AU2002322102A1 - Systems and methods for sensing an acoustic signal using microelectromechanical systems technology - Google Patents

Systems and methods for sensing an acoustic signal using microelectromechanical systems technology

Info

Publication number
AU2002322102A1
AU2002322102A1 AU2002322102A AU2002322102A AU2002322102A1 AU 2002322102 A1 AU2002322102 A1 AU 2002322102A1 AU 2002322102 A AU2002322102 A AU 2002322102A AU 2002322102 A AU2002322102 A AU 2002322102A AU 2002322102 A1 AU2002322102 A1 AU 2002322102A1
Authority
AU
Australia
Prior art keywords
systems
sensing
methods
acoustic signal
technology
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002322102A
Other languages
English (en)
Inventor
Emel S. Bulat
Howard C. Choe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Textron Systems Corp
Original Assignee
Textron Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Textron Systems Corp filed Critical Textron Systems Corp
Publication of AU2002322102A1 publication Critical patent/AU2002322102A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00Transducers other than those covered by groups H04R9/00 - H04R21/00

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Pressure Sensors (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Details Of Audible-Bandwidth Transducers (AREA)
  • Soundproofing, Sound Blocking, And Sound Damping (AREA)
AU2002322102A 2001-06-15 2002-06-14 Systems and methods for sensing an acoustic signal using microelectromechanical systems technology Abandoned AU2002322102A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/881,793 US6688169B2 (en) 2001-06-15 2001-06-15 Systems and methods for sensing an acoustic signal using microelectromechanical systems technology
US09/881,793 2001-06-15
PCT/US2002/018969 WO2002104067A2 (en) 2001-06-15 2002-06-14 Systems and methods for sensing an acoustic signal using microelectromechanical systems technology

Publications (1)

Publication Number Publication Date
AU2002322102A1 true AU2002322102A1 (en) 2003-01-02

Family

ID=25379226

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002322102A Abandoned AU2002322102A1 (en) 2001-06-15 2002-06-14 Systems and methods for sensing an acoustic signal using microelectromechanical systems technology

Country Status (6)

Country Link
US (2) US6688169B2 (https=)
EP (1) EP1400149B1 (https=)
JP (1) JP4047805B2 (https=)
CN (1) CN1498514A (https=)
AU (1) AU2002322102A1 (https=)
WO (1) WO2002104067A2 (https=)

