JP4056884B2 - 作業場所を探触するためのプローブヘッドを有する座標測定装置 - Google Patents
作業場所を探触するためのプローブヘッドを有する座標測定装置 Download PDFInfo
- Publication number
- JP4056884B2 JP4056884B2 JP2002567775A JP2002567775A JP4056884B2 JP 4056884 B2 JP4056884 B2 JP 4056884B2 JP 2002567775 A JP2002567775 A JP 2002567775A JP 2002567775 A JP2002567775 A JP 2002567775A JP 4056884 B2 JP4056884 B2 JP 4056884B2
- Authority
- JP
- Japan
- Prior art keywords
- contact probe
- detection needle
- workpiece
- needle
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
YS=U+Y−U-Y
XS=U+X−U-X
ZS=U+X+U-X+U+Y+U-Y
信号YS、XS及びZSは、それぞれy、x及びz方向の検出端のたわみを表す。
Claims (5)
- 座標測定装置用接触プローブであって、
該座標測定装置(1)に取り付けるようにされた接触プローブシャーシと、
静止位置から変位可能に前記接触プローブシャーシ上に取り付けられ、加工物と接触するように検出針を取り付け可能な検出針用支持体と、
前記接触プローブシャーシに関して前記検出針用支持体の変位を検出するための変位測定システムと、
前記検出針の先端又は/及び該先端の周りの領域を点検するための、前記変位測定システムから独立した点検光学系と、を備え、
前記変位測定システムは、前記接触プローブシャーシに取り付けられた枠部材と、前記検出針が取り付けられた検出針用支持体を含む中央部と、を有するシリコン単結晶から成る本体を含み、前記本体は、枠部材から横方向に伸びて中央部を吊下げる複数の細片をさらに有し、前記細片は、枠部材と中央部のいずれよりも小さな厚みであり、前記点検光学形の光路が前記本体を通過する開口が隣接する細片間に設けられ、前記細片のそれぞれには前記検出針用支持体の変位を検出する少なくとも2つの歪検出器が設けられることを特徴とする接触プローブ。 - 請求項1に記載の接触プローブであって、前記点検光学系の対物面が前記検出針の先端の領域に配置されていることを特徴とする接触プローブ。
- 請求項1又は2に記載の接触プローブであって、複数の前記開口は、前記検出針の長軸の周りに円周方向に配置されていることを特徴とする接触プローブ。
- 請求項1〜3の何れか1項に記載の接触プローブであって、前記検出針が、前記点検光学系の主軸にほぼ沿って延伸していることを特徴とする接触プローブ。
- 加工物取り付け台と請求項1〜4の何れか1項に記載の接触プローブとを備えた座標測定装置であって、該接触プローブが前記加工物取り付け台に対して空間中を移動することができ、該加工物取り付け台に取り付けることのできる加工物に接触するようにされていることを特徴とする座標測定装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10108774A DE10108774A1 (de) | 2001-02-23 | 2001-02-23 | Koordinatenmessgerät zum Antasten eines Werkstücks, Tastkopf für ein Koordinatenmessgerät und Verfahren zum Betrieb eines Koordinatenmessgerätes |
PCT/EP2002/001958 WO2002068904A1 (de) | 2001-02-23 | 2002-02-25 | Koordinatenmessgerät mit einem tastkopf zum antasten eines werkstücks |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2004521339A JP2004521339A (ja) | 2004-07-15 |
JP2004521339A5 JP2004521339A5 (ja) | 2005-12-22 |
JP4056884B2 true JP4056884B2 (ja) | 2008-03-05 |
Family
ID=7675258
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002567775A Expired - Fee Related JP4056884B2 (ja) | 2001-02-23 | 2002-02-25 | 作業場所を探触するためのプローブヘッドを有する座標測定装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6789327B2 (ja) |
EP (1) | EP1362216B1 (ja) |
JP (1) | JP4056884B2 (ja) |
DE (1) | DE10108774A1 (ja) |
WO (1) | WO2002068904A1 (ja) |
Families Citing this family (62)
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FR2837567B1 (fr) * | 2002-03-19 | 2005-05-06 | Romain Granger | Capteur pour machine de mesure de coordonnees tridimensionnelles |
WO2004068068A1 (de) * | 2003-01-31 | 2004-08-12 | Carl Zeiss Industrielle Messtechnik Gmbh | Tastkopf für ein koordinatenmessgerät |
GB0322115D0 (en) | 2003-09-22 | 2003-10-22 | Renishaw Plc | Method of error compensation |
DE102004022750B4 (de) * | 2004-05-07 | 2007-04-19 | Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Technologie, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt | Verfahren zur Herstellung eines Mikro-Prüfkörpers |
JP5069106B2 (ja) | 2004-07-23 | 2012-11-07 | カール ツァイス インドゥストリーレ メステクニーク ゲーエムベーハー | 触知三次元座標測定機の検出ヘッド用センサーモジュール |
GB0506158D0 (en) * | 2005-03-24 | 2005-05-04 | Renishaw Plc | Measurement probe |
GB0508388D0 (en) | 2005-04-26 | 2005-06-01 | Renishaw Plc | Surface sensing device with optical sensor |
DE102005036126A1 (de) | 2005-07-26 | 2007-02-01 | Carl Zeiss Industrielle Messtechnik Gmbh | Sensormodul für einen Tastkopf eines taktilen Koordinatenmessgerätes |
