JP4158227B2 - 微小凹凸の検査方法および検査装置 - Google Patents

微小凹凸の検査方法および検査装置 Download PDF

Info

Publication number
JP4158227B2
JP4158227B2 JP13264398A JP13264398A JP4158227B2 JP 4158227 B2 JP4158227 B2 JP 4158227B2 JP 13264398 A JP13264398 A JP 13264398A JP 13264398 A JP13264398 A JP 13264398A JP 4158227 B2 JP4158227 B2 JP 4158227B2
Authority
JP
Japan
Prior art keywords
light
light source
test object
image
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP13264398A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11311510A (ja
JPH11311510A5 (enExample
Inventor
信 楜澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP13264398A priority Critical patent/JP4158227B2/ja
Publication of JPH11311510A publication Critical patent/JPH11311510A/ja
Publication of JPH11311510A5 publication Critical patent/JPH11311510A5/ja
Application granted granted Critical
Publication of JP4158227B2 publication Critical patent/JP4158227B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP13264398A 1998-04-27 1998-04-27 微小凹凸の検査方法および検査装置 Expired - Fee Related JP4158227B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13264398A JP4158227B2 (ja) 1998-04-27 1998-04-27 微小凹凸の検査方法および検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13264398A JP4158227B2 (ja) 1998-04-27 1998-04-27 微小凹凸の検査方法および検査装置

Publications (3)

Publication Number Publication Date
JPH11311510A JPH11311510A (ja) 1999-11-09
JPH11311510A5 JPH11311510A5 (enExample) 2005-09-22
JP4158227B2 true JP4158227B2 (ja) 2008-10-01

Family

ID=15086129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13264398A Expired - Fee Related JP4158227B2 (ja) 1998-04-27 1998-04-27 微小凹凸の検査方法および検査装置

Country Status (1)

Country Link
JP (1) JP4158227B2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10122313A1 (de) * 2001-05-08 2002-11-21 Wolfgang P Weinhold Verfahren und Vorrichtung zur berührungsfreien Untersuchung eines Gegenstandes, insbesondere hinsichtlich dessen Oberflächengestalt
JP4575202B2 (ja) * 2005-03-24 2010-11-04 日本板硝子株式会社 透明板状体の欠点検査方法及び欠点検査装置
JP2007271510A (ja) * 2006-03-31 2007-10-18 Tsubakimoto Chain Co 外観検査方法及び外観検査装置
US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate
JP4960161B2 (ja) * 2006-10-11 2012-06-27 日東電工株式会社 検査データ処理装置及び検査データ処理方法
KR101249168B1 (ko) 2009-12-18 2013-03-29 주식회사 포스코 냉간압연에서의 품질이상 예지 시스템과 그 방법
JP5768224B2 (ja) * 2010-03-26 2015-08-26 パナソニックＩｐマネジメント株式会社 欠陥検出装置および欠陥検出方法
JP2014145656A (ja) * 2013-01-29 2014-08-14 Nikka Kk 微粒子付着状態可視化方法、および微粒子付着状態可視化装置
EP3561447B1 (en) * 2017-01-25 2023-11-22 National Institute of Advanced Industrial Science and Technology Image processing method
JP7110777B2 (ja) * 2017-07-20 2022-08-02 日立金属株式会社 金属薄板検査装置および金属薄板の検査方法
JP7135297B2 (ja) * 2017-10-27 2022-09-13 株式会社ニコン 検査装置、検査システム、および検査方法
CN110672621B (zh) * 2019-10-10 2021-03-05 清华大学 基于光照亮度调整的汽车涂装表面缺陷图像质量优化方法
JP7634343B2 (ja) * 2020-01-15 2025-02-21 株式会社Uacj 検査方法、検査装置および圧延装置の制御方法
CN111351795A (zh) * 2020-02-27 2020-06-30 杨孝兰 一种基于特殊结构光的镜面物体及透明物体检测方法
CN111443040A (zh) * 2020-05-14 2020-07-24 成都德图福思科技有限公司 反光透光复合材料表面激光打码蚀痕的成像系统及方法
JP7390278B2 (ja) * 2020-12-16 2023-12-01 株式会社日立ハイテクソリューションズ 外観検査方法、外観検査装置、構造体に対する加工方法および装置

Also Published As

Publication number Publication date
JPH11311510A (ja) 1999-11-09

Similar Documents

Publication Publication Date Title
JP4158227B2 (ja) 微小凹凸の検査方法および検査装置
JP4147682B2 (ja) 被検物の欠点検査方法および検査装置
US7105848B2 (en) Dual level out-of-focus light source for amplification of defects on a surface
TWI408360B (zh) 玻璃表面的異物檢查裝置及檢查方法
EP0930498A2 (en) Inspection apparatus and method for detecting defects
JP4511978B2 (ja) 表面疵検査装置
JP3021266B2 (ja) 光学式鋼板表面検査装置
JP2012078144A (ja) 透明体シート状物の表面欠陥検査装置
JPH06294749A (ja) 板ガラスの欠点検査方法
JPH10148619A (ja) 検査基体の面欠陥検査方法及び装置
JP2006138830A (ja) 表面欠陥検査装置
JP2003065966A (ja) フィルムに対する異物検査方法およびその装置
JPH11316195A (ja) 透明板の表面欠陥検出装置
JP2002039952A (ja) 欠陥検査装置および欠陥検査方法
JP2006017685A (ja) 表面欠陥検査装置
KR20180136421A (ko) 결함 검출 시스템 및 방법
JP2007218889A (ja) 表面欠陥検出方法および表面欠陥検出装置
JPH08178855A (ja) 透光性物体あるいは鏡面性物体の検査方法
JPH11248643A (ja) 透明フィルムの異物検査装置
JP2001124538A (ja) 物体表面の欠陥検査方法および欠陥検査装置
JP3078784B2 (ja) 欠陥検査装置
JPH0711414B2 (ja) ガラスびんの偏肉検査方法
JP3222727B2 (ja) 光学部材検査装置
JPH0311403B2 (enExample)
JPH09113465A (ja) 亜鉛メッキ系鋼板用表面欠陥検出装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050411

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050411

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060922

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070320

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070507

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20071113

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080115

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080219

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080306

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080624

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080707

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110725

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110725

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120725

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120725

Year of fee payment: 4

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120725

Year of fee payment: 4

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120725

Year of fee payment: 4

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130725

Year of fee payment: 5

LAPS Cancellation because of no payment of annual fees