JP4057036B2 - 湿度センサ用感湿素子の製造方法 - Google Patents
湿度センサ用感湿素子の製造方法 Download PDFInfo
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- JP4057036B2 JP4057036B2 JP2006006141A JP2006006141A JP4057036B2 JP 4057036 B2 JP4057036 B2 JP 4057036B2 JP 2006006141 A JP2006006141 A JP 2006006141A JP 2006006141 A JP2006006141 A JP 2006006141A JP 4057036 B2 JP4057036 B2 JP 4057036B2
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- Prior art keywords
- polyimide
- formula
- moisture
- humidity
- humidity sensor
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- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
Description
Claims (3)
- 基板を用意する工程と、前記基板上に電極を形成する工程と、前記電極上に感湿膜であるポリイミドを形成する工程とを備え、前記基板と前記電極と前記ポリイミドとで構成された感湿素子の製造方法において、
前記ポリイミドを形成する工程では、末端アセチレンで終端したポリアミド酸を脱水閉環することにより、ジアミン側に少なくとも4つのベンゼン環を有するとともに、末端アレチレンは3分子もしくは4分子重合して6員環もしくは8員環を生成したものであって、
ジアミン側に少なくとも4つのベンゼン環と少なくとも1つのポリフルオロアルキル基を有するポリイミドを感湿膜とし、
前記ポリイミドが式(IV):
- 前記ポリイミドが、ジアミン側に少なくとも4つのベンゼン環を有する繰り返し単位を持つポリイミドの末端同士が連結された網目構造を有する請求項1又は2に記載の感湿素子の製造方法。
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JP2006006141A JP4057036B2 (ja) | 2006-01-13 | 2006-01-13 | 湿度センサ用感湿素子の製造方法 |
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JP2006006141A JP4057036B2 (ja) | 2006-01-13 | 2006-01-13 | 湿度センサ用感湿素子の製造方法 |
Related Parent Applications (1)
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JP2002032924A Division JP2003232765A (ja) | 2002-02-08 | 2002-02-08 | 湿度センサ用感湿素子 |
Publications (2)
Publication Number | Publication Date |
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JP2006119153A JP2006119153A (ja) | 2006-05-11 |
JP4057036B2 true JP4057036B2 (ja) | 2008-03-05 |
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JP2006006141A Expired - Fee Related JP4057036B2 (ja) | 2006-01-13 | 2006-01-13 | 湿度センサ用感湿素子の製造方法 |
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JP (1) | JP4057036B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10597493B2 (en) | 2017-01-27 | 2020-03-24 | Fuji Xerox Co., Ltd. | Polyimide precursor composition and method of preparing polyimide molded article |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005003543A (ja) | 2003-06-12 | 2005-01-06 | Nippon Soken Inc | 湿度センサ用感湿素子 |
JP2013542422A (ja) | 2010-09-30 | 2013-11-21 | スリーエム イノベイティブ プロパティズ カンパニー | センサー素子、その製造方法、及びそれを含むセンサー装置 |
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2006
- 2006-01-13 JP JP2006006141A patent/JP4057036B2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10597493B2 (en) | 2017-01-27 | 2020-03-24 | Fuji Xerox Co., Ltd. | Polyimide precursor composition and method of preparing polyimide molded article |
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JP2006119153A (ja) | 2006-05-11 |
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