JP4008081B2 - クライオポンプの再生方法 - Google Patents
クライオポンプの再生方法 Download PDFInfo
- Publication number
- JP4008081B2 JP4008081B2 JP33189997A JP33189997A JP4008081B2 JP 4008081 B2 JP4008081 B2 JP 4008081B2 JP 33189997 A JP33189997 A JP 33189997A JP 33189997 A JP33189997 A JP 33189997A JP 4008081 B2 JP4008081 B2 JP 4008081B2
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- passage
- shield
- baffle
- wall surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000011069 regeneration method Methods 0.000 title claims description 12
- 238000010926 purge Methods 0.000 claims description 14
- 238000005192 partition Methods 0.000 claims description 9
- 239000002245 particle Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 230000001172 regenerating effect Effects 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 10
- 230000008929 regeneration Effects 0.000 description 7
- 238000010884 ion-beam technique Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33189997A JP4008081B2 (ja) | 1997-12-02 | 1997-12-02 | クライオポンプの再生方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33189997A JP4008081B2 (ja) | 1997-12-02 | 1997-12-02 | クライオポンプの再生方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11166478A JPH11166478A (ja) | 1999-06-22 |
| JPH11166478A5 JPH11166478A5 (enExample) | 2005-05-19 |
| JP4008081B2 true JP4008081B2 (ja) | 2007-11-14 |
Family
ID=18248882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33189997A Expired - Lifetime JP4008081B2 (ja) | 1997-12-02 | 1997-12-02 | クライオポンプの再生方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4008081B2 (enExample) |
-
1997
- 1997-12-02 JP JP33189997A patent/JP4008081B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11166478A (ja) | 1999-06-22 |
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