JP2004535116A5 - - Google Patents

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Publication number
JP2004535116A5
JP2004535116A5 JP2003506240A JP2003506240A JP2004535116A5 JP 2004535116 A5 JP2004535116 A5 JP 2004535116A5 JP 2003506240 A JP2003506240 A JP 2003506240A JP 2003506240 A JP2003506240 A JP 2003506240A JP 2004535116 A5 JP2004535116 A5 JP 2004535116A5
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JP
Japan
Prior art keywords
microphone
material layer
acoustic
signal
wind pressure
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Application number
JP2003506240A
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English (en)
Japanese (ja)
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JP4047805B2 (ja
JP2004535116A (ja
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Priority claimed from US09/881,793 external-priority patent/US6688169B2/en
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Publication of JP2004535116A publication Critical patent/JP2004535116A/ja
Publication of JP2004535116A5 publication Critical patent/JP2004535116A5/ja
Application granted granted Critical
Publication of JP4047805B2 publication Critical patent/JP4047805B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2003506240A 2001-06-15 2002-06-14 マイクロマシン技術を用いた音響信号感知装置および感知方法 Expired - Lifetime JP4047805B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/881,793 US6688169B2 (en) 2001-06-15 2001-06-15 Systems and methods for sensing an acoustic signal using microelectromechanical systems technology
PCT/US2002/018969 WO2002104067A2 (en) 2001-06-15 2002-06-14 Systems and methods for sensing an acoustic signal using microelectromechanical systems technology

Publications (3)

Publication Number Publication Date
JP2004535116A JP2004535116A (ja) 2004-11-18
JP2004535116A5 true JP2004535116A5 (https=) 2005-08-18
JP4047805B2 JP4047805B2 (ja) 2008-02-13

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JP2003506240A Expired - Lifetime JP4047805B2 (ja) 2001-06-15 2002-06-14 マイクロマシン技術を用いた音響信号感知装置および感知方法

Country Status (6)

Country Link
US (2) US6688169B2 (https=)
EP (1) EP1400149B1 (https=)
JP (1) JP4047805B2 (https=)
CN (1) CN1498514A (https=)
AU (1) AU2002322102A1 (https=)
WO (1) WO2002104067A2 (https=)

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