JP4247282B2 - 圧電基板及びその製造方法 - Google Patents

圧電基板及びその製造方法 Download PDF

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Publication number
JP4247282B2
JP4247282B2 JP2007045045A JP2007045045A JP4247282B2 JP 4247282 B2 JP4247282 B2 JP 4247282B2 JP 2007045045 A JP2007045045 A JP 2007045045A JP 2007045045 A JP2007045045 A JP 2007045045A JP 4247282 B2 JP4247282 B2 JP 4247282B2
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Japan
Prior art keywords
film
piezoelectric substrate
substrate
main surface
base material
Prior art date
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JP2007045045A
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English (en)
Japanese (ja)
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JP2008054277A5 (enExample
JP2008054277A (ja
Inventor
登 田村
半 市川
剛 高畠
要 安田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tocalo Co Ltd
Koike Co Ltd
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Tocalo Co Ltd
Koike Co Ltd
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Application filed by Tocalo Co Ltd, Koike Co Ltd filed Critical Tocalo Co Ltd
Priority to JP2007045045A priority Critical patent/JP4247282B2/ja
Priority to US11/880,168 priority patent/US7569976B2/en
Priority to EP07014595.8A priority patent/EP1885062B1/en
Publication of JP2008054277A publication Critical patent/JP2008054277A/ja
Publication of JP2008054277A5 publication Critical patent/JP2008054277A5/ja
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Publication of JP4247282B2 publication Critical patent/JP4247282B2/ja
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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2007045045A 2006-07-27 2007-02-26 圧電基板及びその製造方法 Active JP4247282B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007045045A JP4247282B2 (ja) 2006-07-27 2007-02-26 圧電基板及びその製造方法
US11/880,168 US7569976B2 (en) 2006-07-27 2007-07-20 Piezo-electric substrate and manufacturing method of the same
EP07014595.8A EP1885062B1 (en) 2006-07-27 2007-07-25 Piezo-electric substrate and manufacturing method of the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006204740 2006-07-27
JP2007045045A JP4247282B2 (ja) 2006-07-27 2007-02-26 圧電基板及びその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008262370A Division JP4773495B2 (ja) 2006-07-27 2008-10-09 圧電素子の製造方法

Publications (3)

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JP2008054277A JP2008054277A (ja) 2008-03-06
JP2008054277A5 JP2008054277A5 (enExample) 2008-08-21
JP4247282B2 true JP4247282B2 (ja) 2009-04-02

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JP2007045045A Active JP4247282B2 (ja) 2006-07-27 2007-02-26 圧電基板及びその製造方法

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JP (1) JP4247282B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010007805A1 (ja) * 2008-07-17 2010-01-21 株式会社 村田製作所 分波器
JP2017216450A (ja) * 2016-05-30 2017-12-07 日東電工株式会社 圧電フィルム
JP6907026B2 (ja) * 2016-05-30 2021-07-21 日東電工株式会社 透明電極付き圧電フィルムおよび圧力センサ
JP7577559B2 (ja) * 2021-02-15 2024-11-05 太陽誘電株式会社 弾性波デバイス、ウエハ、フィルタおよびマルチプレクサ

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JP2008054277A (ja) 2008-03-06

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