JP4026930B2 - 振動波装置および振動波駆動装置 - Google Patents

振動波装置および振動波駆動装置 Download PDF

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Publication number
JP4026930B2
JP4026930B2 JP15470898A JP15470898A JP4026930B2 JP 4026930 B2 JP4026930 B2 JP 4026930B2 JP 15470898 A JP15470898 A JP 15470898A JP 15470898 A JP15470898 A JP 15470898A JP 4026930 B2 JP4026930 B2 JP 4026930B2
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Japan
Prior art keywords
vibration wave
wave device
contact
elastic body
vibrating
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Expired - Fee Related
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JP15470898A
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English (en)
Japanese (ja)
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JPH11346487A (ja
JPH11346487A5 (https=
Inventor
一郎 奥村
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP15470898A priority Critical patent/JP4026930B2/ja
Priority to US09/320,283 priority patent/US6198201B1/en
Publication of JPH11346487A publication Critical patent/JPH11346487A/ja
Publication of JPH11346487A5 publication Critical patent/JPH11346487A5/ja
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Publication of JP4026930B2 publication Critical patent/JP4026930B2/ja
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP15470898A 1998-06-03 1998-06-03 振動波装置および振動波駆動装置 Expired - Fee Related JP4026930B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP15470898A JP4026930B2 (ja) 1998-06-03 1998-06-03 振動波装置および振動波駆動装置
US09/320,283 US6198201B1 (en) 1998-06-03 1999-06-02 Vibration wave apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15470898A JP4026930B2 (ja) 1998-06-03 1998-06-03 振動波装置および振動波駆動装置

Publications (3)

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JPH11346487A JPH11346487A (ja) 1999-12-14
JPH11346487A5 JPH11346487A5 (https=) 2006-09-21
JP4026930B2 true JP4026930B2 (ja) 2007-12-26

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ID=15590229

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JP15470898A Expired - Fee Related JP4026930B2 (ja) 1998-06-03 1998-06-03 振動波装置および振動波駆動装置

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JP (1) JP4026930B2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4704537B2 (ja) * 2000-01-31 2011-06-15 セイコーインスツル株式会社 超音波モータ及び超音波モータ付き電子機器
JP4965973B2 (ja) * 2006-11-08 2012-07-04 キヤノン株式会社 振動型アクチュエータ
JP4981427B2 (ja) * 2006-12-08 2012-07-18 キヤノン株式会社 振動駆動装置
JP5627258B2 (ja) 2010-03-23 2014-11-19 キヤノン株式会社 振動型アクチュエータおよびその製造方法
JP5930595B2 (ja) 2010-04-06 2016-06-08 キヤノン株式会社 振動型アクチュエータ、振動子及び振動子の製造方法
JP5818500B2 (ja) * 2011-04-26 2015-11-18 キヤノン株式会社 振動波駆動装置とその振動体の製造方法
JP5847906B2 (ja) * 2014-10-02 2016-01-27 キヤノン株式会社 振動体
JP6577989B2 (ja) * 2017-11-02 2019-09-18 株式会社根本杏林堂 超音波モータユニット
JP2022175615A (ja) * 2021-05-14 2022-11-25 セイコーエプソン株式会社 振動モーターおよび駆動装置

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Publication number Publication date
JPH11346487A (ja) 1999-12-14

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