JP4087146B2 - 形状測定方法及び形状測定装置 - Google Patents

形状測定方法及び形状測定装置 Download PDF

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Publication number
JP4087146B2
JP4087146B2 JP2002127753A JP2002127753A JP4087146B2 JP 4087146 B2 JP4087146 B2 JP 4087146B2 JP 2002127753 A JP2002127753 A JP 2002127753A JP 2002127753 A JP2002127753 A JP 2002127753A JP 4087146 B2 JP4087146 B2 JP 4087146B2
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Japan
Prior art keywords
moire
test object
area sensor
fringe
dimensional area
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Expired - Fee Related
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JP2002127753A
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English (en)
Japanese (ja)
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JP2003322516A (ja
JP2003322516A5 (enExample
Inventor
照己 鎌田
隆二 崎田
攻 中山
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Ricoh Co Ltd
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Ricoh Co Ltd
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Priority to JP2002127753A priority Critical patent/JP4087146B2/ja
Publication of JP2003322516A publication Critical patent/JP2003322516A/ja
Publication of JP2003322516A5 publication Critical patent/JP2003322516A5/ja
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Publication of JP4087146B2 publication Critical patent/JP4087146B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2002127753A 2002-04-30 2002-04-30 形状測定方法及び形状測定装置 Expired - Fee Related JP4087146B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002127753A JP4087146B2 (ja) 2002-04-30 2002-04-30 形状測定方法及び形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002127753A JP4087146B2 (ja) 2002-04-30 2002-04-30 形状測定方法及び形状測定装置

Publications (3)

Publication Number Publication Date
JP2003322516A JP2003322516A (ja) 2003-11-14
JP2003322516A5 JP2003322516A5 (enExample) 2005-08-25
JP4087146B2 true JP4087146B2 (ja) 2008-05-21

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JP2002127753A Expired - Fee Related JP4087146B2 (ja) 2002-04-30 2002-04-30 形状測定方法及び形状測定装置

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JP (1) JP4087146B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4675011B2 (ja) * 2001-09-25 2011-04-20 株式会社リコー 形状測定方法および形状測定装置
US7508529B2 (en) * 2006-07-31 2009-03-24 Mitutoyo Corporation Multi-range non-contact probe
JP5194529B2 (ja) * 2007-04-06 2013-05-08 新日鐵住金株式会社 表面欠陥検査システム、方法及びプログラム
DK2851677T3 (da) * 2013-09-23 2020-05-11 Gerresheimer Buende Gmbh Flerlinje-skanningsteknik
CN105044048B (zh) * 2015-07-01 2018-01-05 武汉科技大学 一种小型轧辊表面探伤装置及方法
CN112859189B (zh) * 2020-12-31 2024-08-02 广东美的白色家电技术创新中心有限公司 工件检测装置、检测方法以及计算机可读存储介质
JP7606392B2 (ja) * 2021-04-02 2024-12-25 株式会社キーエンス 三次元形状測定装置
JP7587461B2 (ja) 2021-04-02 2024-11-20 株式会社キーエンス 三次元形状測定装置
CN114757917B (zh) * 2022-04-08 2024-04-16 湘潭大学 一种高精度的轴偏移、偏转测量及其修正方法
CN117364584B (zh) * 2023-12-05 2024-02-23 山西晋北高速公路养护有限公司 一种沥青面层施工质量无损检测装置

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JP2003322516A (ja) 2003-11-14

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