JP4025062B2 - ポジ型感光性組成物 - Google Patents

ポジ型感光性組成物 Download PDF

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Publication number
JP4025062B2
JP4025062B2 JP2001371497A JP2001371497A JP4025062B2 JP 4025062 B2 JP4025062 B2 JP 4025062B2 JP 2001371497 A JP2001371497 A JP 2001371497A JP 2001371497 A JP2001371497 A JP 2001371497A JP 4025062 B2 JP4025062 B2 JP 4025062B2
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Japan
Prior art keywords
group
substituted
fluorine atom
acid
atom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2001371497A
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English (en)
Japanese (ja)
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JP2003173022A (ja
JP2003173022A5 (enExample
Inventor
邦彦 児玉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
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Fujifilm Corp
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Priority to JP2001371497A priority Critical patent/JP4025062B2/ja
Publication of JP2003173022A publication Critical patent/JP2003173022A/ja
Publication of JP2003173022A5 publication Critical patent/JP2003173022A5/ja
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Publication of JP4025062B2 publication Critical patent/JP4025062B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP2001371497A 2001-12-05 2001-12-05 ポジ型感光性組成物 Expired - Fee Related JP4025062B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001371497A JP4025062B2 (ja) 2001-12-05 2001-12-05 ポジ型感光性組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001371497A JP4025062B2 (ja) 2001-12-05 2001-12-05 ポジ型感光性組成物

Publications (3)

Publication Number Publication Date
JP2003173022A JP2003173022A (ja) 2003-06-20
JP2003173022A5 JP2003173022A5 (enExample) 2005-04-07
JP4025062B2 true JP4025062B2 (ja) 2007-12-19

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ID=19180528

Family Applications (1)

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JP2001371497A Expired - Fee Related JP4025062B2 (ja) 2001-12-05 2001-12-05 ポジ型感光性組成物

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JP (1) JP4025062B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI366067B (en) 2003-09-10 2012-06-11 Fujifilm Corp Photosensitive composition and pattern forming method using the same
JP4644457B2 (ja) * 2003-09-10 2011-03-02 富士フイルム株式会社 感光性組成物及びそれを用いたパターン形成方法
US7449573B2 (en) 2004-02-16 2008-11-11 Fujifilm Corporation Photosensitive composition, compound for use in the photosensitive composition, and method of pattern formation with the photosensitive composition
JP4491335B2 (ja) * 2004-02-16 2010-06-30 富士フイルム株式会社 感光性組成物、該感光性組成物に用いる化合物及び該感光性組成物を用いたパターン形成方法
EP1806370B1 (en) 2004-09-30 2013-05-22 JSR Corporation Copolymer and upper film-forming composition
JP2016071243A (ja) * 2014-09-30 2016-05-09 富士フイルム株式会社 樹脂パターンの形成方法、パターンの形成方法、硬化膜、液晶表示装置、有機ｅｌ表示装置、及び、タッチパネル表示装置
JP6571177B2 (ja) * 2015-05-14 2019-09-04 富士フイルム株式会社 パターン形成方法、電子デバイスの製造方法、及び、感活性光線性又は感放射線性樹脂組成物
WO2022065025A1 (ja) * 2020-09-24 2022-03-31 富士フイルム株式会社 感活性光線性又は感放射線性樹脂組成物、レジスト膜、パターン形成方法、電子デバイスの製造方法

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Publication number Publication date
JP2003173022A (ja) 2003-06-20

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