JPH1121665A5 - - Google Patents

Info

Publication number
JPH1121665A5
JPH1121665A5 JP1997177045A JP17704597A JPH1121665A5 JP H1121665 A5 JPH1121665 A5 JP H1121665A5 JP 1997177045 A JP1997177045 A JP 1997177045A JP 17704597 A JP17704597 A JP 17704597A JP H1121665 A5 JPH1121665 A5 JP H1121665A5
Authority
JP
Japan
Prior art keywords
cathode
target
current introducing
plate
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997177045A
Other languages
English (en)
Japanese (ja)
Other versions
JP3996977B2 (ja
JPH1121665A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP17704597A priority Critical patent/JP3996977B2/ja
Priority claimed from JP17704597A external-priority patent/JP3996977B2/ja
Publication of JPH1121665A publication Critical patent/JPH1121665A/ja
Publication of JPH1121665A5 publication Critical patent/JPH1121665A5/ja
Application granted granted Critical
Publication of JP3996977B2 publication Critical patent/JP3996977B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP17704597A 1997-07-02 1997-07-02 成膜装置およびそのターゲットの交換方法 Expired - Lifetime JP3996977B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17704597A JP3996977B2 (ja) 1997-07-02 1997-07-02 成膜装置およびそのターゲットの交換方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17704597A JP3996977B2 (ja) 1997-07-02 1997-07-02 成膜装置およびそのターゲットの交換方法

Publications (3)

Publication Number Publication Date
JPH1121665A JPH1121665A (ja) 1999-01-26
JPH1121665A5 true JPH1121665A5 (enExample) 2005-05-12
JP3996977B2 JP3996977B2 (ja) 2007-10-24

Family

ID=16024183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17704597A Expired - Lifetime JP3996977B2 (ja) 1997-07-02 1997-07-02 成膜装置およびそのターゲットの交換方法

Country Status (1)

Country Link
JP (1) JP3996977B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002020862A (ja) * 2000-07-06 2002-01-23 Sony Corp スパッタリング装置

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