JP4202979B2 - Plating jig dryer - Google Patents

Description

  The present invention relates to a plating jig drying apparatus suitable for cleaning and drying a plating jig after plating on the surface of a wafer or the like.

  In general, copper plating is applied to the surface of a wafer or the like on which a semiconductor or the like is implemented.

  In order to perform copper plating on the surface of the wafer, the wafer surface is plated by setting the wafer on a plating jig and sinking the entire plating jig in the plating tank.

  After the plating is completed, the plating jig is decomposed into a plurality of parts, washed with water, dried and reused again.

  Cleaning and drying of the plating jig are performed by disassembling the plating jig into a plurality of pieces, and then hand-washing them one by one. The plating jig is dried by spraying high-pressure air using a commercially available air gun to blow off water droplets adhering to the surface.

  Cleaning and drying of conventional plating jigs is time consuming due to manual work, and there are problems such as unevenness in cleaning after completion of work by the operator, and water droplets blown off during drying. I was holding.

  Therefore, an object of the present invention is to provide a plating jig drying apparatus that can efficiently and reliably perform cleaning and drying of a disassembled plating jig.

  In order to achieve the above object, in the present invention, in the drying apparatus main body, the plating jig is disassembled into a plurality of parts, and the disassembled decomposition plating jig is supported in a vertically placed state, A cleaning water spray nozzle that is disposed on both surfaces of the vertical decomposition plating jig and sprays cleaning water on both surfaces thereof, and after the cleaning by the cleaning water injection nozzle is completed, dry air is sprayed on both surfaces of the decomposition plating jig. And a lifting / lowering device that moves the cleaning water spray nozzle and the dry wind spray nozzle up and down along the decomposition plating jig.

  According to the present invention, the disassembled decomposition plating jig can be correctly set and supported by the support member in a vertically placed state. Further, the cleaning water can be reliably applied to the both surfaces of the decomposition plating jig supported vertically by the cleaning water jet nozzle from the top to the bottom. In addition, it is possible to reliably apply the dry air from the top to the bottom by the dry air spray nozzle after the completion of the cleaning, and it is possible to clean the decomposition plating jig quickly and reliably over the entire area surface.

  First, the support member is arranged in a U-shaped cross-section guide rail with the upper part opened to support both ends of the decomposition plating jig while being disposed oppositely, and both sides of the decomposition plating jig are securely attached. It is possible to support both ends in the exposed state.

  Secondly, the supporting members arranged opposite to each other are arranged in parallel with a lifting space in which the washing water spray nozzle and the drying wind spray nozzle move up and down to form a compact layout structure.

  Third, the washing water spray nozzle and the dry air spray nozzle are formed in a hollow pipe shape having a plurality of spray ports provided on the peripheral surface, and one end of the cleaning water spray nozzle and the dry air spray nozzle The ends are fixedly supported on the driven lifting body of the lifting device, and the strength member is connected to the driving lifting body and the driven lifting body.

  Hereinafter, embodiments of the present invention will be described in detail with reference to FIGS. 1 and 7.

  FIG. 1 is a schematic cut front view of a plating jig drying apparatus according to the present invention. FIG. 2 shows a schematic cut side view of the plating jig drying apparatus.

  The plating jig drying apparatus 1 includes a pair of opposing support members 5, a washing water spray nozzle 7, a drying air spray nozzle 9, and a lifting device 11 in the drying apparatus main body 3.

  The main body case of the drying apparatus main body 3 is formed in a box shape with the upper side opened by the bottom surface and the four-side wall surface, and is supported by the support legs 13. The central portion serving as the upper opening is a loading / unloading opening 15. The opening / closing opening 15 can be opened and closed with the handle 19 as shown in FIG. 21.

  As shown in FIGS. 5 to 7, the support member 5 is disassembled when the plating jig 23 is disassembled into the wafer back plate guide G-1, the holder guide G-2, and the back plate guide G-3. The first, second, and third decomposition plating jigs G-1, G-2, and G-3 are both supported in a vertically placed state.

  FIG. 4 shows the arrangement state of the support members 5, from the left side, the support member 5 for the first decomposition plating jig G-1, the support member 5 for the second decomposition plating jig G-2, and the third. This is a support member 5 for the decomposition plating jig G-3.

  Each support member 5 is disposed opposite to each other by a reinforcing plate 5a, and both ends of first, second, and third decomposition plating jigs G-1, G-2, and G-3 having different sizes are vertically arranged. The guide rail 5b is an inwardly U-shaped cross-sectional guide rail that is supported in a standing state and is open at the top so that the entire surface of both sides is greatly exposed except for the support areas at both ends.

  The upper part of the guide rail 5b is an insertion slot into which the decomposition plating jigs G-1, G-2, G-3 are dropped from above. A pair of left and right guide plates 5c are provided on the left and right sides of the insertion opening to guide the insertion opening. The space between the support member 4 and the support member 5 is set to a dimension in which an elevating space d in which the washing water spray nozzle 7 and the drying air spray nozzle 9 can be moved up and down is secured, and the arrangement is arranged in a compact manner. It has a structure.

