JP4075745B2 - Composite structure manufacturing equipment - Google Patents

Description

  The present invention relates to a composite structure manufacturing apparatus in which an aerosol in which fine particles of a brittle material are dispersed in a gas is sprayed onto a substrate to form a structure made of the constituent material of the fine particles on the substrate.

  As a method for forming a brittle material structure on the surface of a substrate, a technique called an aerosol deposition method has been recognized. This is because an aerosol in which fine particles such as brittle materials are dispersed in a gas is sprayed from the nozzle toward the base material, and the fine particles collide with the base material such as metal, glass, ceramics, plastic, etc. It is characterized in that the fine particles are deformed and crushed and joined together to directly form the structure made of the constituent material of the fine particles on the base material, and the structure can be formed at room temperature that does not particularly require heating means. It is possible to obtain a structure having mechanical strength equivalent to that of the fired body. The apparatus used in this method basically consists of an aerosol generator for generating aerosol and a nozzle for injecting the aerosol toward the base material. When a structure is produced with a larger area than the opening of the nozzle, In addition, it has a position control means that moves and swings the base material and the nozzle relative to each other, and has a chamber and a vacuum pump for forming a structure when producing under reduced pressure, and also generates aerosol It is common to have a gas source.

  The process temperature of the aerosol deposition method is room temperature, and one feature is that the structure is formed at a temperature sufficiently lower than the melting point of the particulate material, that is, several hundred degrees C. or less.

  In addition, the fine particles used are mainly brittle materials such as ceramics and semiconductors, and fine particles of the same material can be used alone or mixed, and different fine particles of brittle material can be mixed or used in combination. Is possible. Further, it is also possible to mix a part of a metal material or an organic material with brittle material fine particles or to coat the surface of brittle material fine particles. Even in these cases, the main component of structure formation is a brittle material.

  In the structure formed by this method, when crystalline brittle material fine particles are used as a raw material, the brittle material portion of the structure is a polycrystalline body whose crystallite size is smaller than that of the raw material fine particles, and the crystal In many cases, there is substantially no crystal orientation, and it can be said that there is substantially no grain boundary layer consisting of a glass layer at the interface between brittle material crystals, and a part of the structure is an anchor that bites into the substrate surface It is characterized by often forming a layer.

  The structure formed by this method clearly has a sufficient strength unlike a so-called green compact in which fine particles are packed by pressure and keeps a form by physical adhesion.

  In this structure formation, the brittle material fine particles are crushed and deformed by measuring the brittle material fine particles used as raw materials and the crystallite size of the formed brittle material structure by X-ray diffraction. it can. That is, the crystallite size of the structure formed by the aerosol deposition method is greatly characterized by being smaller than the crystallite size of the raw material fine particles. A new surface in which atoms originally present inside and bonded to other atoms are exposed is formed on the slip surface or fracture surface formed by crushing or deforming fine particles. This active new surface having a high surface energy is considered to be formed by joining the surface of the adjacent brittle material, the new surface of the adjacent brittle material, or the substrate surface. In addition, when hydroxyl groups are present on the surface of the fine particles moderately, a mechanochemical acid-base dehydration reaction occurs due to local shear stress generated between the fine particles and between the fine particles and the structure when the fine particles collide with each other. It can be considered. The addition of continuous mechanical impact force from the outside causes these phenomena to occur continuously, and the progress and densification of joints are performed by repeated deformation and crushing of fine particles, and brittle material structures grow. it is conceivable that.

The words used in this case are explained below.
In the present invention, the fine particles mean particles having an average particle size of 5 μm or less identified by particle size distribution measurement or a scanning electron microscope when the primary particles are dense particles. In addition, when the primary particles are porous particles that are easily crushed by impact, the average particle diameter is 50 μm or less.

  In the present invention, the aerosol is a dispersion of the aforementioned fine particles in a gas such as helium, nitrogen, argon, oxygen, dry air, or a mixed gas thereof, and it is desirable that the primary particles are dispersed, Usually, the primary particles include aggregated particles. The gas pressure and temperature of the aerosol are arbitrary, but the concentration of fine particles in the gas is within the range of 0.0003 mL / L to 0.06 mL / L when the gas pressure is converted to 1 atm and the temperature is converted to 20 ° C. It is desirable for the formation of the structure.

