JP4035580B2 - 粒子分析装置 - Google Patents
粒子分析装置 Download PDFInfo
- Publication number
- JP4035580B2 JP4035580B2 JP2004324618A JP2004324618A JP4035580B2 JP 4035580 B2 JP4035580 B2 JP 4035580B2 JP 2004324618 A JP2004324618 A JP 2004324618A JP 2004324618 A JP2004324618 A JP 2004324618A JP 4035580 B2 JP4035580 B2 JP 4035580B2
- Authority
- JP
- Japan
- Prior art keywords
- particles
- light
- particle
- detection light
- accelerating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002245 particle Substances 0.000 title claims description 187
- 150000002500 ions Chemical class 0.000 claims description 62
- 238000001514 detection method Methods 0.000 claims description 44
- 230000001133 acceleration Effects 0.000 claims description 31
- 230000001678 irradiating effect Effects 0.000 claims description 15
- 238000004458 analytical method Methods 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000004949 mass spectrometry Methods 0.000 claims description 3
- 230000001960 triggered effect Effects 0.000 claims description 3
- 230000031700 light absorption Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 19
- 239000000126 substance Substances 0.000 description 13
- 239000000203 mixture Substances 0.000 description 10
- 238000004364 calculation method Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- -1 argon ion Chemical class 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 239000002105 nanoparticle Substances 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 239000004071 soot Substances 0.000 description 3
- 239000000443 aerosol Substances 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000001819 mass spectrum Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 239000013618 particulate matter Substances 0.000 description 2
- 208000023504 respiratory system disease Diseases 0.000 description 2
- 239000012855 volatile organic compound Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 240000001973 Ficus microcarpa Species 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- 125000005605 benzo group Chemical group 0.000 description 1
- 230000000711 cancerogenic effect Effects 0.000 description 1
- 231100000315 carcinogenic Toxicity 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 150000002013 dioxins Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000005040 ion trap Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 125000005575 polycyclic aromatic hydrocarbon group Chemical group 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Description
S・・・粒子
2・・・粒子移動手段(試料導入部)
31・・・光源
L・・・検出光(アルゴンイオンレーザ)
LS・・・散乱光
32・・・光検出器
B・・・加速可能領域
51・・・粒径算出部
EL・・・エネルギ線(パルスレーザ)
4・・・質量分析部
41・・・エネルギ線照射手段(パルスレーザ照射手段)
42・・・加速電極
421・・・正イオン加速電極
422・・・負イオン加速電極
43・・・飛行時間型質量分析部
Claims (6)
- 測定対象である粒子を所定方向に移動させる粒子移動手段と、
前記粒子に対し、検出光を照射する光源と、
その検出光の照射によって生じる散乱光を検出する光検出器と、
その光検出器から出力された光強度信号を受信し、その光強度信号の値に基づいて前記粒子の粒径を算出する粒径算出部と、
前記検出光が照射された粒子に対し、その移動方向と対向する方向からエネルギ線を照射して、その粒子をイオン化し、質量分析を行う質量分析部とを備え、
前記質量分析部が、前記エネルギ線としてパルスレーザを前記粒子に照射するパルスレーザ照射手段を有し、
前記光源が前記粒子に検出光を照射し、その散乱光で生じた光強度信号をトリガとして直後あるいは時間間隔をおいて、前記エネルギ線照射手段が、前記粒子に対してパルスレーザを照射するようにしている粒子分析装置。 - 前記質量分析部が、イオン化された粒子を加速させる加速電極と、加速された粒子が所定空間内を飛行する時間を測定し、その飛行時間に基づいて当該粒子の質量を算出する飛行時間型質量分析部と、を備えている請求項1記載の粒子分析装置。
- 前記加速電極がイオン化された粒子を加速できる加速可能領域内において、前記光源が前記粒子に検出光を照射し、その散乱光で生じた光強度信号をトリガとして直後あるいは時間間隔をおいて、前記エネルギ線照射手段が、前記粒子に対してエネルギ線を照射するようにしている請求項2記載の粒子分析装置。
- 前記加速電極が、正イオンを加速させるための正イオン加速電極と、負イオンを加速させるための負イオン加速電極とから構成されているものである請求項2又は3記載の粒子分析装置。
- 前記光源から照射される検出光の光軸の延長線上の位置に、前記検出光を外部へ放出するための光放出部または前記検出光を吸収するための光吸収部を設けることを特徴とする請求項1、2、3又は4記載の粒子分析装置。
