AU2003208427A1 - Indirectly heated button cathode for an ion source - Google Patents

Indirectly heated button cathode for an ion source

Info

Publication number
AU2003208427A1
AU2003208427A1 AU2003208427A AU2003208427A AU2003208427A1 AU 2003208427 A1 AU2003208427 A1 AU 2003208427A1 AU 2003208427 A AU2003208427 A AU 2003208427A AU 2003208427 A AU2003208427 A AU 2003208427A AU 2003208427 A1 AU2003208427 A1 AU 2003208427A1
Authority
AU
Australia
Prior art keywords
ion source
indirectly heated
button cathode
heated button
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003208427A
Other languages
English (en)
Other versions
AU2003208427A8 (en
Inventor
Christos Christou
Marvin Farley
Peter Rose
Geoffrey Ryding
Takao Sakase
Shu Satoh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/091,351 external-priority patent/US20030168609A1/en
Priority claimed from US10/259,827 external-priority patent/US6878946B2/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of AU2003208427A8 publication Critical patent/AU2003208427A8/xx
Publication of AU2003208427A1 publication Critical patent/AU2003208427A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
AU2003208427A 2002-03-06 2003-02-20 Indirectly heated button cathode for an ion source Abandoned AU2003208427A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US10/091,351 2002-03-06
US10/091,351 US20030168609A1 (en) 2002-03-06 2002-03-06 Indirectly heated button cathode for an ion source
US10/259,827 2002-09-30
US10/259,827 US6878946B2 (en) 2002-09-30 2002-09-30 Indirectly heated button cathode for an ion source
PCT/GB2003/000733 WO2003075305A2 (en) 2002-03-06 2003-02-20 Indirectly heated button cathode for an ion source

Publications (2)

Publication Number Publication Date
AU2003208427A8 AU2003208427A8 (en) 2003-09-16
AU2003208427A1 true AU2003208427A1 (en) 2003-09-16

Family

ID=27791187

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003208427A Abandoned AU2003208427A1 (en) 2002-03-06 2003-02-20 Indirectly heated button cathode for an ion source

Country Status (4)

Country Link
EP (1) EP1481413A2 (cg-RX-API-DMAC7.html)
JP (1) JP4271584B2 (cg-RX-API-DMAC7.html)
AU (1) AU2003208427A1 (cg-RX-API-DMAC7.html)
WO (1) WO2003075305A2 (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6878946B2 (en) 2002-09-30 2005-04-12 Applied Materials, Inc. Indirectly heated button cathode for an ion source
US6984831B2 (en) 2004-03-05 2006-01-10 Varian Semiconductor Equipment Associates, Inc. Gas flow restricting cathode system for ion implanter and related method
KR101726185B1 (ko) * 2014-11-20 2017-04-13 주식회사 밸류엔지니어링 이온주입기용 전자방출 캐소드
TWI725384B (zh) * 2019-02-22 2021-04-21 力晶積成電子製造股份有限公司 半導體離子植入機的離子源頭結構

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2242986C3 (de) * 1972-09-01 1981-05-07 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Glühkathode
JPS5853460B2 (ja) * 1981-12-14 1983-11-29 株式会社東芝 ホロ−カソ−ド放電装置
US5374828A (en) * 1993-09-15 1994-12-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Electron reversal ionizer for detection of trace species using a spherical cathode
US5703372A (en) * 1996-10-30 1997-12-30 Eaton Corporation Endcap for indirectly heated cathode of ion source
US7276847B2 (en) * 2000-05-17 2007-10-02 Varian Semiconductor Equipment Associates, Inc. Cathode assembly for indirectly heated cathode ion source

Also Published As

Publication number Publication date
WO2003075305A3 (en) 2003-11-27
AU2003208427A8 (en) 2003-09-16
EP1481413A2 (en) 2004-12-01
WO2003075305A2 (en) 2003-09-12
JP2005519433A (ja) 2005-06-30
JP4271584B2 (ja) 2009-06-03

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase