JP4271584B2 - イオン源の為の間接加熱ボタン型カソード - Google Patents

イオン源の為の間接加熱ボタン型カソード Download PDF

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Publication number
JP4271584B2
JP4271584B2 JP2003573666A JP2003573666A JP4271584B2 JP 4271584 B2 JP4271584 B2 JP 4271584B2 JP 2003573666 A JP2003573666 A JP 2003573666A JP 2003573666 A JP2003573666 A JP 2003573666A JP 4271584 B2 JP4271584 B2 JP 4271584B2
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JP
Japan
Prior art keywords
piece
button
cathode
button member
front surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003573666A
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English (en)
Japanese (ja)
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JP2005519433A5 (cg-RX-API-DMAC7.html
JP2005519433A (ja
Inventor
マービン ファーレイ，
タカオ サカセ，
シュウ サトウ，
ジョフリー ライディング，
ピーター ローズ，
クリストス クリストウ，
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/091,351 external-priority patent/US20030168609A1/en
Priority claimed from US10/259,827 external-priority patent/US6878946B2/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of JP2005519433A publication Critical patent/JP2005519433A/ja
Publication of JP2005519433A5 publication Critical patent/JP2005519433A5/ja
Application granted granted Critical
Publication of JP4271584B2 publication Critical patent/JP4271584B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2003573666A 2002-03-06 2003-02-20 イオン源の為の間接加熱ボタン型カソード Expired - Fee Related JP4271584B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/091,351 US20030168609A1 (en) 2002-03-06 2002-03-06 Indirectly heated button cathode for an ion source
US10/259,827 US6878946B2 (en) 2002-09-30 2002-09-30 Indirectly heated button cathode for an ion source
PCT/GB2003/000733 WO2003075305A2 (en) 2002-03-06 2003-02-20 Indirectly heated button cathode for an ion source

Publications (3)

Publication Number Publication Date
JP2005519433A JP2005519433A (ja) 2005-06-30
JP2005519433A5 JP2005519433A5 (cg-RX-API-DMAC7.html) 2009-02-12
JP4271584B2 true JP4271584B2 (ja) 2009-06-03

Family

ID=27791187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003573666A Expired - Fee Related JP4271584B2 (ja) 2002-03-06 2003-02-20 イオン源の為の間接加熱ボタン型カソード

Country Status (4)

Country Link
EP (1) EP1481413A2 (cg-RX-API-DMAC7.html)
JP (1) JP4271584B2 (cg-RX-API-DMAC7.html)
AU (1) AU2003208427A1 (cg-RX-API-DMAC7.html)
WO (1) WO2003075305A2 (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6878946B2 (en) 2002-09-30 2005-04-12 Applied Materials, Inc. Indirectly heated button cathode for an ion source
US6984831B2 (en) 2004-03-05 2006-01-10 Varian Semiconductor Equipment Associates, Inc. Gas flow restricting cathode system for ion implanter and related method
KR101726185B1 (ko) * 2014-11-20 2017-04-13 주식회사 밸류엔지니어링 이온주입기용 전자방출 캐소드
TWI725384B (zh) * 2019-02-22 2021-04-21 力晶積成電子製造股份有限公司 半導體離子植入機的離子源頭結構

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2242986C3 (de) * 1972-09-01 1981-05-07 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Glühkathode
JPS5853460B2 (ja) * 1981-12-14 1983-11-29 株式会社東芝 ホロ−カソ−ド放電装置
US5374828A (en) * 1993-09-15 1994-12-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Electron reversal ionizer for detection of trace species using a spherical cathode
US5703372A (en) * 1996-10-30 1997-12-30 Eaton Corporation Endcap for indirectly heated cathode of ion source
US7276847B2 (en) * 2000-05-17 2007-10-02 Varian Semiconductor Equipment Associates, Inc. Cathode assembly for indirectly heated cathode ion source

Also Published As

Publication number Publication date
WO2003075305A3 (en) 2003-11-27
AU2003208427A8 (en) 2003-09-16
EP1481413A2 (en) 2004-12-01
WO2003075305A2 (en) 2003-09-12
AU2003208427A1 (en) 2003-09-16
JP2005519433A (ja) 2005-06-30

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