JP4091049B2 - 静電気放電防止機能を有する窒化物半導体発光素子 - Google Patents
静電気放電防止機能を有する窒化物半導体発光素子 Download PDFInfo
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- JP4091049B2 JP4091049B2 JP2005014518A JP2005014518A JP4091049B2 JP 4091049 B2 JP4091049 B2 JP 4091049B2 JP 2005014518 A JP2005014518 A JP 2005014518A JP 2005014518 A JP2005014518 A JP 2005014518A JP 4091049 B2 JP4091049 B2 JP 4091049B2
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- nitride semiconductor
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- 239000004065 semiconductor Substances 0.000 title claims description 190
- 150000004767 nitrides Chemical class 0.000 title claims description 189
- 230000002265 prevention Effects 0.000 title 1
- 239000000758 substrate Substances 0.000 claims description 34
- 239000000463 material Substances 0.000 claims description 19
- 238000002955 isolation Methods 0.000 claims description 11
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- 229910052741 iridium Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 153
- 238000000034 method Methods 0.000 description 20
- 230000003068 static effect Effects 0.000 description 14
- 230000008569 process Effects 0.000 description 12
- 230000005611 electricity Effects 0.000 description 11
- 238000007740 vapor deposition Methods 0.000 description 8
- 230000015556 catabolic process Effects 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 229910052594 sapphire Inorganic materials 0.000 description 5
- 239000010980 sapphire Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910002704 AlGaN Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05568—Disposition the whole external layer protruding from the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05573—Single external layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Led Devices (AREA)
- Led Device Packages (AREA)
Description
A 第1領域
B 第2領域
21、31 基板
23、33 n型窒化物半導体層
24a、24b、34a、34b 活性層
25a、25b、35a、35b p型窒化物半導体層
26、36 絶縁性アイソレーション
27、37 オーミックコンタクト層
28a、38a p側電極
28b、38b n側電極
Claims (7)
- 基板上に形成されたn型窒化物半導体層と、
上記n型窒化物半導体層上に順次に形成され、絶縁性アイソレーションにより第1領域と第2領域とに分離された活性層及びp型窒化物半導体層と、
上記第1領域のp型窒化物半導体層上に形成されたオーミックコンタクト層と、
上記オーミックコンタクト層上に形成され上記第2領域のp型窒化物半導体層上に延長されたp側電極と、
上記p側電極と離隔し上記第2領域のp型窒化物半導体上に形成され、上記第2領域のp型窒化物半導体層と活性層を貫通して上記n型窒化物半導体層に接続されたn側電極と、
を含む窒化物半導体発光素子。 - 上記p側電極の仕事関数は上記p型窒化物半導体層の仕事関数より小さいことを特徴とする請求項1に記載の窒化物半導体発光素子。
- 上記p側電極はTi、Cr、Al、Cu及びAuの群から選ばれた物質であることを特徴とする請求項1または2に記載の窒化物半導体発光素子。
- 上記第2領域のp型窒化物半導体層と上記p側電極の間に追加的に形成されたn型窒化物半導体層をさらに含むことを特徴とする請求項1に記載の窒化物半導体発光素子。
- 上記追加的に形成されたn型窒化物半導体層は50nmないし200nmの厚さを有することを特徴とする請求項4に記載の窒化物半導体発光素子。
- 上記オーミックコンタクト層の反射率は70%以上であることを特徴とする請求項1に記載の窒化物半導体発光素子。
- 上記オーミックコンタクト層はAg、Ni、Al、Rh、Pd、Ir、Ru、Mg、Zn、Pt、Au及びその組合の群から選ばれた物質から成る少なくとも一つの層を含むことを特徴とする請求項1に記載の窒化物半導体発光素子。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20040074656A KR100576872B1 (ko) | 2004-09-17 | 2004-09-17 | 정전기 방전 방지기능을 갖는 질화물 반도체 발광소자 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006086489A JP2006086489A (ja) | 2006-03-30 |
JP4091049B2 true JP4091049B2 (ja) | 2008-05-28 |
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Application Number | Title | Priority Date | Filing Date |
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JP2005014518A Active JP4091049B2 (ja) | 2004-09-17 | 2005-01-21 | 静電気放電防止機能を有する窒化物半導体発光素子 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7173288B2 (ja) |
JP (1) | JP4091049B2 (ja) |
KR (1) | KR100576872B1 (ja) |
Families Citing this family (65)
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CN113363359A (zh) * | 2021-06-09 | 2021-09-07 | 泉州三安半导体科技有限公司 | 一种倒装发光二极管 |
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US5914501A (en) * | 1998-08-27 | 1999-06-22 | Hewlett-Packard Company | Light emitting diode assembly having integrated electrostatic discharge protection |
JP2000208822A (ja) * | 1999-01-11 | 2000-07-28 | Matsushita Electronics Industry Corp | 半導体発光装置 |
TW492202B (en) * | 2001-06-05 | 2002-06-21 | South Epitaxy Corp | Structure of III-V light emitting diode (LED) arranged in flip chip configuration having structure for preventing electrostatic discharge |
TW545698U (en) * | 2001-12-28 | 2003-08-01 | United Epitaxy Co Ltd | LED packaging structure with a static charge protecting device |
KR100497121B1 (ko) * | 2002-07-18 | 2005-06-28 | 삼성전기주식회사 | 반도체 led 소자 |
TWI229463B (en) * | 2004-02-02 | 2005-03-11 | South Epitaxy Corp | Light-emitting diode structure with electro-static discharge protection |
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TWI260795B (en) * | 2004-03-22 | 2006-08-21 | South Epitaxy Corp | Flip chip type- light emitting diode package |
US7064353B2 (en) * | 2004-05-26 | 2006-06-20 | Philips Lumileds Lighting Company, Llc | LED chip with integrated fast switching diode for ESD protection |
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US20060060880A1 (en) | 2006-03-23 |
US7173288B2 (en) | 2007-02-06 |
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