Families Citing this family (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6936524B2 (en) * 2003-11-05 2005-08-30 Akustica, Inc. Ultrathin form factor MEMS microphones and microspeakers
US7556597B2 (en) * 2003-11-07 2009-07-07 Otologics, Llc Active vibration attenuation for implantable microphone
US8096937B2 (en) 2005-01-11 2012-01-17 Otologics, Llc Adaptive cancellation system for implantable hearing instruments
US7775964B2 (en) * 2005-01-11 2010-08-17 Otologics Llc Active vibration attenuation for implantable microphone
US7795695B2 (en) 2005-01-27 2010-09-14 Analog Devices, Inc. Integrated microphone
US7449356B2 (en) * 2005-04-25 2008-11-11 Analog Devices, Inc. Process of forming a microphone using support member
US7885423B2 (en) 2005-04-25 2011-02-08 Analog Devices, Inc. Support apparatus for microphone diaphragm
US7825484B2 (en) * 2005-04-25 2010-11-02 Analog Devices, Inc. Micromachined microphone and multisensor and method for producing same
US20070071268A1 (en) * 2005-08-16 2007-03-29 Analog Devices, Inc. Packaged microphone with electrically coupled lid
US20070040231A1 (en) * 2005-08-16 2007-02-22 Harney Kieran P Partially etched leadframe packages having different top and bottom topologies
US7961897B2 (en) * 2005-08-23 2011-06-14 Analog Devices, Inc. Microphone with irregular diaphragm
US8477983B2 (en) * 2005-08-23 2013-07-02 Analog Devices, Inc. Multi-microphone system
US7522738B2 (en) * 2005-11-30 2009-04-21 Otologics, Llc Dual feedback control system for implantable hearing instrument
US7508040B2 (en) * 2006-06-05 2009-03-24 Hewlett-Packard Development Company, L.P. Micro electrical mechanical systems pressure sensor
US8344487B2 (en) * 2006-06-29 2013-01-01 Analog Devices, Inc. Stress mitigation in packaged microchips
EP2044802B1 (en) * 2006-07-25 2013-03-27 Analog Devices, Inc. Multiple microphone system
US20080175425A1 (en) * 2006-11-30 2008-07-24 Analog Devices, Inc. Microphone System with Silicon Microphone Secured to Package Lid
US9135797B2 (en) 2006-12-28 2015-09-15 International Business Machines Corporation Audio detection using distributed mobile computing
US20080192962A1 (en) * 2007-02-13 2008-08-14 Sonion Nederland B.V. Microphone with dual transducers
GB2446619A (en) * 2007-02-16 2008-08-20 Audiogravity Holdings Ltd Reduction of wind noise in an omnidirectional microphone array
US7694610B2 (en) * 2007-06-27 2010-04-13 Siemens Medical Solutions Usa, Inc. Photo-multiplier tube removal tool
US8472654B2 (en) 2007-10-30 2013-06-25 Cochlear Limited Observer-based cancellation system for implantable hearing instruments
WO2009089281A1 (en) * 2008-01-11 2009-07-16 Broadband Discovery Systems, Inc. System and method for conditioning a signal received at a mems based acquisition device
US20090182524A1 (en) * 2008-01-11 2009-07-16 Cory James Stephanson System and method of event detection
US20100283849A1 (en) * 2008-01-11 2010-11-11 Cory James Stephanson System and method of environmental monitoring and event detection
US8050413B2 (en) * 2008-01-11 2011-11-01 Graffititech, Inc. System and method for conditioning a signal received at a MEMS based acquisition device
US20110138902A1 (en) * 2008-05-27 2011-06-16 Tufts University Mems microphone array on a chip
US8345895B2 (en) 2008-07-25 2013-01-01 United Microelectronics Corp. Diaphragm of MEMS electroacoustic transducer
JP5235120B2 (ja) * 2008-09-29 2013-07-10 株式会社建設環境研究所 騒音計、および騒音計測用プログラム
US8158492B2 (en) * 2009-04-29 2012-04-17 Freescale Semiconductor, Inc. MEMS microphone with cavity and method therefor
US8330239B2 (en) * 2009-04-29 2012-12-11 Freescale Semiconductor, Inc. Shielding for a micro electro-mechanical device and method therefor
CN101876662B (zh) * 2009-04-30 2012-06-13 深圳富泰宏精密工业有限公司 多功能便携式电子装置
US8082782B2 (en) * 2009-06-15 2011-12-27 Gamesa Innovation & Technology S.L. Method and apparatus for monitoring wind turbulence intensity
WO2011025939A1 (en) 2009-08-28 2011-03-03 Analog Devices, Inc. Dual single-crystal backplate microphone system and method of fabricating same
US9357307B2 (en) 2011-02-10 2016-05-31 Dolby Laboratories Licensing Corporation Multi-channel wind noise suppression system and method
TWI501358B (zh) * 2011-04-08 2015-09-21 Unimicron Technology Crop 載板及其製作方法
US20130100773A1 (en) * 2011-10-21 2013-04-25 Steven Robert Rogers Wide-area wind velocity profiler
ES2727786T3 (es) 2012-05-31 2019-10-18 Univ Mississippi Sistemas y métodos para detectar señales acústicas transitorias
DE102012215897A1 (de) * 2012-09-07 2014-03-13 Robert Bosch Gmbh Schallwandlervorrichtung und Verfahren zum Herstellen derselben, Sensorvorrichtung und Verfahren zum Bestimmen eines akustischen Signals
US9485578B2 (en) * 2012-12-14 2016-11-01 Queen Mary University Of London Audio format
US9676614B2 (en) 2013-02-01 2017-06-13 Analog Devices, Inc. MEMS device with stress relief structures
US9460732B2 (en) * 2013-02-13 2016-10-04 Analog Devices, Inc. Signal source separation
US9420368B2 (en) 2013-09-24 2016-08-16 Analog Devices, Inc. Time-frequency directional processing of audio signals
US9798132B2 (en) * 2014-06-17 2017-10-24 Infineon Technologies Ag Membrane structures for microelectromechanical pixel and display devices and systems, and methods for forming membrane structures and related devices
JP6217930B2 (ja) 2014-07-15 2017-10-25 パナソニックIpマネジメント株式会社 音速補正システム
US10167189B2 (en) 2014-09-30 2019-01-01 Analog Devices, Inc. Stress isolation platform for MEMS devices
US9936289B2 (en) * 2014-11-25 2018-04-03 Invensense, Inc. Microelectromechanical systems (MEMS) microphone array with dedicated amplifiers
US10142718B2 (en) 2014-12-04 2018-11-27 Invensense, Inc. Integrated temperature sensor in microphone package
US10284968B2 (en) 2015-05-21 2019-05-07 Cochlear Limited Advanced management of an implantable sound management system
US10042038B1 (en) 2015-09-01 2018-08-07 Digimarc Corporation Mobile devices and methods employing acoustic vector sensors
US10131538B2 (en) 2015-09-14 2018-11-20 Analog Devices, Inc. Mechanically isolated MEMS device
US9538274B1 (en) * 2015-10-05 2017-01-03 Hit Incorporated Smart microphone with voice control functions
CN105611470A (zh) * 2016-02-25 2016-05-25 歌尔声学股份有限公司 振动板及设有该振动板的微型发声器
GB2551793B (en) * 2016-06-30 2021-09-08 Nokia Technologies Oy A thermal wind shield and associated methods
CN108498099B (zh) * 2018-04-04 2020-04-17 清华大学 柔性肺泡容积获取系统及肺泡容积获取方法
EP3573031B1 (en) * 2018-05-24 2022-05-11 Infineon Technologies AG System and method for surveillance
CN109257675B (zh) * 2018-10-19 2019-12-10 歌尔科技有限公司 一种防风噪方法、耳机及存储介质
US11245975B2 (en) * 2019-05-30 2022-02-08 Bose Corporation Techniques for wind noise reduction
US10917716B2 (en) * 2019-06-19 2021-02-09 Cirrus Logic, Inc. Apparatus for and method of wind detection
US11417611B2 (en) 2020-02-25 2022-08-16 Analog Devices International Unlimited Company Devices and methods for reducing stress on circuit components
US11981560B2 (en) 2020-06-09 2024-05-14 Analog Devices, Inc. Stress-isolated MEMS device comprising substrate having cavity and method of manufacture
US12563340B2 (en) * 2020-12-28 2026-02-24 Starkey Laboratories, Inc. Ear-wearable electronic hearing device incorporating microphone array with enhanced wind noise suppression
US11463830B2 (en) * 2021-02-12 2022-10-04 Invensense, Inc. Discrimination of light interference in a MEMS microphone
CN113432706B (zh) * 2021-06-04 2022-02-11 北京大学 一种片上集成的声矢量梯度传感器芯片及其实现方法
CN115474115B (zh) * 2021-06-10 2025-10-31 华为技术有限公司 二维矢量麦克风
WO2023283243A1 (en) * 2021-07-07 2023-01-12 Nikon Corporation Roll-to-roll micro-scale thermal wire microphone
US12143779B2 (en) 2021-07-22 2024-11-12 Apple Inc. Airflow sensors for speakers
CN113613150B (zh) * 2021-08-20 2022-03-25 北京大学 一种mems热式麦克风及其实现方法
CN116222658A (zh) * 2023-02-03 2023-06-06 国网湖北省电力有限公司超高压公司 一种特高压变电构架监测的多功能传感装置与融合方法
US12372033B1 (en) * 2024-03-05 2025-07-29 General Electric Company Turbine engine with sound-based active control

