JP4003423B2 - 荷電粒子線顕微鏡および荷電粒子線顕微方法 - Google Patents

荷電粒子線顕微鏡および荷電粒子線顕微方法 Download PDF

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JP4003423B2
JP4003423B2 JP2001271167A JP2001271167A JP4003423B2 JP 4003423 B2 JP4003423 B2 JP 4003423B2 JP 2001271167 A JP2001271167 A JP 2001271167A JP 2001271167 A JP2001271167 A JP 2001271167A JP 4003423 B2 JP4003423 B2 JP 4003423B2
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image
sample
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particle beam
charged particle
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JP2003086126A (ja
JP2003086126A5 (enExample
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るり子 常田
雅成 高口
成人 砂子沢
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Hitachi Ltd
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JP2001271167A 2001-09-07 2001-09-07 荷電粒子線顕微鏡および荷電粒子線顕微方法 Expired - Fee Related JP4003423B2 (ja)

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JP2001271167A JP4003423B2 (ja) 2001-09-07 2001-09-07 荷電粒子線顕微鏡および荷電粒子線顕微方法

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JP2001271167A JP4003423B2 (ja) 2001-09-07 2001-09-07 荷電粒子線顕微鏡および荷電粒子線顕微方法

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JP2003086126A5 JP2003086126A5 (enExample) 2005-05-19
JP4003423B2 true JP4003423B2 (ja) 2007-11-07

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Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004047340A (ja) * 2002-07-15 2004-02-12 Jeol Ltd 電子線装置
US9159527B2 (en) 2003-10-16 2015-10-13 Carl Zeiss Microscopy, Llc Systems and methods for a gas field ionization source
US8110814B2 (en) 2003-10-16 2012-02-07 Alis Corporation Ion sources, systems and methods
KR101065074B1 (ko) 2004-01-16 2011-09-15 삼성전자주식회사 투과전자현미경 성분 맵핑용 표준시료 및 이를 이용한 투과전자현미경 성분 맵핑방법
JP4647977B2 (ja) * 2004-11-30 2011-03-09 日本電子株式会社 Ｆｉｂ自動加工時のドリフト補正方法及び装置
WO2007067296A2 (en) * 2005-12-02 2007-06-14 Alis Corporation Ion sources, systems and methods
JP4841407B2 (ja) * 2006-11-22 2011-12-21 株式会社日立ハイテクノロジーズ 電子顕微鏡
JP4901784B2 (ja) 2008-03-05 2012-03-21 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP4891977B2 (ja) * 2008-11-25 2012-03-07 株式会社日立ハイテクノロジーズ 電子顕微鏡
JP5080657B2 (ja) * 2008-12-15 2012-11-21 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
WO2011089911A1 (ja) * 2010-01-25 2011-07-28 株式会社日立ハイテクノロジーズ 荷電粒子線顕微鏡及びそれを用いた測定方法
JP5537460B2 (ja) 2011-02-17 2014-07-02 株式会社日立ハイテクノロジーズ 荷電粒子線顕微鏡及びそれを用いた計測画像の補正方法
JP6774813B2 (ja) * 2016-08-12 2020-10-28 日本電子株式会社 画像処理装置、画像処理方法、および分析装置
CN110582799B (zh) * 2017-04-27 2020-12-15 阿卜杜拉国王科技大学 图像序列对齐系统和方法
DE102017212214A1 (de) * 2017-07-17 2019-01-17 Carl Zeiss Microscopy Gmbh Verfahren zum Aufzeichnen eines Bildes unter Verwendung eines Teilchenmikroskops und Teilchenmikroskop
JP2022185769A (ja) 2021-06-03 2022-12-15 日本電子株式会社 走査型電子顕微鏡、及び、走査型電子顕微鏡を用いた画像生成方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1092354A (ja) * 1996-09-12 1998-04-10 Toshiba Corp 走査型電子顕微鏡の電子光学系自動調節装置及び電子光学系自動調節方法
JP3454052B2 (ja) * 1996-12-05 2003-10-06 株式会社日立製作所 電子線分析装置
JP4069545B2 (ja) * 1999-05-19 2008-04-02 株式会社日立製作所 電子顕微方法及びそれを用いた電子顕微鏡並び生体試料検査方法及び生体検査装置

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