  In the present invention, the nozzle is a hard component having a nozzle body having a space through which an aerosol passes, an introduction opening for introducing the aerosol, and a lead-out opening for injecting the aerosol. In order to acquire the above, the shape of the space of the nozzle body and the shape of the outlet opening are devised to rectify the aerosol and control the ejection state.

  The aerosol deposition method has poor utilization efficiency of the fine particles in the aerosol, and the fine particles ejected from the nozzle often have a structure of substantially 1% or less, and did not contribute to the formation of the structure. Part of the fine particles adheres to the substrate or the structure on the substrate as agglomerated powder. This agglomerated powder became an obstacle to structure formation, which was a factor in causing defects in the structure.

In order to remove the agglomerated powder adhering to the substrate, it has been proposed to arrange an adhering particle removing blade along the movement path of the substrate. However, using a hard rubber or metal plate as the blade material is not sufficient to remove the agglomerated powder adhering to the substrate and the structure on the substrate, and in the worst case, it may cause mechanical damage to the structure. There was a thing. (For example, refer to Patent Document 1).
JP 2001-38274 A

  The present invention has been made to solve the above-mentioned problems. The object of the present invention is to remove agglomerated powder adhering to a substrate or a structure on the substrate at the time of producing the structure, thereby providing a good structure without defects. It is to make a thing.

In order to achieve the above object, the present invention is directed to spraying an aerosol in which fine particles of a brittle material are dispersed in a gas toward a base material from a nozzle to cause the aerosol to collide with the surface of the base material. depending, in composite structure manufacturing apparatus used pre Symbol structure comprised of a constituent material of the fine particles in the aerosol deposition method of forming on the substrate, and placing the nozzle into a plurality parallel, between which the nozzle A blow nozzle that injects a gas that does not contain fine particles of a brittle material is provided. This made it possible to produce a good structure without defects.

  According to the present invention, there is an effect that enables a good structure without defects to be manufactured.

  First, FIG. 15 shows a general outline of a structure manufacturing apparatus using the aerosol deposition method. The substrate 180 on which the structure 190 is manufactured is fixed to an XY stage 170 that can be braked in the front, rear, left, and right (XY), and installed in the vacuum chamber 110. The carrier gas sent from the gas cylinder 130 through the carrier pipe passes through the aerosol generator 140 and is jetted as an aerosol beam 160 from the nozzle 150 to produce a structure 190 on the substrate 180.

  FIG. 13 is a detailed view of the periphery of the structure 190, and FIG. 14 is a side view thereof. The aggregated powder adhering to the substrate 180 and the structure 190 is roughly divided into two. One is the aggregated powder 200 adhering between the nozzles on the substrate 180 and the structure 190, and the other is the nozzle on the substrate 180 and the structure 190 when the XY stage 170 moves in the direction of the arrow described in FIG. It is the agglomerated powder 210 adhering to the rear. These agglomerated powders are taken into the structure 190 to cause defects in the inside and the surface of the structure 190.

  A detailed view of the first embodiment according to the present invention is shown in FIG. 1, and a side view thereof is shown in FIG. A blow nozzle 220 is installed between the plurality of nozzles 150 for injecting the aerosol beam 160 to inject the blow gas 230. The blow gas 230 refers to a gas that does not contain aerosol particles. The blown gas 230 removes the agglomerated powder 200 adhering between the nozzles. This is assumed to be both a blow-off effect by the blow gas 230 and an air curtain effect.

FIG. 3 is a detailed view of a reference example according to the present invention, and FIG. 4 is a side view thereof. A blow nozzle 220 having a flat shape is installed behind the nozzle 150 for injecting the aerosol beam 160, and the blow gas 230 is injected over the entire surface. The blow gas 230 removes the agglomerated powder 200 adhering between the nozzles and the agglomerated powder 210 adhering to the rear of the nozzle. This is assumed to be both a blow-off effect by the blow gas 230 and an air curtain effect.