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US696762A (en) * 1901-08-26 1902-04-01 Oliver Turney Automatically-operated musical instrument.
GB1515287A (en) * 1974-05-30 1978-06-21 Plessey Co Ltd Piezoelectric transducers
JPS5669992A (en) 1979-11-10 1981-06-11 Sony Corp Microphone
US4409899A (en) * 1981-07-27 1983-10-18 The United States Of America As Represented By The Secretary Of The Air Force Acoustic amplitude-doppler target ranging system
US5393647A (en) 1993-07-16 1995-02-28 Armand P. Neukermans Method of making superhard tips for micro-probe microscopy and field emission
US5454375A (en) * 1993-10-21 1995-10-03 Glottal Enterprises Pneumotachograph mask or mouthpiece coupling element for airflow measurement during speech or singing
US5883310A (en) 1994-11-04 1999-03-16 The Regents Of The University Of California Micromachined hot-wire shear stress sensor
US5659195A (en) 1995-06-08 1997-08-19 The Regents Of The University Of California CMOS integrated microsensor with a precision measurement circuit
IL116536A0 (en) 1995-12-24 1996-03-31 Harunian Dan Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems
GB2310039B (en) * 1996-02-08 2000-05-24 Roke Manor Research Turbulence-noise cancelling means
EP0981823A1 (en) * 1996-04-18 2000-03-01 California Institute Of Technology Thin film electret microphone
US5929636A (en) 1996-05-02 1999-07-27 Integrated Magnetoelectronics All-metal giant magnetoresistive solid-state component
JP3283423B2 (ja) 1996-07-03 2002-05-20 松下電器産業株式会社 マイクロホン装置
US5994816A (en) * 1996-12-16 1999-11-30 Mcnc Thermal arched beam microelectromechanical devices and associated fabrication methods
US6237461B1 (en) * 1999-05-28 2001-05-29 Non-Lethal Defense, Inc. Non-lethal personal defense device
JP2001124621A (ja) 1999-10-28 2001-05-11 Matsushita Electric Ind Co Ltd 風雑音低減可能な騒音計測装置
EP1122720A1 (en) * 2000-02-02 2001-08-08 STMicroelectronics S.r.l. Process for manufacturing a group comprising at least two elements, one whereof includes an encapsulated micro-integrated structure, and thereby obtained group
US6614093B2 (en) * 2001-12-11 2003-09-02 Lsi Logic Corporation Integrated inductor in semiconductor manufacturing

