杆微变形的装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080259918A1 (en) * 2007-04-19 2008-10-23 Craig Elliott Walker Method and apparatus for managing telephone calls

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105091771A (zh) * 2015-05-25 2015-11-25 合肥工业大学 一种基于位移放大原理测量连杆微变形的装置

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JP2005024490A (ja) 2005-01-27

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