JP4250630B2 - 光素子及び光モジュール - Google Patents
光素子及び光モジュール Download PDFInfo
- Publication number
- JP4250630B2 JP4250630B2 JP2005515370A JP2005515370A JP4250630B2 JP 4250630 B2 JP4250630 B2 JP 4250630B2 JP 2005515370 A JP2005515370 A JP 2005515370A JP 2005515370 A JP2005515370 A JP 2005515370A JP 4250630 B2 JP4250630 B2 JP 4250630B2
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- JP
- Japan
- Prior art keywords
- light
- light receiving
- film
- optical element
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 91
- 239000000758 substrate Substances 0.000 claims description 51
- 229920005989 resin Polymers 0.000 claims description 36
- 239000011347 resin Substances 0.000 claims description 36
- 239000011248 coating agent Substances 0.000 claims description 27
- 238000000576 coating method Methods 0.000 claims description 27
- 230000006866 deterioration Effects 0.000 claims description 17
- 238000010030 laminating Methods 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 7
- 230000015556 catabolic process Effects 0.000 claims description 5
- 238000006731 degradation reaction Methods 0.000 claims description 5
- 239000011247 coating layer Substances 0.000 claims 2
- 239000013307 optical fiber Substances 0.000 description 46
- 230000010287 polarization Effects 0.000 description 23
- 239000011521 glass Substances 0.000 description 16
- 238000001514 detection method Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 11
- 238000012544 monitoring process Methods 0.000 description 11
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 239000010453 quartz Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02325—Optical elements or arrangements associated with the device the optical elements not being integrated nor being directly associated with the device
Description
Claims (6)
- 光透過性の基体(54)の表面に1以上の受光領域(28)が形成され、前記基体(54)の裏面側に少なくとも屈折率整合を目的とした樹脂(44)が形成され、前記基体(54)の裏面側に対して光(26)が斜め方向に入射される光素子であって、
前記基体(54)の裏面に特性劣化防止のコーティング膜(70)が形成され、
前記コーティング膜(70)は、前記樹脂(44)の存在による特性劣化を防止するための膜(76)と、反射防止用の多層膜(72)とが積層されて構成され、
前記樹脂(44)の存在による特性劣化を防止するための膜(76)は、耐湿用の膜であることを特徴とする光素子。 - 請求項1記載の光素子において、
前記コーティング膜(70)の端面に1以上の光遮蔽マスク(78)を有し、
前記光遮蔽マスク(78)は、前記コーティング膜(70)に対して斜めに入射する前記光(26)を考慮した位置に形成されていることを特徴とする光素子。 - 請求項1又は2記載の光素子において、
前記基体(54)に2以上の受光領域(28)が形成され、
前記受光領域(28)のそれぞれがアノード電極(92)とカソード電極(91)とを有することを特徴とする光素子。 - 請求項1〜3のいずれか1項に記載の光素子において、
前記基体(54)に2以上の受光領域(28)が形成され、
前記基体(54)は、前記受光領域(28)間にスリット(85)を有することを特徴とする光素子。 - 請求項1〜3のいずれか1項に記載の光素子において、
複数の前記基体(54A、54B、54C)がそれぞれ所定の間隔を置いて配列され、
前記各基体(54A、54B、54C)にそれぞれ1つの受光領域(28)が形成されていることを特徴とする光素子。 - 光分岐機能が設けられた1以上の光伝達手段(16)と、
前記光伝達手段(16)の上方で、かつ、前記光伝達手段(16)の少なくとも前記光分岐機能によって発生した分岐光(26)の光路上に樹脂(44)を介して固着された光素子(30)とを有する光モジュールにおいて、
前記光素子(30)は、光透過性の基体(54)と、該基体(54)の表面に形成された1以上の受光領域(28)と、前記基体(54)の裏面に形成された特性劣化防止のコーティング膜(70)とを有し、前記基体(54)の裏面側に対して光(26)が斜め方向に入射される光素子であって、
前記コーティング膜(70)は、前記樹脂(44)の存在による特性劣化を防止するための膜(76)と、反射防止用の多層膜(72)とが積層されて構成され、
前記樹脂(44)の存在による特性劣化を防止するための膜(76)は、耐湿用の膜であることを特徴とする光モジュール。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003380834 | 2003-11-11 | ||
JP2003380834 | 2003-11-11 | ||
PCT/JP2004/016752 WO2005045940A1 (ja) | 2003-11-11 | 2004-11-11 | 光素子及び光モジュール |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2005045940A1 JPWO2005045940A1 (ja) | 2007-05-24 |
JP4250630B2 true JP4250630B2 (ja) | 2009-04-08 |
Family
