JP4216454B2 - クリーンボックス停止機構を備えた半導体ウェーハ処理装置 - Google Patents

クリーンボックス停止機構を備えた半導体ウェーハ処理装置 Download PDF

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Publication number
JP4216454B2
JP4216454B2 JP2000348195A JP2000348195A JP4216454B2 JP 4216454 B2 JP4216454 B2 JP 4216454B2 JP 2000348195 A JP2000348195 A JP 2000348195A JP 2000348195 A JP2000348195 A JP 2000348195A JP 4216454 B2 JP4216454 B2 JP 4216454B2
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Japan
Prior art keywords
clean box
stopper
lid
housing
opening
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JP2000348195A
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Japanese (ja)
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JP2002151563A5 (enExample
JP2002151563A (ja
Inventor
勉 岡部
宏 五十嵐
俊彦 宮嶋
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TDK Corp
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TDK Corp
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Publication of JP2002151563A5 publication Critical patent/JP2002151563A5/ja
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2000348195A 2000-11-15 2000-11-15 クリーンボックス停止機構を備えた半導体ウェーハ処理装置 Expired - Lifetime JP4216454B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000348195A JP4216454B2 (ja) 2000-11-15 2000-11-15 クリーンボックス停止機構を備えた半導体ウェーハ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000348195A JP4216454B2 (ja) 2000-11-15 2000-11-15 クリーンボックス停止機構を備えた半導体ウェーハ処理装置

Related Child Applications (1)

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JP2003375594A Division JP2004140377A (ja) 2003-11-05 2003-11-05 クリーンボックス停止機構を備えた半導体ウェーハ処理装置

Publications (3)

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JP2002151563A JP2002151563A (ja) 2002-05-24
JP2002151563A5 JP2002151563A5 (enExample) 2004-11-04
JP4216454B2 true JP4216454B2 (ja) 2009-01-28

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ID=18821816

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Application Number Title Priority Date Filing Date
JP2000348195A Expired - Lifetime JP4216454B2 (ja) 2000-11-15 2000-11-15 クリーンボックス停止機構を備えた半導体ウェーハ処理装置

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JP (1) JP4216454B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7360985B2 (en) * 2002-12-30 2008-04-22 Tdk Corporation Wafer processing apparatus including clean box stopping mechanism
JP6024980B2 (ja) * 2012-10-31 2016-11-16 Tdk株式会社 ロードポートユニット及びｅｆｅｍシステム

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JP2002151563A (ja) 2002-05-24

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