JP4268879B2 - 選択的に働くガス流過面を有するガストランスミッタ - Google Patents
選択的に働くガス流過面を有するガストランスミッタ Download PDFInfo
- Publication number
- JP4268879B2 JP4268879B2 JP2003553213A JP2003553213A JP4268879B2 JP 4268879 B2 JP4268879 B2 JP 4268879B2 JP 2003553213 A JP2003553213 A JP 2003553213A JP 2003553213 A JP2003553213 A JP 2003553213A JP 4268879 B2 JP4268879 B2 JP 4268879B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- diaphragm
- transmitter
- leak
- gas transmitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/207—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material calibration arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/007—Leak detector calibration, standard leaks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Sampling And Sample Adjustment (AREA)
Description
Claims (8)
- 選択的に働くガス流過面(4)を有するガストランスミッタ(1)であって、多数の流過開口(2)を備えた、半導体材料から成る保持円板(3)と、該保持円板(3)における前記流過開口(2)を覆う、選択的に作用するガス流過面を形成するダイヤフラム(5)と、該ダイヤフラム(5)の温度を調整する手段とを有する形式のものにおいて、前記保持円板(3)自体が前記ダイヤフラム(5)の温度を調整するための手段として用いられており、前記保持円板(3)が互いにほぼ向き合って位置する領域に電極(6,7)を備えかつそれ自体抵抗加熱装置として役立つことを特徴とする、ガストランスミッタ。
- 前記保持円板(3)が少なくとも主としてシリコンから成っている、請求項1記載のガストランスミッタ。
- 前記ダイヤフラム(5)が石英、石英ガラス又はパイレックスガラス(アメリカ、ユーニング社商標名)から成っている、請求項1又は2記載のガストランスミッタ。
- 前記ダイヤフラム(5)がポリマから成っている、請求項1又は2記載のガストランスミッタ。
- ヘリウム漏出ガス検出器(8)の構成部分である、請求項1から4までのいずれか1項記載のガストランスミッタ。
- 調整可能なヘリウム試験漏出装置(10)の構成部分である、請求項1から4までのいずれか1項記載のガストランスミッタ。
- 漏出ガスが圧力上昇を介して証明される漏出ガス検出器(8)において、該漏出ガス検出器(8)が請求項1から4までのいずれか1項記載のガストランスミッタを備えていることを特徴とする、漏出ガス検出器。
- ヘリウムのための調整可能な試験漏出装置(10)であって、選択的に流過性であるダイヤフラムを用いて漏出値が調節可能である形式のものにおいて、当該試験漏出装置が請求項1から4までのいずれか1項記載のガストランスミッタ(1)を備えていることを特徴とする調整可能な試験漏出装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10162126A DE10162126A1 (de) | 2001-12-18 | 2001-12-18 | Gasdurchlass mit selektiv wirkenden Gasdurchtrittsflächen |
PCT/EP2002/012718 WO2003052371A1 (de) | 2001-12-18 | 2002-11-14 | Gasdurchlass mit selektiv wirkenden gasdurchtrittsflächen |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006500550A JP2006500550A (ja) | 2006-01-05 |
JP4268879B2 true JP4268879B2 (ja) | 2009-05-27 |
Family
ID=7709642
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003553213A Expired - Lifetime JP4268879B2 (ja) | 2001-12-18 | 2002-11-14 | 選択的に働くガス流過面を有するガストランスミッタ |
Country Status (7)
Country | Link |
---|---|
US (1) | US7422627B2 (ja) |
EP (1) | EP1456620B1 (ja) |
JP (1) | JP4268879B2 (ja) |
CN (1) | CN100387959C (ja) |
AU (1) | AU2002356596A1 (ja) |
DE (2) | DE10162126A1 (ja) |
WO (1) | WO2003052371A1 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0322027D0 (en) * | 2003-09-19 | 2003-10-22 | Prototech As | Storage of pressurised fluids |
DE102004062101A1 (de) * | 2004-12-23 | 2006-07-13 | Inficon Gmbh | Selektiver Gassensor |
US7922795B2 (en) * | 2005-04-29 | 2011-04-12 | University Of Rochester | Ultrathin nanoscale membranes, methods of making, and uses thereof |
JP2008540070A (ja) | 2005-04-29 | 2008-11-20 | ユニバーシティー オブ ロチェスター | 超薄多孔質ナノスケール膜、その製造方法および使用 |
WO2007072470A1 (en) * | 2005-12-22 | 2007-06-28 | C. En. Limited | Apparatus and cartridge for storage of compressed hydrogen gas and system for filling the cartridge |
JP2009529888A (ja) * | 2006-03-14 | 2009-08-27 | ユニバーシティ オブ ロチェスター | 超薄多孔質メンブレンを有する細胞培養装置およびその使用 |
CA2692535C (en) * | 2009-04-23 | 2016-04-05 | Syncrude Canada Ltd. | Sampling vessel for fluidized solids |