  The washing water spray nozzle 7 and the dry wind spray nozzle 9 are arranged in a vertical relationship and have a shape of a hollow pipe 7a that is long on the left and right, and a shape in which a plurality of spray ports 7b are provided on the outer periphery thereof.

  The cleaning water spray nozzle 7 communicates with a cleaning water tank (not shown), and when the cleaning water descends, for example, cleaning water such as pure water is sprayed to both surfaces of each of the decomposition plating jigs G-1, G-2, and G-3. It is injected from 7b.

  The dry air injection nozzle 9 communicates with an air compressor (not shown), and after the cleaning by the cleaning water injection nozzle 7 is completed, the high-pressure air is moved down to the respective decomposition plating jigs G-1, G-2, G-3. Are ejected from the ejection port 9b toward both sides.

  In this case, since the washing water injection nozzle 7 and the drying air injection nozzle 9 have the same shape, one is provided independently, and switching control is performed so that the washing water or the drying air is injected by the switching valve. It is also possible to use one type of injection nozzle.

  The lifting device 11 has a structure composed of a driving lifting body 25 and a driven lifting body 27. The driving lift body 25 is arranged in a vertically rising / lowering tower 29, and can be lifted (arrow A in FIG. 1) by supplying air to the lift intake 31a of the drive cylinder 31. Further, the air can be lowered (arrow B in FIG. 1) by supplying air to the descending inlet 31b.

  The follower lifting body 27 is mounted and supported by a slider 37 that slides up and down along a guide rail 35 disposed in a vertically rising and lowering tower 33.

  Under the driving lift body 25 and the driven lift body 27, both ends of the washing water spray nozzle 7 and the dry wind spray nozzle 9 formed in the hollow pipes 7a and 9a are fixedly supported.

  Accordingly, the cleaning water spray nozzle 7 and the dry wind spray nozzle 9 function as strength members that connect the driving lift body 25 and the driven lift body 27, and the driven lift body 27 is for driving while reducing the number of parts. Corresponding to the vertical movement of the lifting body 25, it is possible to move up and down simultaneously.

  According to the plating jig drying apparatus 1 configured as described above, the disassembled first, second, and third decomposition plating jigs G-1, G-2, and G-3 are set on the respective support members 5. Then, after the cleaning by the cleaning water spray nozzle 7 is completed, the first, second, and third decomposition plating jigs G-1 and G- that are supported in the vertical orientation are sprayed by spraying the dry wind from the dry wind spray nozzle 9. 2. Washing water and drying air can be reliably applied to the entire area from the top to the bottom of both sides of G and G-3. As a result, the first, second, and third decomposition plating jigs G-1, G- can be finished reliably and quickly without causing water droplets or the like to scatter around the four circumferences, and have a fine finish. 2, G-3 is obtained.

  In addition, it becomes possible to process many plating jigs 23 at once by setting it as the large sized plating jig drying apparatus provided with many supporting members 5. FIG.

The outline cutting front view of the plating jig drying device concerning the present invention. An outline cut side view of a plating jig drying device. The outline cutting top view of a plating jig drying device. The outline explanatory view which looked at the support member from the plane. The general | schematic top view of the whole plating jig | tool. AA line sectional view of Drawing 5. The schematic exploded view of the decomposition plating jig decomposed into three.

Explanation of symbols

DESCRIPTION OF SYMBOLS 3 ... Drying apparatus main body 5 ... Support member 5b ... Guide rail 7 ... Washing water injection nozzle 9 ... Drying-air injection nozzle 11 ... Lifting device 25 ... Lifting body 27 for driving ... Lifting body G-1, G-2, G for driven -3 1st, 2nd, 3rd decomposition plating jig d ... Elevating space

Claims (4)

  In the drying apparatus main body, the plating jig is disassembled into a plurality of parts, and the disassembled decomposition plating jigs are respectively arranged on both sides of the vertical disassembly plating jig, and a support member for supporting the disassembled decomposition plating jigs in a vertically placed state. A cleaning water spray nozzle that sprays cleaning water on both surfaces, a drying air spray nozzle that sprays drying air on both surfaces of the decomposition plating jig after the cleaning by the cleaning water spray nozzle is completed, and the cleaning water spray nozzle and the drying air A plating jig drying apparatus, comprising: an elevating device that moves the spray nozzle up and down along the decomposition plating jig.   2. The guide member according to claim 1, wherein the support member is an opposing U-shaped cross-section guide rail that is disposed to face and supports both ends of the decomposition plating jig. Plating jig drying device.   The said support member arrange | positioned facing has a raising / lowering space for a washing water injection nozzle and a drying wind injection nozzle to move up and down, and is arrange | positioned in parallel. Plating jig drying device.   The washing water spray nozzle and the dry wind spray nozzle are in the shape of a hollow pipe with a plurality of spray ports provided on the peripheral surface, one end of which is the drive lift body of the lift device, and the other end is driven by the lift device. The plating jig drying apparatus according to claim 1, wherein the plating jig drying device is fixedly supported by the lifting / lowering body and is a strength member connecting the driving lifting / lowering body and the driven lifting / lowering body.

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