CN1498514A - 用微电子机械系统技术感测声音信号的系统和方法 - Google Patents

用微电子机械系统技术感测声音信号的系统和方法 Download PDF

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Publication number
CN1498514A
CN1498514A CNA028067878A CN02806787A CN1498514A CN 1498514 A CN1498514 A CN 1498514A CN A028067878 A CNA028067878 A CN A028067878A CN 02806787 A CN02806787 A CN 02806787A CN 1498514 A CN1498514 A CN 1498514A
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China
Prior art keywords
microphone
sound
vibrating membrane
material layer
signal
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CNA028067878A
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English (en)
Chinese (zh)
Inventor
霍华德・C・雀
霍华德·C·雀
・S・比拉
埃姆尔·S·比拉
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Textron Systems Corp
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Textron Systems Corp
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Pressure Sensors (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Details Of Audible-Bandwidth Transducers (AREA)
  • Soundproofing, Sound Blocking, And Sound Damping (AREA)
CNA028067878A 2001-06-15 2002-06-14 用微电子机械系统技术感测声音信号的系统和方法 Pending CN1498514A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/881,793 US6688169B2 (en) 2001-06-15 2001-06-15 Systems and methods for sensing an acoustic signal using microelectromechanical systems technology
US09/881,793 2001-06-15

Publications (1)

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CN1498514A true CN1498514A (zh) 2004-05-19

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US (2) US6688169B2 (https=)
EP (1) EP1400149B1 (https=)
JP (1) JP4047805B2 (https=)
CN (1) CN1498514A (https=)
AU (1) AU2002322102A1 (https=)
WO (1) WO2002104067A2 (https=)

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CN102730626A (zh) * 2011-04-08 2012-10-17 欣兴电子股份有限公司 载板及其制作方法
CN103686566A (zh) * 2012-09-07 2014-03-26 罗伯特·博世有限公司 声音转换器设备和用于制造这种声音转换器设备的方法、传感器装置和用于确定声音信号的方法
CN104995679A (zh) * 2013-02-13 2015-10-21 美国亚德诺半导体公司 信号源分离
CN105611470A (zh) * 2016-02-25 2016-05-25 歌尔声学股份有限公司 振动板及设有该振动板的微型发声器
CN108498099A (zh) * 2018-04-04 2018-09-07 清华大学 柔性肺泡容积获取系统及肺泡容积获取方法
CN109257675A (zh) * 2018-10-19 2019-01-22 歌尔科技有限公司 一种防风噪方法、耳机及存储介质
CN113613150A (zh) * 2021-08-20 2021-11-05 北京大学 一种mems热式麦克风及其实现方法
CN113874732A (zh) * 2019-06-19 2021-12-31 思睿逻辑国际半导体有限公司 通过加速度测量进行风检测的装置和方法
CN114175668A (zh) * 2019-05-30 2022-03-11 伯斯有限公司 用于降低风噪声的技术
CN115474115A (zh) * 2021-06-10 2022-12-13 华为技术有限公司 二维矢量麦克风
CN116222658A (zh) * 2023-02-03 2023-06-06 国网湖北省电力有限公司超高压公司 一种特高压变电构架监测的多功能传感装置与融合方法

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102730626A (zh) * 2011-04-08 2012-10-17 欣兴电子股份有限公司 载板及其制作方法
CN103686566A (zh) * 2012-09-07 2014-03-26 罗伯特·博世有限公司 声音转换器设备和用于制造这种声音转换器设备的方法、传感器装置和用于确定声音信号的方法
CN104995679A (zh) * 2013-02-13 2015-10-21 美国亚德诺半导体公司 信号源分离
CN105611470A (zh) * 2016-02-25 2016-05-25 歌尔声学股份有限公司 振动板及设有该振动板的微型发声器
CN108498099A (zh) * 2018-04-04 2018-09-07 清华大学 柔性肺泡容积获取系统及肺泡容积获取方法
CN109257675A (zh) * 2018-10-19 2019-01-22 歌尔科技有限公司 一种防风噪方法、耳机及存储介质
CN114175668A (zh) * 2019-05-30 2022-03-11 伯斯有限公司 用于降低风噪声的技术
CN113874732B (zh) * 2019-06-19 2023-06-09 思睿逻辑国际半导体有限公司 通过加速度测量进行风检测的装置和方法
CN113874732A (zh) * 2019-06-19 2021-12-31 思睿逻辑国际半导体有限公司 通过加速度测量进行风检测的装置和方法
CN115474115B (zh) * 2021-06-10 2025-10-31 华为技术有限公司 二维矢量麦克风
CN115474115A (zh) * 2021-06-10 2022-12-13 华为技术有限公司 二维矢量麦克风
CN113613150A (zh) * 2021-08-20 2021-11-05 北京大学 一种mems热式麦克风及其实现方法
CN113613150B (zh) * 2021-08-20 2022-03-25 北京大学 一种mems热式麦克风及其实现方法
CN116222658A (zh) * 2023-02-03 2023-06-06 国网湖北省电力有限公司超高压公司 一种特高压变电构架监测的多功能传感装置与融合方法

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Publication number Publication date
EP1400149B1 (en) 2011-08-17
JP4047805B2 (ja) 2008-02-13
JP2004535116A (ja) 2004-11-18
US20020191802A1 (en) 2002-12-19
WO2002104067A2 (en) 2002-12-27
US20040091125A1 (en) 2004-05-13
EP1400149A2 (en) 2004-03-24
US6857312B2 (en) 2005-02-22
US6688169B2 (en) 2004-02-10
AU2002322102A1 (en) 2003-01-02
WO2002104067A3 (en) 2003-10-09

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