JP4039284B2 - 質量測定用圧電振動子の製造方法および質量測定用圧電振動子並びに質量測定装置 - Google Patents

質量測定用圧電振動子の製造方法および質量測定用圧電振動子並びに質量測定装置 Download PDF

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Publication number
JP4039284B2
JP4039284B2 JP2003072364A JP2003072364A JP4039284B2 JP 4039284 B2 JP4039284 B2 JP 4039284B2 JP 2003072364 A JP2003072364 A JP 2003072364A JP 2003072364 A JP2003072364 A JP 2003072364A JP 4039284 B2 JP4039284 B2 JP 4039284B2
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Japan
Prior art keywords
excitation electrode
piezoelectric vibrator
sensitive film
vibrating piece
mass measuring
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Expired - Fee Related
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JP2003072364A
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Japanese (ja)
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JP2004282495A5 (enExample
JP2004282495A (ja
Inventor
祥宏 小林
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2003072364A priority Critical patent/JP4039284B2/ja
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Publication of JP2004282495A5 publication Critical patent/JP2004282495A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02818—Density, viscosity

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2003072364A 2003-03-17 2003-03-17 質量測定用圧電振動子の製造方法および質量測定用圧電振動子並びに質量測定装置 Expired - Fee Related JP4039284B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003072364A JP4039284B2 (ja) 2003-03-17 2003-03-17 質量測定用圧電振動子の製造方法および質量測定用圧電振動子並びに質量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003072364A JP4039284B2 (ja) 2003-03-17 2003-03-17 質量測定用圧電振動子の製造方法および質量測定用圧電振動子並びに質量測定装置

Publications (3)

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JP2004282495A JP2004282495A (ja) 2004-10-07
JP2004282495A5 JP2004282495A5 (enExample) 2005-09-08
JP4039284B2 true JP4039284B2 (ja) 2008-01-30

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JP2003072364A Expired - Fee Related JP4039284B2 (ja) 2003-03-17 2003-03-17 質量測定用圧電振動子の製造方法および質量測定用圧電振動子並びに質量測定装置

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JP (1) JP4039284B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4694945B2 (ja) * 2005-01-26 2011-06-08 セイコーインスツル株式会社 反応器、マイクロリアクタチップ、及びマイクロリアクタシステム、並びに反応器の製造方法
JP4803802B2 (ja) * 2005-02-14 2011-10-26 日本碍子株式会社 質量測定装置
JP4577041B2 (ja) * 2005-02-25 2010-11-10 株式会社大真空 圧電振動子の周波数調整方法
WO2008019693A2 (en) * 2006-08-17 2008-02-21 Atonomics A/S Bio surface acoustic wave (saw) resonator amplification for detection of a target analyte
US8336373B2 (en) * 2009-04-07 2012-12-25 Curators Of The University Of Missouri Mass sensing device for liquid environment
JP5787059B2 (ja) * 2011-03-15 2015-09-30 セイコーエプソン株式会社 圧電振動片、圧電振動子、電子デバイス

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JP2004282495A (ja) 2004-10-07

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