JP4047805B2 - マイクロマシン技術を用いた音響信号感知装置および感知方法 - Google Patents

マイクロマシン技術を用いた音響信号感知装置および感知方法 Download PDF

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JP4047805B2
JP4047805B2 JP2003506240A JP2003506240A JP4047805B2 JP 4047805 B2 JP4047805 B2 JP 4047805B2 JP 2003506240 A JP2003506240 A JP 2003506240A JP 2003506240 A JP2003506240 A JP 2003506240A JP 4047805 B2 JP4047805 B2 JP 4047805B2
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microphone
material layer
signal
acoustic
wind
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JP2004535116A (ja
JP2004535116A5 (https=
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シー チョー，ハワード
エス バラット，エメル
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テクストロン・システムズ・コーポレイション
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Pressure Sensors (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Details Of Audible-Bandwidth Transducers (AREA)
  • Soundproofing, Sound Blocking, And Sound Damping (AREA)
JP2003506240A 2001-06-15 2002-06-14 マイクロマシン技術を用いた音響信号感知装置および感知方法 Expired - Lifetime JP4047805B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/881,793 US6688169B2 (en) 2001-06-15 2001-06-15 Systems and methods for sensing an acoustic signal using microelectromechanical systems technology
PCT/US2002/018969 WO2002104067A2 (en) 2001-06-15 2002-06-14 Systems and methods for sensing an acoustic signal using microelectromechanical systems technology

Publications (3)

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JP2004535116A JP2004535116A (ja) 2004-11-18
JP2004535116A5 JP2004535116A5 (https=) 2005-08-18
JP4047805B2 true JP4047805B2 (ja) 2008-02-13

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JP2003506240A Expired - Lifetime JP4047805B2 (ja) 2001-06-15 2002-06-14 マイクロマシン技術を用いた音響信号感知装置および感知方法

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US (2) US6688169B2 (https=)
EP (1) EP1400149B1 (https=)
JP (1) JP4047805B2 (https=)
CN (1) CN1498514A (https=)
AU (1) AU2002322102A1 (https=)
WO (1) WO2002104067A2 (https=)

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Publication number Publication date
EP1400149B1 (en) 2011-08-17
JP2004535116A (ja) 2004-11-18
US20020191802A1 (en) 2002-12-19
WO2002104067A2 (en) 2002-12-27
US20040091125A1 (en) 2004-05-13
EP1400149A2 (en) 2004-03-24
US6857312B2 (en) 2005-02-22
US6688169B2 (en) 2004-02-10
AU2002322102A1 (en) 2003-01-02
CN1498514A (zh) 2004-05-19
WO2002104067A3 (en) 2003-10-09

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