- 前記光検出器は、前記検出光自体を常時入射しない位置であって、前方散乱光を受光できるように配置されていることを特徴とする請求項1、2、3、4又は5記載の粒子分析装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004324618A JP4035580B2 (ja) | 2004-11-09 | 2004-11-09 | 粒子分析装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004324618A JP4035580B2 (ja) | 2004-11-09 | 2004-11-09 | 粒子分析装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006133149A JP2006133149A (ja) | 2006-05-25 |
JP4035580B2 true JP4035580B2 (ja) | 2008-01-23 |
Family
ID=36726812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004324618A Expired - Fee Related JP4035580B2 (ja) | 2004-11-09 | 2004-11-09 | 粒子分析装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4035580B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8373858B2 (en) * | 2008-12-10 | 2013-02-12 | Livermore Instruments, Inc. | System and method for real time determination of size and chemical composition of aerosol particles |
JP2013246023A (ja) * | 2012-05-25 | 2013-12-09 | Azbil Corp | 光学式粒子検出装置及び粒子の検出方法 |
JP6651753B2 (ja) * | 2015-09-09 | 2020-02-19 | 富士電機株式会社 | 微粒子組成分析装置 |
-
2004
- 2004-11-09 JP JP2004324618A patent/JP4035580B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2006133149A (ja) | 2006-05-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Su et al. | Development and characterization of an aerosol time-of-flight mass spectrometer with increased detection efficiency | |
EP2376891B1 (en) | System and method for real time determination of size and chemical composition of aerosol particles | |
US11996279B2 (en) | Methods and systems for detecting aerosol particles | |
Hinz et al. | Instrumentation, data evaluation and quantification in on‐line aerosol mass spectrometry | |
Lithgow et al. | Ambient measurements of metal-containing PM2. 5 in an urban environment using laser-induced breakdown spectroscopy | |
JP2012516428A5 (ja) | ||
Beddows et al. | Prospects of real-time single-particle biological aerosol analysis: A comparison between laser-induced breakdown spectroscopy and aerosol time-of-flight mass spectrometry | |
CN111220515A (zh) | 一种用于在线分析单颗粒中金属元素的装置及方法 | |
Passig et al. | Laser ionization in single‐particle mass spectrometry | |
CN209878547U (zh) | 一种大气颗粒物检测装置 | |
KR101235145B1 (ko) | 연속파 레이저 및 광전증배관을 이용하는 분광분석장치 | |
JP4035580B2 (ja) | 粒子分析装置 | |
Hunt et al. | Analysis of ultrafine and organic particles by aerosol mass spectrometry | |
Sullivan et al. | Characterization of individual aerosol particles | |
JPH08240566A (ja) | レーザ支援による粒子分析 | |
JP2007309895A (ja) | 粒子分析装置 | |
CN115980009A (zh) | 一种单颗粒气溶胶质谱仪以及检测方法 | |
JP2007171064A (ja) | ガス分析用Jet−REMPI装置 | |
CN112074927B (zh) | 用于粒子的质谱分析的装置和方法 | |
KR102100774B1 (ko) | 초미세입자의 크기-성분 측정 장치 및 크기-성분 측정 방법 | |
Gälli et al. | Improved lower particle size limit for aerosol time-of-flight mass spectrometry | |
CN211718047U (zh) | 一种用于在线分析单颗粒中金属元素的装置 | |
JP2007309878A (ja) | 質量分析計 | |
JP3571215B2 (ja) | 高感度超音速分子ジェット多光子イオン化質量分析装置及びその高感度検出方法 | |
JP2941762B2 (ja) | ダイオキシン分析装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060810 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070528 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070605 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070802 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20070828 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20070927 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131109 Year of fee payment: 6 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |