JP4260761B2 - 円板形状水晶素板の製造方法 - Google Patents
円板形状水晶素板の製造方法 Download PDFInfo
- Publication number
- JP4260761B2 JP4260761B2 JP2005102826A JP2005102826A JP4260761B2 JP 4260761 B2 JP4260761 B2 JP 4260761B2 JP 2005102826 A JP2005102826 A JP 2005102826A JP 2005102826 A JP2005102826 A JP 2005102826A JP 4260761 B2 JP4260761 B2 JP 4260761B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- disk
- base plate
- main surface
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 38
- 239000010453 quartz Substances 0.000 title claims description 36
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000013078 crystal Substances 0.000 claims description 60
- 238000000227 grinding Methods 0.000 claims description 19
- 210000000695 crystalline len Anatomy 0.000 claims description 15
- 239000006061 abrasive grain Substances 0.000 claims description 10
- 239000010432 diamond Substances 0.000 claims description 7
- 229910003460 diamond Inorganic materials 0.000 claims description 7
- 238000000034 method Methods 0.000 description 15
- 238000005520 cutting process Methods 0.000 description 4
- 230000005284 excitation Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Images
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
図1はこの発明における円板形状水晶素板の製造方法を示した工程図である。図2は、本発明に使用する研削加工治具のうちカップホイール部分の一形態を示した断面図である。尚、各図において説明を明りょうにするため部品や構造体の一部を図示していない。又、図面内の各寸法も一部誇張して図示しており、各図において同一の符号は同様の対象を示すものとする。
2・・・カップホイール
3・・・研削加工治具
4、4a、4b、4c・・・ダイヤモンド砥粒
5・・・円柱形状水晶体
6・・・円板形状水晶素板
Claims (2)
- 外形が円板形状の水晶素板の製造方法において、
人工水晶より、主面が該人工水晶の結晶軸に対し所望する角度の直交方向となるように切断加工され、且つ該主面が所望の形状に研磨加工された母水晶体を形成する工程と、
該母水晶体の該主面から該主面の直交方向に向かって、カップホイールを備えた研削加工治具にて複数個の円柱形状水晶体を研削し取得する工程と、
該研削加工治具にて研削し取得した円柱形状水晶体を、所望の厚みで切断し、円板形状の水晶素板を複数形成する工程と
を具備することを特徴とする円板形状水晶素板の製造方法。 - 該カップホイールの内壁加工面にはダイヤモンド砥粒が電着形成されていることを特徴とする請求項1記載の円板形状水晶素板の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005102826A JP4260761B2 (ja) | 2005-03-31 | 2005-03-31 | 円板形状水晶素板の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005102826A JP4260761B2 (ja) | 2005-03-31 | 2005-03-31 | 円板形状水晶素板の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006281345A JP2006281345A (ja) | 2006-10-19 |
JP4260761B2 true JP4260761B2 (ja) | 2009-04-30 |
Family
ID=37403778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005102826A Expired - Fee Related JP4260761B2 (ja) | 2005-03-31 | 2005-03-31 | 円板形状水晶素板の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4260761B2 (ja) |
-
2005
- 2005-03-31 JP JP2005102826A patent/JP4260761B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2006281345A (ja) | 2006-10-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5020963B2 (ja) | 円盤状の切削工具及び切削装置 | |
US20030132811A1 (en) | Piezoelectric device and acousto-electric transducer and method for manufacturing the same | |
KR20150100696A (ko) | 복합 기판, 그 제법 및 탄성파 디바이스 | |
JPH10308645A (ja) | Atカット水晶振動子及びその製造方法 | |
JP4997780B2 (ja) | 圧電振動片の製造方法 | |
JP4260761B2 (ja) | 円板形状水晶素板の製造方法 | |
JP2007104042A (ja) | 水晶振動素子及びその製造方法 | |
Li et al. | A high-speed batch-mode ultrasonic machining technology for multi-level quartz crystal microstructures | |
JP2001053036A (ja) | ダイシングブレード及び圧電素板 | |
JP5823908B2 (ja) | ウエハー加工方法 | |
JP2000301447A (ja) | 水晶振動板の加工方法 | |
JP4706286B2 (ja) | 圧電振動片の製造方法、及びその製造装置 | |
JP3069366B2 (ja) | 水晶振動子の製造方法 | |
JP2012135043A (ja) | 振動片 | |
JP4525061B2 (ja) | 水晶ランバード原石及び水晶板の製造方法、並びに水晶ランバード原石 | |
JP4534482B2 (ja) | 水晶片の選定方法と、水晶振動片および水晶デバイスの製造方法 | |
JP6383164B2 (ja) | 圧電振動片の製造方法 | |
JPH09155854A (ja) | 圧電スペーサ、合成スペーサ、平板スペーサ及びこれらの製造方法並びにこれらを用いたマルチスライサ | |
US20210193502A1 (en) | Method of processing wafer | |
JP2003332870A (ja) | コンベックス状圧電板およびその圧電振動子の製造方法 | |
JPH06326551A (ja) | 貼付形圧電振動子とその製造方法 | |
JP2007158459A (ja) | 結晶板の切断方法 | |
JPS6322940B2 (ja) | ||
JPH0231526B2 (ja) | Bojoatsumisuberiatsudenshindoshioyobisonoseiho | |
JPH0818370A (ja) | 水晶振動子の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080327 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20081016 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20081104 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20081226 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090203 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090204 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120220 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120220 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130220 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130220 Year of fee payment: 4 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130220 Year of fee payment: 4 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140220 Year of fee payment: 5 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |