JP4213800B2 - 斜入射干渉計 - Google Patents

斜入射干渉計 Download PDF

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Publication number
JP4213800B2
JP4213800B2 JP34965198A JP34965198A JP4213800B2 JP 4213800 B2 JP4213800 B2 JP 4213800B2 JP 34965198 A JP34965198 A JP 34965198A JP 34965198 A JP34965198 A JP 34965198A JP 4213800 B2 JP4213800 B2 JP 4213800B2
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JP
Japan
Prior art keywords
laser light
light source
reference surface
measurement surface
interference fringes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP34965198A
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English (en)
Japanese (ja)
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JP2000171228A5 (https=
JP2000171228A (ja
Inventor
勝保 水野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidek Co Ltd
Original Assignee
Nidek Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidek Co Ltd filed Critical Nidek Co Ltd
Priority to JP34965198A priority Critical patent/JP4213800B2/ja
Priority to US09/456,481 priority patent/US6501552B1/en
Publication of JP2000171228A publication Critical patent/JP2000171228A/ja
Publication of JP2000171228A5 publication Critical patent/JP2000171228A5/ja
Application granted granted Critical
Publication of JP4213800B2 publication Critical patent/JP4213800B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02059—Reducing effect of parasitic reflections, e.g. cyclic errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02058—Passive reduction of errors by particular optical compensation or alignment elements, e.g. dispersion compensation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP34965198A 1998-12-09 1998-12-09 斜入射干渉計 Expired - Fee Related JP4213800B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP34965198A JP4213800B2 (ja) 1998-12-09 1998-12-09 斜入射干渉計
US09/456,481 US6501552B1 (en) 1998-12-09 1999-12-07 Oblique incidence interferometer for removing higher-order interference fringes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34965198A JP4213800B2 (ja) 1998-12-09 1998-12-09 斜入射干渉計

Publications (3)

Publication Number Publication Date
JP2000171228A JP2000171228A (ja) 2000-06-23
JP2000171228A5 JP2000171228A5 (https=) 2006-01-19
JP4213800B2 true JP4213800B2 (ja) 2009-01-21

Family

ID=18405186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34965198A Expired - Fee Related JP4213800B2 (ja) 1998-12-09 1998-12-09 斜入射干渉計

Country Status (2)

Country Link
US (1) US6501552B1 (https=)
JP (1) JP4213800B2 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7057741B1 (en) 1999-06-18 2006-06-06 Kla-Tencor Corporation Reduced coherence symmetric grazing incidence differential interferometer
JP2001194132A (ja) * 2000-01-11 2001-07-19 Fuji Photo Optical Co Ltd 斜入射干渉計用光学系およびこれを用いた装置
SG113399A1 (en) * 2000-12-27 2005-08-29 Semiconductor Energy Lab Laser annealing method and semiconductor device fabricating method
JP2005049317A (ja) * 2003-07-31 2005-02-24 Nidek Co Ltd 干渉計
JP5029036B2 (ja) * 2007-01-25 2012-09-19 住友電気工業株式会社 光源装置およびスペクトル分析装置
TWI486550B (zh) * 2014-01-20 2015-06-01 Nat Univ Tsing Hua 厚度線上即時檢測之光學干涉裝置及其方法
KR20220118061A (ko) * 2021-02-18 2022-08-25 삼성전자주식회사 글래스기판의 두께를 측정하기 위한 장치 및 그 제어방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4325637A (en) * 1980-06-02 1982-04-20 Tropel, Inc. Phase modulation of grazing incidence interferometer
JPS60209106A (ja) * 1984-03-31 1985-10-21 Konishiroku Photo Ind Co Ltd 平面度検査装置
US5532821A (en) * 1995-03-16 1996-07-02 Tropel Corporation Testing of recessed surfaces at grazing incidence
JP3939028B2 (ja) * 1998-06-30 2007-06-27 株式会社ニデック 斜入射干渉計

Also Published As

Publication number Publication date
US6501552B1 (en) 2002-12-31
JP2000171228A (ja) 2000-06-23

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