JP4001993B2 - 溶剤処理密閉装置 - Google Patents

溶剤処理密閉装置 Download PDF

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Publication number
JP4001993B2
JP4001993B2 JP01788098A JP1788098A JP4001993B2 JP 4001993 B2 JP4001993 B2 JP 4001993B2 JP 01788098 A JP01788098 A JP 01788098A JP 1788098 A JP1788098 A JP 1788098A JP 4001993 B2 JP4001993 B2 JP 4001993B2
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JP
Japan
Prior art keywords
processing
processed
tank
gas
drive shaft
Prior art date
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Expired - Lifetime
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JP01788098A
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English (en)
Japanese (ja)
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JPH11197583A5 (enExample
JPH11197583A (ja
Inventor
圭治 中矢
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Priority to JP01788098A priority Critical patent/JP4001993B2/ja
Publication of JPH11197583A publication Critical patent/JPH11197583A/ja
Publication of JPH11197583A5 publication Critical patent/JPH11197583A5/ja
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Publication of JP4001993B2 publication Critical patent/JP4001993B2/ja
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JP01788098A 1998-01-14 1998-01-14 溶剤処理密閉装置 Expired - Lifetime JP4001993B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP01788098A JP4001993B2 (ja) 1998-01-14 1998-01-14 溶剤処理密閉装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP01788098A JP4001993B2 (ja) 1998-01-14 1998-01-14 溶剤処理密閉装置

Publications (3)

Publication Number Publication Date
JPH11197583A JPH11197583A (ja) 1999-07-27
JPH11197583A5 JPH11197583A5 (enExample) 2005-08-18
JP4001993B2 true JP4001993B2 (ja) 2007-10-31

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ID=11956020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP01788098A Expired - Lifetime JP4001993B2 (ja) 1998-01-14 1998-01-14 溶剤処理密閉装置

Country Status (1)

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JP (1) JP4001993B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006297199A (ja) * 2005-04-15 2006-11-02 Keiji Nakaya 密閉処理装置
FR2932108B1 (fr) 2008-06-10 2019-07-05 Soitec Polissage de couches de germanium

Also Published As

Publication number Publication date
JPH11197583A (ja) 1999-07-27

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