US8361196B2 (en) | 2010-04-09 | 2013-01-29 | Inficon Gmbh | Gas-selective membrane and method of its production |
DE202011100428U1 (de) | 2011-04-26 | 2011-07-14 | Vacom Vakuum Komponenten & Messtechnik Gmbh | Vorrichtung zum Schutz von vakuumtechnischen Einrichtungen |
US10072241B2 (en) | 2013-03-13 | 2018-09-11 | Innovative Surface Technologies, Inc. | Conical devices for three-dimensional aggregate(s) of eukaryotic cells |
CN104934091B (zh) * | 2015-07-14 | 2017-05-10 | 中国工程物理研究院核物理与化学研究所 | 选择性通过材料及其制备方法 |
DE102020100830A1 (de) * | 2020-01-15 | 2021-07-15 | Inficon Gmbh | Prüfgasapplikator |
DE102020116939A1 (de) * | 2020-06-26 | 2021-12-30 | Inficon Gmbh | Prüfleckvorrichtung |
DE102021134647A1 (de) | 2021-12-23 | 2023-06-29 | Inficon Gmbh | Vakuumlecksucher mit Ansprüh-Membran-Testleck und Verfahren |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3828527A (en) * | 1972-09-28 | 1974-08-13 | Varian Associates | Leak detection apparatus and inlet interface |
US3939695A (en) * | 1974-02-26 | 1976-02-24 | The United States Of America As Represented By The United States Energy Research And Development Administration | Apparatus for detecting leaks |
NL9401260A (nl) * | 1993-11-12 | 1995-06-01 | Cornelis Johannes Maria Van Ri | Membraan voor microfiltratie, ultrafiltratie, gasscheiding en katalyse, werkwijze ter vervaardiging van een dergelijk membraan, mal ter vervaardiging van een dergelijk membraan, alsmede diverse scheidingssystemen omvattende een dergelijk membraan. |
DE19521275A1 (de) * | 1995-06-10 | 1996-12-12 | Leybold Ag | Gasdurchlaß mit selektiv wirkender Durchtrittsfläche sowie Verfahren zur Herstellung der Durchtrittsfläche |
US6541676B1 (en) * | 1998-12-02 | 2003-04-01 | Massachusetts Institute Of Technology | Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions |
DE10019287A1 (de) * | 2000-04-19 | 2001-10-31 | Neubert Susanne | Verbundmembrane |
US7201831B2 (en) * | 2002-02-22 | 2007-04-10 | Water Security And Technology, Inc. | Impurity detection device |
KR100529233B1 (ko) * | 2003-09-06 | 2006-02-24 | 한국전자통신연구원 | 센서 및 그 제조 방법 |
KR100561908B1 (ko) * | 2003-12-26 | 2006-03-20 | 한국전자통신연구원 | 센서 구조체 및 그 제조방법 |
-
2001
- 2001-12-18 DE DE10162126A patent/DE10162126A1/de not_active Withdrawn
-
2002
- 2002-11-14 DE DE50214862T patent/DE50214862D1/de not_active Expired - Lifetime
- 2002-11-14 JP JP2003553213A patent/JP4268879B2/ja not_active Expired - Lifetime
- 2002-11-14 US US10/497,398 patent/US7422627B2/en not_active Expired - Lifetime
- 2002-11-14 EP EP02804862A patent/EP1456620B1/de not_active Expired - Lifetime
- 2002-11-14 AU AU2002356596A patent/AU2002356596A1/en not_active Abandoned
- 2002-11-14 WO PCT/EP2002/012718 patent/WO2003052371A1/de active Application Filing
- 2002-11-14 CN CNB028251474A patent/CN100387959C/zh not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US7422627B2 (en) | 2008-09-09 |
DE50214862D1 (de) | 2011-02-24 |
EP1456620A1 (de) | 2004-09-15 |
AU2002356596A1 (en) | 2003-06-30 |
CN100387959C (zh) | 2008-05-14 |
DE10162126A1 (de) | 2003-07-03 |
EP1456620B1 (de) | 2011-01-12 |
WO2003052371A1 (de) | 2003-06-26 |
US20050229786A1 (en) | 2005-10-20 |
CN1605020A (zh) | 2005-04-06 |
JP2006500550A (ja) | 2006-01-05 |
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