JP4242945B2 - 半導体製造装置の群管理システムにおける測定データ加工方法 - Google Patents

半導体製造装置の群管理システムにおける測定データ加工方法 Download PDF

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Publication number
JP4242945B2
JP4242945B2 JP15777698A JP15777698A JP4242945B2 JP 4242945 B2 JP4242945 B2 JP 4242945B2 JP 15777698 A JP15777698 A JP 15777698A JP 15777698 A JP15777698 A JP 15777698A JP 4242945 B2 JP4242945 B2 JP 4242945B2
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Prior art keywords
measurement data
calculation formula
data
group management
management system
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Expired - Lifetime
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JP15777698A
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English (en)
Japanese (ja)
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JPH11354395A5 (https=
JPH11354395A (ja
Inventor
徹 林
雅美 大西
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Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
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Application filed by Hitachi Kokusai Electric Inc, Kokusai Denki Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP15777698A priority Critical patent/JP4242945B2/ja
Publication of JPH11354395A publication Critical patent/JPH11354395A/ja
Publication of JPH11354395A5 publication Critical patent/JPH11354395A5/ja
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  • Length Measuring Devices By Optical Means (AREA)
JP15777698A 1998-06-05 1998-06-05 半導体製造装置の群管理システムにおける測定データ加工方法 Expired - Lifetime JP4242945B2 (ja)

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Application Number Priority Date Filing Date Title
JP15777698A JP4242945B2 (ja) 1998-06-05 1998-06-05 半導体製造装置の群管理システムにおける測定データ加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15777698A JP4242945B2 (ja) 1998-06-05 1998-06-05 半導体製造装置の群管理システムにおける測定データ加工方法

Publications (3)

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JPH11354395A JPH11354395A (ja) 1999-12-24
JPH11354395A5 JPH11354395A5 (https=) 2005-09-15
JP4242945B2 true JP4242945B2 (ja) 2009-03-25

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JP15777698A Expired - Lifetime JP4242945B2 (ja) 1998-06-05 1998-06-05 半導体製造装置の群管理システムにおける測定データ加工方法

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5147097B2 (ja) 2006-05-09 2013-02-20 東京エレクトロン株式会社 サーバ装置、およびプログラム
JP4697879B2 (ja) 2006-05-09 2011-06-08 東京エレクトロン株式会社 サーバ装置、およびプログラム
JP4780715B2 (ja) 2006-08-01 2011-09-28 東京エレクトロン株式会社 サーバ装置およびプログラム
JP5273697B2 (ja) 2006-08-01 2013-08-28 東京エレクトロン株式会社 サーバ装置およびプログラム
JP5224759B2 (ja) * 2007-09-25 2013-07-03 大日本スクリーン製造株式会社 検査式作成支援システム、検査式作成支援方法、および検査式作成支援プログラム
JP6133164B2 (ja) 2013-08-12 2017-05-24 東京エレクトロン株式会社 群管理システム及びプログラム

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