JPH11354395A5 - - Google Patents

Info

Publication number
JPH11354395A5
JPH11354395A5 JP1998157776A JP15777698A JPH11354395A5 JP H11354395 A5 JPH11354395 A5 JP H11354395A5 JP 1998157776 A JP1998157776 A JP 1998157776A JP 15777698 A JP15777698 A JP 15777698A JP H11354395 A5 JPH11354395 A5 JP H11354395A5
Authority
JP
Japan
Prior art keywords
measurement data
calculation formula
registered
management system
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998157776A
Other languages
English (en)
Japanese (ja)
Other versions
JP4242945B2 (ja
JPH11354395A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP15777698A priority Critical patent/JP4242945B2/ja
Priority claimed from JP15777698A external-priority patent/JP4242945B2/ja
Publication of JPH11354395A publication Critical patent/JPH11354395A/ja
Publication of JPH11354395A5 publication Critical patent/JPH11354395A5/ja
Application granted granted Critical
Publication of JP4242945B2 publication Critical patent/JP4242945B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP15777698A 1998-06-05 1998-06-05 半導体製造装置の群管理システムにおける測定データ加工方法 Expired - Lifetime JP4242945B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15777698A JP4242945B2 (ja) 1998-06-05 1998-06-05 半導体製造装置の群管理システムにおける測定データ加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15777698A JP4242945B2 (ja) 1998-06-05 1998-06-05 半導体製造装置の群管理システムにおける測定データ加工方法

Publications (3)

Publication Number Publication Date
JPH11354395A JPH11354395A (ja) 1999-12-24
JPH11354395A5 true JPH11354395A5 (https=) 2005-09-15
JP4242945B2 JP4242945B2 (ja) 2009-03-25

Family

ID=15657053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15777698A Expired - Lifetime JP4242945B2 (ja) 1998-06-05 1998-06-05 半導体製造装置の群管理システムにおける測定データ加工方法

Country Status (1)

Country Link
JP (1) JP4242945B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5147097B2 (ja) 2006-05-09 2013-02-20 東京エレクトロン株式会社 サーバ装置、およびプログラム
JP4697879B2 (ja) 2006-05-09 2011-06-08 東京エレクトロン株式会社 サーバ装置、およびプログラム
JP4780715B2 (ja) 2006-08-01 2011-09-28 東京エレクトロン株式会社 サーバ装置およびプログラム
JP5273697B2 (ja) 2006-08-01 2013-08-28 東京エレクトロン株式会社 サーバ装置およびプログラム
JP5224759B2 (ja) * 2007-09-25 2013-07-03 大日本スクリーン製造株式会社 検査式作成支援システム、検査式作成支援方法、および検査式作成支援プログラム
JP6133164B2 (ja) 2013-08-12 2017-05-24 東京エレクトロン株式会社 群管理システム及びプログラム

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