Also Published As

Publication number Publication date
EP1400149B1 (en) 2011-08-17
JP4047805B2 (ja) 2008-02-13
JP2004535116A (ja) 2004-11-18
US20020191802A1 (en) 2002-12-19
WO2002104067A2 (en) 2002-12-27
US20040091125A1 (en) 2004-05-13
EP1400149A2 (en) 2004-03-24
US6857312B2 (en) 2005-02-22
US6688169B2 (en) 2004-02-10
CN1498514A (zh) 2004-05-19
WO2002104067A3 (en) 2003-10-09

Similar Documents

Publication Publication Date Title
AU2002322102A1 (en) Systems and methods for sensing an acoustic signal using microelectromechanical systems technology
AU2003265935A1 (en) Sound detection and localization system
AU2002348199A1 (en) An enzyme-based system and sensor for measuring acetone
AU2002343107A1 (en) Detection systems and methods
AU2002211328A1 (en) Acoustic detection of respiratory conditions
AU2003302046A1 (en) Methods and systems acquiring impulse signals
AU2001292686A1 (en) System and method for detecting an intruder using impulse radio technology
AU2001234700A1 (en) Micro-electromechanical system device
AU2002253773A1 (en) Systems and methods for deformation measurement
AU2001250935A1 (en) Sensor and method for detecting very low frequency acoustic signals
AU2002352339A1 (en) Speech detection system in an audio signal in noisy surrounding
AU2002225789A1 (en) Detection systems and methods
AU2003303266A1 (en) Acoustic location determination method and system
AU2003288565A1 (en) Optical interrogation system and sensor system
AU2003273378A1 (en) Low-power signal processing using mems
AU2002361454A1 (en) Sensor system and method
AU2003272606A1 (en) Distance measuring systems and methods thereof
AU2001243626A1 (en) Method and system for detecting signals
AUPR631801A0 (en) Roadside sensor system
AU2106201A (en) Systems and methods for non-destructive mass sensing
AU2002365125A1 (en) Small spectral signal detection system
AU2003225167A1 (en) Mechanical amplifier systems and methods
AUPR205400A0 (en) A method of measuring the response of a biological system
AU2003265943A1 (en) Acoustic method and device for distance measurement
AU2001289594A1 (en) A method of measuring the impulse response capability of a system

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase