JP3969935B2 - 温度計測機能を有する荷電粒子ビーム装置 - Google Patents

温度計測機能を有する荷電粒子ビーム装置 Download PDF

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JP3969935B2
JP3969935B2 JP2000203779A JP2000203779A JP3969935B2 JP 3969935 B2 JP3969935 B2 JP 3969935B2 JP 2000203779 A JP2000203779 A JP 2000203779A JP 2000203779 A JP2000203779 A JP 2000203779A JP 3969935 B2 JP3969935 B2 JP 3969935B2
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charged particle
particle beam
processing
sample
target sample
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Japanese (ja)
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JP2002025494A5 (enExample
JP2002025494A (ja
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昌章 杉山
守弘 岡田
英巳 小池
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Hitachi Ltd
Nippon Steel Corp
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Hitachi Ltd
Nippon Steel Corp
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JP2000203779A 2000-07-05 2000-07-05 温度計測機能を有する荷電粒子ビーム装置 Expired - Fee Related JP3969935B2 (ja)

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JP2000203779A JP3969935B2 (ja) 2000-07-05 2000-07-05 温度計測機能を有する荷電粒子ビーム装置

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JP2000203779A JP3969935B2 (ja) 2000-07-05 2000-07-05 温度計測機能を有する荷電粒子ビーム装置

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JP2002025494A JP2002025494A (ja) 2002-01-25
JP2002025494A5 JP2002025494A5 (enExample) 2005-03-17
JP3969935B2 true JP3969935B2 (ja) 2007-09-05

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Publication number Priority date Publication date Assignee Title
JP5304011B2 (ja) * 2008-04-24 2013-10-02 新日鐵住金株式会社 局所領域温度計測装置を備えた集束イオンビーム装置及び局所領域の温度計測方法
US9490185B2 (en) * 2012-08-31 2016-11-08 Axcelis Technologies, Inc. Implant-induced damage control in ion implantation

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