JP4262583B2 - 二次元光偏向器 - Google Patents

二次元光偏向器 Download PDF

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Publication number
JP4262583B2
JP4262583B2 JP2003395844A JP2003395844A JP4262583B2 JP 4262583 B2 JP4262583 B2 JP 4262583B2 JP 2003395844 A JP2003395844 A JP 2003395844A JP 2003395844 A JP2003395844 A JP 2003395844A JP 4262583 B2 JP4262583 B2 JP 4262583B2
Authority
JP
Japan
Prior art keywords
deflector
fixing
axis
dimensional optical
swing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003395844A
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English (en)
Japanese (ja)
Other versions
JP2005156976A (ja
JP2005156976A5 (https=
Inventor
博志 宮島
雅紀 緒方
章広 北原
宜孝 神谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2003395844A priority Critical patent/JP4262583B2/ja
Priority to DE602004005803T priority patent/DE602004005803T2/de
Priority to EP04027681A priority patent/EP1536267B1/en
Priority to US10/995,399 priority patent/US7155081B2/en
Publication of JP2005156976A publication Critical patent/JP2005156976A/ja
Publication of JP2005156976A5 publication Critical patent/JP2005156976A5/ja
Application granted granted Critical
Publication of JP4262583B2 publication Critical patent/JP4262583B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Laser Beam Printer (AREA)
  • Micromachines (AREA)
JP2003395844A 2003-11-26 2003-11-26 二次元光偏向器 Expired - Fee Related JP4262583B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003395844A JP4262583B2 (ja) 2003-11-26 2003-11-26 二次元光偏向器
DE602004005803T DE602004005803T2 (de) 2003-11-26 2004-11-22 Zweidimensionaler optischer Ablenker
EP04027681A EP1536267B1 (en) 2003-11-26 2004-11-22 Two-dimensional optical deflector
US10/995,399 US7155081B2 (en) 2003-11-26 2004-11-23 Two-dimensional optical deflector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003395844A JP4262583B2 (ja) 2003-11-26 2003-11-26 二次元光偏向器

Publications (3)

Publication Number Publication Date
JP2005156976A JP2005156976A (ja) 2005-06-16
JP2005156976A5 JP2005156976A5 (https=) 2006-12-07
JP4262583B2 true JP4262583B2 (ja) 2009-05-13

Family

ID=34463803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003395844A Expired - Fee Related JP4262583B2 (ja) 2003-11-26 2003-11-26 二次元光偏向器

Country Status (4)

Country Link
US (1) US7155081B2 (https=)
EP (1) EP1536267B1 (https=)
JP (1) JP4262583B2 (https=)
DE (1) DE602004005803T2 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100636347B1 (ko) * 2004-08-18 2006-10-19 엘지전자 주식회사 스캐닝 디스플레이 시스템
JP4862587B2 (ja) * 2006-09-26 2012-01-25 ブラザー工業株式会社 光走査装置及び画像表示装置
US7826119B2 (en) 2007-01-29 2010-11-02 Brother Kogyo Kabushiki Kaisha Light scanning device
US8614742B2 (en) 2007-06-06 2013-12-24 Palo Alto Research Center Incorporated Miniature low cost pan/tilt magnetic actuation for portable and stationary video cameras
JP5125409B2 (ja) * 2007-10-26 2013-01-23 セイコーエプソン株式会社 画像表示装置
JP5099021B2 (ja) * 2009-01-21 2012-12-12 セイコーエプソン株式会社 光走査装置、非接触光走査制御機構および画像形成装置
WO2011163058A2 (en) * 2010-06-21 2011-12-29 The Board Of Trustees Of The University Of Illinois Cell mass measurement and apparatus
WO2013029784A1 (de) * 2011-08-29 2013-03-07 Heidelberg Engineering Gmbh Scanvorrichtung und scanverfahren
EP2823695B1 (en) * 2012-03-08 2018-10-24 Intel Corporation A mems micro-mirror assembly
DE102012216979A1 (de) * 2012-09-21 2014-04-17 Trumpf Laser Gmbh + Co. Kg Scannervorrichtung zum 2-dimensionalen Ablenken eines Laserstrahls
DE112013006119B4 (de) 2012-12-21 2021-03-18 Mitsubishi Electric Corp. Optische Abtasteinrichtung und Projektor
WO2018173589A1 (ja) * 2017-03-22 2018-09-27 日本電産株式会社 距離測定装置、及び移動装置
US11740458B2 (en) * 2019-07-26 2023-08-29 Microsoft Technology Licensing, Llc Projection device and projection method for head mounted display based on rotary MEMS fast scanner
US11194236B2 (en) 2019-11-22 2021-12-07 Ricoh Company, Ltd. Optical-element angle adjustment device and image projection device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4838632A (en) * 1988-05-06 1989-06-13 Lumisys Inc. Two-dimensional beam scanner
US5870219A (en) * 1997-01-20 1999-02-09 Geo. Labs, Inc. Ultra compact scanning system for a wide range of speeds, angles and field depth
EP0671697A1 (en) * 1993-09-21 1995-09-13 Opticon Sensors Europe B.V. Helical scanning pattern generator
US6108118A (en) * 1998-07-09 2000-08-22 Olympus Optical Co., Ltd. Optical deflector
JP4674017B2 (ja) * 2000-11-20 2011-04-20 オリンパス株式会社 光偏向器
US7035299B2 (en) * 2001-03-29 2006-04-25 Fuji Photo Film Co., Ltd. Image forming apparatus
JP2003066362A (ja) * 2001-08-23 2003-03-05 Olympus Optical Co Ltd 光偏向器
JP2003344797A (ja) 2002-05-28 2003-12-03 Olympus Optical Co Ltd 光走査装置

Also Published As

Publication number Publication date
JP2005156976A (ja) 2005-06-16
DE602004005803D1 (de) 2007-05-24
EP1536267A1 (en) 2005-06-01
DE602004005803T2 (de) 2008-01-10
US7155081B2 (en) 2006-12-26
US20050111787A1 (en) 2005-05-26
EP1536267B1 (en) 2007-04-11

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