FIG. 5 is a detailed view of another reference example according to the present invention, and FIG. 6 is a side view thereof. A toothbrush-like brush 240 is installed behind the nozzle 150 that injects the aerosol beam 160. The brush 240 removes the agglomerated powder 200 adhering between the nozzles and the agglomerated powder 210 adhering to the rear of the nozzle. As the material of the brush 240, a soft material such as plastic, fiber, or pig hair is preferable as it does not damage the structure 190, instead of a hard material such as metal.

FIG. 7 is a detailed view of another reference example according to the present invention, and FIG. 8 is a side view thereof. A rotating brush 250 is installed behind the nozzle 150 that injects the aerosol beam 160. The rotating brush 250 removes the agglomerated powder 200 adhering between the nozzles and the agglomerated powder 210 adhering to the rear of the nozzle. It is preferable that the rotating brush 250 moves on the surface of the structure while rotating. As the material of the rotating brush 250, as in the third embodiment, a soft material such as plastic, fiber, or pig hair is preferable as it does not damage the structure 190, instead of a hard material such as metal . The Material, plastics and fibers not intended rigid, such as metal, those soft, such as pig hair, it is preferred there is no damage to the structure 190.

FIG. 9 is a detailed view of another reference example according to the present invention, and FIG. 10 is a side view thereof. The vibration device 260 is installed on the substrate 180. The vibrating device 260 removes the agglomerated powder 200 adhering between the nozzles and the agglomerated powder 210 adhering to the rear of the nozzle. The vibration device 260 is not particularly limited as long as it vibrates the substrate 180 such as an ultrasonic vibrator, a low-frequency vibrator, or a knocking device.

FIG. 11 is a detailed view of another reference example according to the present invention, and FIG. 12 is a side view thereof. A flat blow nozzle 220 is installed behind the nozzle 150 for injecting the aerosol beam 160, the blow gas 230 is injected over the entire surface, and the vibration device 260 is installed on the substrate 180. By the blow gas 230 and the vibration device 260, the agglomerated powder 200 adhering between the nozzles and the agglomerated powder 210 adhering to the rear of the nozzle are more effectively removed.

  The present invention relates to a composite structure manufacturing method (and apparatus and fine particles) in which an aerosol in which fine particles of a brittle material are dispersed in a gas is sprayed onto a substrate to form a structure made of a constituent material of the fine particles on the substrate.

It is detail drawing of Example 1 concerning this invention. It is a side view of Example 1 concerning the present invention. It is detail drawing of the reference example of this invention. It is a side view of the reference example of this invention. It is detail drawing of the other reference example of this invention. It is a side view of the other reference example of this invention. It is detail drawing of the other reference example of this invention. It is a side view of the other reference example of this invention. It is detail drawing of the other reference example of this invention. It is a side view of the other reference example of this invention. It is detail drawing of the other reference example of this invention. It is a side view of the other reference example of this invention. It is detail drawing of a prior art. It is a side view of a prior art. It is the schematic of a structure preparation apparatus.

Explanation of symbols

110 ... Vacuum chamber 120 ... Vacuum pump 130 ... Gas cylinder 140 ... Aerosol generator 150 ... Nozzle 160 ... Aerosol beam 170 ... XY stage 180 ... Substrate 190 ... Structure 200 ... Aggregated powder 210 adhered between nozzles ... Adhered behind the nozzle Aggregated powder 220 ... Blow nozzle 230 ... Blow gas 240 ... Brush 250 ... Rotating brush 260 ... Vibration device

Claims (1)

Fine particles of a brittle material by spraying from a nozzle toward the aerosol base material dispersed in the gas, the aerosol collides with the substrate surface, by the impact of the collision, of the constituent material of the prior SL microparticles In a composite structure manufacturing apparatus used in an aerosol deposition method for forming a structure to be formed on the substrate, a plurality of the nozzles are installed in parallel, and a gas not containing fine particles of brittle material is injected between the nozzles. An apparatus for producing a composite structure, characterized in that a blow nozzle is installed .

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