DE102006002619B3 (de) * | 2006-01-19 | 2007-07-26 | Forschungszentrum Karlsruhe Gmbh | Vorrichtung zur Messung von Strukturen eines Objekts |
GB0608998D0 (en) * | 2006-05-08 | 2006-06-14 | Renishaw Plc | Contact sensing probe |
JP5179760B2 (ja) * | 2007-02-05 | 2013-04-10 | 株式会社ミツトヨ | 座標測定用補助具、座標測定用プローブ及び座標測定機 |
GB0722477D0 (en) | 2007-11-15 | 2007-12-27 | Secretary Trade Ind Brit | Microprobe |
SE533198C2 (sv) * | 2008-02-14 | 2010-07-20 | Hexagon Metrology Ab | Mätanordning med mäthuvud för kontrollmätning av föremål |
GB0804114D0 (en) * | 2008-03-05 | 2008-04-09 | Renishaw Plc | Surface sensing device |
US8191407B2 (en) * | 2008-05-13 | 2012-06-05 | Seagate Technology Llc | Folded beam suspension for probe |
US9551575B2 (en) | 2009-03-25 | 2017-01-24 | Faro Technologies, Inc. | Laser scanner having a multi-color light source and real-time color receiver |
DE102009015920B4 (de) | 2009-03-25 | 2014-11-20 | Faro Technologies, Inc. | Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung |
DE102009020533C5 (de) * | 2009-05-08 | 2015-12-17 | SIOS Meßtechnik GmbH | Vorrichtung zur Kraftkomponentenmessung |
US9210288B2 (en) | 2009-11-20 | 2015-12-08 | Faro Technologies, Inc. | Three-dimensional scanner with dichroic beam splitters to capture a variety of signals |
US9113023B2 (en) | 2009-11-20 | 2015-08-18 | Faro Technologies, Inc. | Three-dimensional scanner with spectroscopic energy detector |
DE102009057101A1 (de) | 2009-11-20 | 2011-05-26 | Faro Technologies, Inc., Lake Mary | Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung |
US9529083B2 (en) | 2009-11-20 | 2016-12-27 | Faro Technologies, Inc. | Three-dimensional scanner with enhanced spectroscopic energy detector |
WO2011064339A2 (de) | 2009-11-26 | 2011-06-03 | Werth Messtechnik Gmbh | Verfahren und anordnung zur taktil-optischen bestimmung der geometrie eines messobjektes |
US8630314B2 (en) | 2010-01-11 | 2014-01-14 | Faro Technologies, Inc. | Method and apparatus for synchronizing measurements taken by multiple metrology devices |
CN102713776B (zh) | 2010-01-20 | 2015-04-22 | 法罗技术股份有限公司 | 利用了多总线臂技术的便携式铰接臂坐标测量机 |
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US9879976B2 (en) | 2010-01-20 | 2018-01-30 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features |
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JP5306545B2 (ja) * | 2010-01-20 | 2013-10-02 | ファロ テクノロジーズ インコーポレーテッド | 照明付きプローブ端を有する座標測定機および動作方法 |
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US8997362B2 (en) | 2012-07-17 | 2015-04-07 | Faro Technologies, Inc. | Portable articulated arm coordinate measuring machine with optical communications bus |
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CN107152912B (zh) * | 2017-06-28 | 2019-10-01 | 深圳华清精密科技有限公司 | 一种光学触发测头及测量方法 |
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-
2001
- 2001-02-23 DE DE10108774A patent/DE10108774A1/de not_active Ceased
-
2002
- 2002-02-25 WO PCT/EP2002/001958 patent/WO2002068904A1/de active Application Filing
- 2002-02-25 EP EP02722132A patent/EP1362216B1/de not_active Expired - Lifetime
- 2002-02-25 JP JP2002567775A patent/JP4056884B2/ja not_active Expired - Fee Related
-
2003
- 2003-08-22 US US10/646,342 patent/US6789327B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2004521339A (ja) | 2004-07-15 |
EP1362216B1 (de) | 2011-06-22 |
WO2002068904A1 (de) | 2002-09-06 |
EP1362216A1 (de) | 2003-11-19 |
US20040118000A1 (en) | 2004-06-24 |
DE10108774A1 (de) | 2002-09-05 |
US6789327B2 (en) | 2004-09-14 |
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