JP4236612B2 - 電子部品の調整検査方法および装置 - Google Patents
電子部品の調整検査方法および装置 Download PDFInfo
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- JP4236612B2 JP4236612B2 JP2004170537A JP2004170537A JP4236612B2 JP 4236612 B2 JP4236612 B2 JP 4236612B2 JP 2004170537 A JP2004170537 A JP 2004170537A JP 2004170537 A JP2004170537 A JP 2004170537A JP 4236612 B2 JP4236612 B2 JP 4236612B2
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- 238000007689 inspection Methods 0.000 title claims description 75
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
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- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
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- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
Description
Claims (6)
- 電子部品の姿勢を所定角度に傾斜した状態で該電子部品の特性を調整検査する電子部品の調整検査装置において、前記電子部品の姿勢を垂直方向に回転する角度制御ユニットにて傾斜させ、
前記角度制御ユニットは垂直回転軸を中心に回転する構造になっており、該垂直回転軸を任意の角度に回転することにより、前記角度制御ユニット上に載置された前記電子部品の姿勢を任意の角度に傾斜する構造となっており、
前記角度制御ユニットには該角度制御ユニットとともに回転するコンタクトユニットが配されており、該コンタクトユニットが有する導電接触子を介して前記電子部品と計測器との間の電気的な接続を確保し、該電子部品の姿勢に対応する電気特性を測定する構造となっており、
前記導電接触子が前記電子部品を前記角度制御ユニットの該電子部品載置面に押し付けることで、前記電子部品の前記電子部品載置面に対する傾斜角度を規制する構造となっており、
前記角度制御ユニットには該角度制御ユニットとともに回転するセンタリングユニットが配されており、該センタリングユニットが有するセンタリング爪の当接面で前記電子部品の対向する側面を挟み込んで該電子部品の水平方向の角度を規制する構造となっており、
前記角度制御ユニットには該角度制御ユニットとともに回転する温度調節ユニットが配されており、該温度調節ユニットの表面が前記電子部品と直接的または該電子部品を搬送するキャリアを介して間接的に接触し、該電子部品の温度を所定温度に維持する構造となっていることを特徴とする電子部品の調整検査装置。 - 前記角度制御ユニットの前記垂直回転軸には該垂直回転軸と同芯で回転するロータリー継ぎ手が連結されており、該ロータリー継ぎ手を介して前記温度調節ユニットの発熱を放熱するための冷却液を外部から供給、回収する構造となっている請求項1に記載の電子部品の調整検査装置。
- 前記温度調節ユニットを配した前記角度制御ユニットが密閉容器内に配されており、該密閉容器内に乾燥ガスが充填可能となっている請求項1又は2に記載の電子部品の調整検査装置。
- 前記温度調節ユニットを配した前記角度制御ユニットが複数の温度条件に対応して温度条件の数だけ配されている請求項1、2又は3に記載の電子部品の調整検査装置。
- 前記温度調節ユニットを配した前記角度制御ユニットの前工程には予備温度調節ユニットが配されており、該予備温度調節ユニットの表面が前記電子部品と直接的または該電子部品を搬送するキャリアを介して間接的に接触し、該電子部品の温度を前記温度調節ユニットの温度に近づける構造となっている請求項1乃至4のいずれかに記載の電子部品の調整検査装置。
- 前記電子部品の搬送をキャリアにて行うことを特徴とした請求項1乃至5のいずれかに記載の電子部品の調整検査装置。
Priority Applications (1)
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JP2004170537A JP4236612B2 (ja) | 2004-05-13 | 2004-05-13 | 電子部品の調整検査方法および装置 |
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JP2004170537A JP4236612B2 (ja) | 2004-05-13 | 2004-05-13 | 電子部品の調整検査方法および装置 |
Related Child Applications (1)
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JP2006207899A Division JP4560016B2 (ja) | 2006-07-31 | 2006-07-31 | 電子部品の調整検査装置 |
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JP2005326384A JP2005326384A (ja) | 2005-11-24 |
JP4236612B2 true JP4236612B2 (ja) | 2009-03-11 |
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JP2004170537A Expired - Lifetime JP4236612B2 (ja) | 2004-05-13 | 2004-05-13 | 電子部品の調整検査方法および装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104101373A (zh) * | 2013-04-09 | 2014-10-15 | 飞思卡尔半导体公司 | 校准包含传感器的器件的方法及设备 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4675831B2 (ja) * | 2006-06-02 | 2011-04-27 | Okiセミコンダクタ株式会社 | 3軸加速度センサおよび3軸加速度センサの検査方法 |
JP4925223B2 (ja) * | 2008-12-22 | 2012-04-25 | パナソニック株式会社 | 検査装置 |
DE102009045291A1 (de) * | 2009-10-02 | 2011-04-07 | Ers Electronic Gmbh | Vorrichtung zur Konditionierung von Halbleiterchips und Testverfahren unter Verwendung der Vorrichtung |
US9365413B2 (en) | 2013-05-29 | 2016-06-14 | Freescale Semiconductor, Inc. | Transducer-including devices, and methods and apparatus for their calibration |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104101373A (zh) * | 2013-04-09 | 2014-10-15 | 飞思卡尔半导体公司 | 校准包含传感器的器件的方法及设备 |
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