JP4151251B2 - 駆動装置 - Google Patents
駆動装置 Download PDFInfo
- Publication number
- JP4151251B2 JP4151251B2 JP2001282191A JP2001282191A JP4151251B2 JP 4151251 B2 JP4151251 B2 JP 4151251B2 JP 2001282191 A JP2001282191 A JP 2001282191A JP 2001282191 A JP2001282191 A JP 2001282191A JP 4151251 B2 JP4151251 B2 JP 4151251B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrating body
- support portion
- drive device
- driving device
- arm portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003014 reinforcing effect Effects 0.000 claims description 24
- 239000007769 metal material Substances 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 description 27
- 238000005452 bending Methods 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 13
- 239000000758 substrate Substances 0.000 description 10
- 230000007423 decrease Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 239000013013 elastic material Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Images
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001282191A JP4151251B2 (ja) | 2001-09-17 | 2001-09-17 | 駆動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001282191A JP4151251B2 (ja) | 2001-09-17 | 2001-09-17 | 駆動装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003090283A JP2003090283A (ja) | 2003-03-28 |
| JP2003090283A5 JP2003090283A5 (enrdf_load_stackoverflow) | 2004-12-16 |
| JP4151251B2 true JP4151251B2 (ja) | 2008-09-17 |
Family
ID=19105874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001282191A Expired - Fee Related JP4151251B2 (ja) | 2001-09-17 | 2001-09-17 | 駆動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4151251B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007037242A (ja) * | 2005-07-25 | 2007-02-08 | Seiko Epson Corp | 圧電アクチュエータ、および電子機器 |
| JP2013206914A (ja) * | 2012-03-27 | 2013-10-07 | Seiko Epson Corp | 力検出素子、力検出モジュール及びロボット |
-
2001
- 2001-09-17 JP JP2001282191A patent/JP4151251B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003090283A (ja) | 2003-03-28 |
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