JP4049459B2 - レーザ加工方法 - Google Patents

レーザ加工方法 Download PDF

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Publication number
JP4049459B2
JP4049459B2 JP28713998A JP28713998A JP4049459B2 JP 4049459 B2 JP4049459 B2 JP 4049459B2 JP 28713998 A JP28713998 A JP 28713998A JP 28713998 A JP28713998 A JP 28713998A JP 4049459 B2 JP4049459 B2 JP 4049459B2
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JP
Japan
Prior art keywords
mirror
angle
galvano mirror
galvanometer
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP28713998A
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English (en)
Japanese (ja)
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JP2000117476A (ja
JP2000117476A5 (enExample
Inventor
研二 河西
智 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP28713998A priority Critical patent/JP4049459B2/ja
Publication of JP2000117476A publication Critical patent/JP2000117476A/ja
Publication of JP2000117476A5 publication Critical patent/JP2000117476A5/ja
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Publication of JP4049459B2 publication Critical patent/JP4049459B2/ja
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Expired - Lifetime legal-status Critical Current

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  • Mechanical Optical Scanning Systems (AREA)
JP28713998A 1998-10-09 1998-10-09 レーザ加工方法 Expired - Lifetime JP4049459B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28713998A JP4049459B2 (ja) 1998-10-09 1998-10-09 レーザ加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28713998A JP4049459B2 (ja) 1998-10-09 1998-10-09 レーザ加工方法

Publications (3)

Publication Number Publication Date
JP2000117476A JP2000117476A (ja) 2000-04-25
JP2000117476A5 JP2000117476A5 (enExample) 2005-07-21
JP4049459B2 true JP4049459B2 (ja) 2008-02-20

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ID=17713583

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JP28713998A Expired - Lifetime JP4049459B2 (ja) 1998-10-09 1998-10-09 レーザ加工方法

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JP (1) JP4049459B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3407715B2 (ja) * 2000-06-06 2003-05-19 松下電器産業株式会社 レーザ加工装置
JP4698092B2 (ja) * 2001-07-11 2011-06-08 住友重機械工業株式会社 ガルバノスキャナ装置及びその制御方法
JP4630853B2 (ja) * 2006-03-30 2011-02-09 日立ビアメカニクス株式会社 移動体の位置決め制御装置及びレーザ加工装置
JP5167187B2 (ja) * 2009-03-31 2013-03-21 日立ビアメカニクス株式会社 レーザ穴明け加工方法
JP5393598B2 (ja) * 2010-06-03 2014-01-22 キヤノン株式会社 ガルバノ装置及びレーザ加工装置
JP5724982B2 (ja) * 2012-09-27 2015-05-27 ブラザー工業株式会社 ２軸型ガルバノミラーデバイス
JP6431333B2 (ja) * 2014-10-15 2018-11-28 キヤノン株式会社 加工装置

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JP2000117476A (ja) 2000-04-25

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