JP4270574B2 - 溶剤の回収装置 - Google Patents
溶剤の回収装置 Download PDFInfo
- Publication number
- JP4270574B2 JP4270574B2 JP2006149447A JP2006149447A JP4270574B2 JP 4270574 B2 JP4270574 B2 JP 4270574B2 JP 2006149447 A JP2006149447 A JP 2006149447A JP 2006149447 A JP2006149447 A JP 2006149447A JP 4270574 B2 JP4270574 B2 JP 4270574B2
- Authority
- JP
- Japan
- Prior art keywords
- solvent
- heat exchanger
- supplied
- refrigerant
- cooler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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- 239000002904 solvent Substances 0.000 title claims description 85
- 238000011084 recovery Methods 0.000 title claims description 19
- 239000003507 refrigerant Substances 0.000 claims description 35
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 19
- 238000001816 cooling Methods 0.000 claims description 8
- 238000010257 thawing Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 3
- 238000009833 condensation Methods 0.000 claims description 2
- 230000005494 condensation Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 36
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910021536 Zeolite Inorganic materials 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 5
- 239000010457 zeolite Substances 0.000 description 5
- 239000003463 adsorbent Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000009835 boiling Methods 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000007810 chemical reaction solvent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000002336 sorption--desorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Landscapes
- Treating Waste Gases (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006149447A JP4270574B2 (ja) | 2006-05-30 | 2006-05-30 | 溶剤の回収装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006149447A JP4270574B2 (ja) | 2006-05-30 | 2006-05-30 | 溶剤の回収装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007319730A JP2007319730A (ja) | 2007-12-13 |
| JP2007319730A5 JP2007319730A5 (enExample) | 2008-09-11 |
| JP4270574B2 true JP4270574B2 (ja) | 2009-06-03 |
Family
ID=38852963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006149447A Active JP4270574B2 (ja) | 2006-05-30 | 2006-05-30 | 溶剤の回収装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4270574B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009208037A (ja) * | 2008-03-06 | 2009-09-17 | Morikawa Co Ltd | 溶剤の回収装置 |
| JP2009208038A (ja) * | 2008-03-06 | 2009-09-17 | Morikawa Co Ltd | 溶剤の回収装置 |
| JP5243900B2 (ja) * | 2008-09-19 | 2013-07-24 | 株式会社大気社 | 溶剤回収設備 |
| TWI871399B (zh) * | 2019-12-25 | 2025-02-01 | 日商東洋紡Ｍｃ股份有限公司 | 有機溶劑回收系統 |
-
2006
- 2006-05-30 JP JP2006149447A patent/JP4270574B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007319730A (ja) | 2007-12-13 |
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