ID=34567251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005515370A Expired - Fee Related JP4250630B2 (ja) | 2003-11-11 | 2004-11-11 | 光素子及び光モジュール |
Country Status (3)
Country | Link |
---|---|
US (1) | US7324718B2 (ja) |
JP (1) | JP4250630B2 (ja) |
WO (1) | WO2005045940A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080243865A1 (en) * | 2007-03-28 | 2008-10-02 | Oracle International Corporation | Maintaining global state of distributed transaction managed by an external transaction manager for clustered database systems |
CN101755403B (zh) * | 2007-07-12 | 2013-06-19 | 艾迪株式会社 | 具有集成光功率监控器的光纤阵列单元 |
JP5485686B2 (ja) * | 2009-12-25 | 2014-05-07 | 株式会社エンプラス | レンズアレイおよびこれを備えた光モジュール |
EP2518550B1 (en) | 2009-12-22 | 2019-05-08 | Enplas Corporation | Lens array and optical module provided therewith |
JP5550353B2 (ja) * | 2010-01-08 | 2014-07-16 | 株式会社エンプラス | レンズアレイおよびこれを備えた光モジュール |
JP5299551B2 (ja) * | 2011-12-28 | 2013-09-25 | 日立電線株式会社 | 光基板、光基板の製造方法、及び光モジュール構造 |
JP2014194478A (ja) * | 2013-03-28 | 2014-10-09 | Fujitsu Optical Components Ltd | 光デバイスおよび送信機 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5070596A (en) * | 1988-05-18 | 1991-12-10 | Harris Corporation | Integrated circuits including photo-optical devices and pressure transducers and method of fabrication |
US5059787A (en) * | 1990-03-22 | 1991-10-22 | Northrop Corporation | High speed broadband silicon photodetector |
US5262633A (en) * | 1992-08-21 | 1993-11-16 | Santa Barbara Research Center | Wideband anti-reflection coating for indium antimonide photodetector device and method of forming the same |
JPH07104146A (ja) * | 1993-10-01 | 1995-04-21 | Ngk Insulators Ltd | 光部品の製造方法 |
DE4440976A1 (de) * | 1994-11-17 | 1996-05-23 | Ant Nachrichtentech | Optische Sende- und Empfangseinrichtung mit einem oberflächenemittierenden Laser |
JP2001264594A (ja) * | 1995-08-03 | 2001-09-26 | Matsushita Electric Ind Co Ltd | 光デバイスおよびその製造方法 |
EP0844503A4 (en) * | 1995-08-03 | 1999-01-13 | Matsushita Electric Ind Co Ltd | OPTICAL DEVICE AND MANUFACTURING METHOD |
KR100236432B1 (ko) * | 1996-07-31 | 1999-12-15 | 미야즈 쥰이치로 | 광학 편광기, 이의 제조 방법 및 광학 편광기 제조용 블레이드 |
DE19640003B4 (de) * | 1996-09-27 | 2005-07-07 | Siemens Ag | Halbleitervorrichtung und Verfahren zu dessen Herstellung |
JPH10300987A (ja) * | 1997-04-23 | 1998-11-13 | Fujitsu Ltd | 光ファイバアセンブリ、その製造方法、及び光ファイバアセンブリを用いたレセプタクル型光モジュール |
JP3419312B2 (ja) * | 1998-07-21 | 2003-06-23 | 住友電気工業株式会社 | 受光素子及び受光素子モジュール |
US6043550A (en) | 1997-09-03 | 2000-03-28 | Sumitomo Electric Industries, Ltd. | Photodiode and photodiode module |
JPH11274546A (ja) * | 1998-03-20 | 1999-10-08 | Oki Electric Ind Co Ltd | 半導体受光素子 |
JP2002050785A (ja) * | 2000-08-01 | 2002-02-15 | Sumitomo Electric Ind Ltd | 半導体受光素子 |
WO2003096095A1 (fr) * | 2002-05-09 | 2003-11-20 | Sumitomo Electric Industries, Ltd. | Dispositif optique |
-
2004
- 2004-11-11 JP JP2005515370A patent/JP4250630B2/ja not_active Expired - Fee Related
- 2004-11-11 WO PCT/JP2004/016752 patent/WO2005045940A1/ja active Application Filing
-
2006
- 2006-05-01 US US11/414,971 patent/US7324718B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20060198573A1 (en) | 2006-09-07 |
WO2005045940A1 (ja) | 2005-05-19 |
JPWO2005045940A1 (ja) | 2007-05-24 |
US7324718B2 (en) | 2008-01-29 |
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