JP3996977B2 - 成膜装置およびそのターゲットの交換方法 - Google Patents

成膜装置およびそのターゲットの交換方法 Download PDF

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Publication number
JP3996977B2
JP3996977B2 JP17704597A JP17704597A JP3996977B2 JP 3996977 B2 JP3996977 B2 JP 3996977B2 JP 17704597 A JP17704597 A JP 17704597A JP 17704597 A JP17704597 A JP 17704597A JP 3996977 B2 JP3996977 B2 JP 3996977B2
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Japan
Prior art keywords
cathode
target
current introduction
vacuum chamber
introduction plate
Prior art date
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Expired - Lifetime
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JP17704597A
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English (en)
Japanese (ja)
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JPH1121665A5 (enExample
JPH1121665A (ja
Inventor
貴志 末吉
健太郎 新郷
初彦 柴崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Priority to JP17704597A priority Critical patent/JP3996977B2/ja
Publication of JPH1121665A publication Critical patent/JPH1121665A/ja
Publication of JPH1121665A5 publication Critical patent/JPH1121665A5/ja
Application granted granted Critical
Publication of JP3996977B2 publication Critical patent/JP3996977B2/ja
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Expired - Lifetime legal-status Critical Current

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JP17704597A 1997-07-02 1997-07-02 成膜装置およびそのターゲットの交換方法 Expired - Lifetime JP3996977B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17704597A JP3996977B2 (ja) 1997-07-02 1997-07-02 成膜装置およびそのターゲットの交換方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17704597A JP3996977B2 (ja) 1997-07-02 1997-07-02 成膜装置およびそのターゲットの交換方法

Publications (3)

Publication Number Publication Date
JPH1121665A JPH1121665A (ja) 1999-01-26
JPH1121665A5 JPH1121665A5 (enExample) 2005-05-12
JP3996977B2 true JP3996977B2 (ja) 2007-10-24

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ID=16024183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17704597A Expired - Lifetime JP3996977B2 (ja) 1997-07-02 1997-07-02 成膜装置およびそのターゲットの交換方法

Country Status (1)

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JP (1) JP3996977B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002020862A (ja) * 2000-07-06 2002-01-23 Sony Corp スパッタリング装置

Also Published As

Publication number Publication date
JPH1121665A (ja) 1999-01-26

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