JP2002151563A5 - - Google Patents

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Publication number
JP2002151563A5
JP2002151563A5 JP2000348195A JP2000348195A JP2002151563A5 JP 2002151563 A5 JP2002151563 A5 JP 2002151563A5 JP 2000348195 A JP2000348195 A JP 2000348195A JP 2000348195 A JP2000348195 A JP 2000348195A JP 2002151563 A5 JP2002151563 A5 JP 2002151563A5
Authority
JP
Japan
Prior art keywords
clean box
stopper
lid
movable member
box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000348195A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002151563A (ja
JP4216454B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000348195A priority Critical patent/JP4216454B2/ja
Priority claimed from JP2000348195A external-priority patent/JP4216454B2/ja
Publication of JP2002151563A publication Critical patent/JP2002151563A/ja
Publication of JP2002151563A5 publication Critical patent/JP2002151563A5/ja
Application granted granted Critical
Publication of JP4216454B2 publication Critical patent/JP4216454B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2000348195A 2000-11-15 2000-11-15 クリーンボックス停止機構を備えた半導体ウェーハ処理装置 Expired - Lifetime JP4216454B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000348195A JP4216454B2 (ja) 2000-11-15 2000-11-15 クリーンボックス停止機構を備えた半導体ウェーハ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000348195A JP4216454B2 (ja) 2000-11-15 2000-11-15 クリーンボックス停止機構を備えた半導体ウェーハ処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2003375594A Division JP2004140377A (ja) 2003-11-05 2003-11-05 クリーンボックス停止機構を備えた半導体ウェーハ処理装置

Publications (3)

Publication Number Publication Date
JP2002151563A JP2002151563A (ja) 2002-05-24
JP2002151563A5 true JP2002151563A5 (enExample) 2004-11-04
JP4216454B2 JP4216454B2 (ja) 2009-01-28

Family

ID=18821816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000348195A Expired - Lifetime JP4216454B2 (ja) 2000-11-15 2000-11-15 クリーンボックス停止機構を備えた半導体ウェーハ処理装置

Country Status (1)

Country Link
JP (1) JP4216454B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7360985B2 (en) * 2002-12-30 2008-04-22 Tdk Corporation Wafer processing apparatus including clean box stopping mechanism
JP6024980B2 (ja) * 2012-10-31 2016-11-16 Tdk株式会社 ロードポートユニット及びｅｆｅｍシステム

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